4H-N/6H-N SiC Wafer Reasearch imveliso Dummy grade Dia150mm Silicon carbide substrate

Inkcazelo emfutshane:

Sinokubonelela ngobushushu obuphezulu be-superconducting ifilimu encinci yefilimu, iifilimu ezizibuthe ezibhityileyo kunye ne-ferroelectric thin film substrate, i-semiconductor crystal, i-crystal optical, i-laser crystal materials, kwangaxeshanye ibonelela ngokuqhelaniswa, ukusika ikristale, ukugaya, ukupolisha kunye nezinye iinkonzo zokusetyenzwa.Ii-substrates zethu ze-SiC zivela kwi-Tankeblue Factory e-China.

Thumela i-imeyile kuthi

Iinkcukacha zeMveliso

Iithegi zeMveliso

I-intshi eyi-6 ye-silicon carbide (i-SiC) ububanzi be-substrate inkcazo

IBanga	Zero MPD	Imveliso	IBanga loPhando	IBanga leDummy
Ububanzi	150.0mm±0.25mm
Ukutyeba	4H-N	350um±25um
	4H-SI	500um±25um
I-Wafer Orientation	Kwi-axis : <0001> ± 0.5 ° ye-4H-SI I-off axis : 4.0 ° ukuya <1120>±0.5° ye-4H-N
IFlethi yaseprayimari	{10-10} ±5.0°
Ubude beFlethi obuPhambili	47.5mm±2.5mm
Ukukhutshwa komda	3mm
TTV / isaphetha / Warp	≤15um/≤40um/≤60um
Ukuxinana kweMibhobho	≤1cm-2	≤5cm-2	≤15cm-2	≤50cm-2
Ukuxhathisa 4H-N 4H-SI	0.015~0.028Ω!cm
	≥1E5Ω!cm
Uburhabaxa	I-Polish Ra ≤1nm CMP Ra≤0.5nm
#Izaphulelo ngokukhanya okukhulu	Akukho nanye		I-1 ivumelekile,≤2mm	Ubude obongezelekayo ≤10mm, ubude obunye≤2mm
*Iipleyiti zeHex ngokukhanya okuphezulu	Indawo eyongezelekayo ≤1%		Indawo eyongezelekayo ≤ 2%	Indawo eyongezelekayo ≤ 5%
*Iindawo zohlobo lwePolytype ngokukhanya okukhulu kokukhanya	Akukho nanye		Indawo eyongezelekayo ≤ 2%	Indawo eyongezelekayo ≤ 5%
*&Ukukrwempa ngokukhanya okuphezulu	Imikrwelo emi-3 ukuya kwi-1 x yafer idayamitha yobude obuqokelelweyo		Imikrwelo emi-5 ukuya kwi-1 x yafer idayamitha yobude obuqokelelweyo	Imikrwelo emi-5 ukuya kwi-1 x yafer idayamitha yobude obuqokelelweyo
chip edge	Akukho nanye		3 ivumelekile ,≤0.5mm nganye	5 ivunyelwe,≤1mm nganye
Ungcoliseko ngokukhanya okuphezulu	Akukho nanye

Intengiso kunye neNkonzo yabaThengi

Ukuthengwa kwezinto

Isebe lokuthenga imathiriyeli linoxanduva lokuqokelela zonke iimathiriyeli ekrwada ezifunekayo ukuvelisa imveliso yakho.Ukulandeleka okupheleleyo kwazo zonke iimveliso kunye nezixhobo, kubandakanywa uhlalutyo lweekhemikhali kunye nomzimba zihlala zikhona.

Umgangatho

Ngexesha nasemva kokwenziwa okanye ukwenziwa kweemveliso zakho, isebe lolawulo lomgangatho libandakanyeka ekuqinisekiseni ukuba zonke izixhobo kunye nokunyamezelana kuyahlangabezana okanye kudlule ingcaciso yakho.

Inkonzo

Siyazingca ngokuba nabasebenzi bobunjineli beentengiso abanamava angaphezu kweminyaka emi-5 kushishino lwesemiconductor.Baqeqeshelwe ukuphendula imibuzo yobugcisa kunye nokubonelela ngeekowuteshini ngexesha elifanelekileyo kwiimfuno zakho.

sisecaleni kwakho nanini na xa unengxaki, kwaye uyisombulule kwiiyure eziyi-10.