50.8mm/100mm AlN Template kwiNPSS/FSS AlN template kwisafire

Inkcazelo emfutshane:

I-AlN-On-Sapphire ibhekisa kwindibaniselwano yezinto apho iifilimu ze-aluminiyam nitride zikhuliswa kwii-substrates zeSapphire.Kulo lwakhiwo, umgangatho ophezulu wefilimu ye-aluminium nitride inokukhuliswa nge-chemical vapor deposition (CVD) okanye i-organometrical chemical vapor deposition (MOCVD), eyenza ifilimu ye-aluminium nitride kunye ne-sapphire substrate ibe nokudibanisa okulungileyo.Iingenelo zesi sakhiwo kukuba i-aluminium nitride ine-conductivity ephezulu ye-thermal, ukuzinza kweekhemikhali eziphezulu kunye neempawu ezibalaseleyo ze-optical, ngelixa i-sapphire substrate ineempawu ezibalaseleyo zomatshini kunye ne-thermal kunye nokungafihli.


Iinkcukacha zeMveliso

Iithegi zeMveliso

AlN-On-Sapphire

I-AlN-On-Sapphire ingasetyenziselwa ukwenza izixhobo ezahlukeneyo zombane, ezinje:
1. Ii-chips ze-LED: Ii-chips ze-LED zihlala zenziwe ngeefilimu ze-aluminium nitride kunye nezinye izinto.Ukusebenza kunye nokuzinza kwee-led kungaphuculwa ngokusebenzisa i-AlN-On-Sapphire wafers njenge-substrate ye-chips ze-LED.
2. I-Lasers: Ii-wafers ze-AlN-On-Sapphire nazo zingasetyenziselwa njenge-substrates ye-laser, esetyenziswa ngokuqhelekileyo kunyango, unxibelelwano, kunye nokulungiswa kwezinto.
3. Iiseli zelanga: Ukwenziwa kweeseli zelanga kufuna ukusetyenziswa kwezinto ezifana ne-aluminium nitride.I-AlN-On-Sapphire njenge-substrate inokuphucula ukusebenza kakuhle kunye nobomi beeseli zelanga.
4. Ezinye izixhobo ze-optoelectronic: Ii-wafers ze-AlN-On-Sapphire nazo zingasetyenziselwa ukwenza ii-photodetectors, izixhobo ze-optoelectronic, kunye nezinye izixhobo ze-optoelectronic.

Ukuqukumbela, ii-wafers ze-AlN-On-Sapphire zisetyenziswa ngokubanzi kwintsimi ye-opto-electrical ngenxa ye-conductivity ephezulu ye-thermal, ukuzinza kweekhemikhali eziphezulu, ilahleko ephantsi kunye neempawu ezibalaseleyo ze-optical.

50.8mm/100mm AlN Template kwiNPSS/FSS

Into Amagqabantshintshi
Inkcazo Itemplate ye-AlN-on-NPSS Itemplate ye-AlN-on-FSS
Idayamitha yewafer 50.8mm, 100mm
ISubstrate c-inqwelomoya NPSS c-inqwelomoya Planar Sapphire (FSS)
Ukutyeba kweSubstrate 50.8mm, 100mmc-inqwelomoya iPlanar Sapphire (FSS)100mm : 650 um
Ukutyeba kwe-epi-layer ye-AIN 3 ~ 4 um (ithagethi: 3.3um)
Ukuqhuba Ukugquma

Umphezulu

Njengoko ukhulile
RMS<1nm RMS<2nm
Ngasemva Igayiwe
FWHM(002)XRC < 150 arcsec < 150 arcsec
I-FWHM(102)XRC < 300 arcsec < 300 arcsec
Ukungabandakanywa kuMda < 2mm < 3mm
Ukuqhelaniswa neflethi ephambili inqwelomoya+0.1°
Ubude beflethi bokuqala 50.8mm: 16+/-1 mm 100mm: 30+/-1 mm
Iphakheji Ipakishwe kwibhokisi yokuthumela okanye kwisitya esinye se-wafer

Idayagram eneenkcukacha

Ithemplethi yeFSS AlN kwisafire3
Ithemplethi yeFSS AlN kwisafire4

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