I-4H-N/6H-N SiC Wafer Research production Dummy grade Dia150mm Silicon carbide substrate

Inkcazo emfutshane:

Singabonelela nge-substrate yefilimu encinci eqhuba ubushushu obuphezulu, iifilimu ezincinci zemagnethi kunye ne-substrate yefilimu encinci ye-ferroelectric, ikristale ye-semiconductor, ikristale ye-optical, izixhobo zekristale ye-laser, kwangaxeshanye sibonelela ngolwalathiso, ukusika ikristale, ukugaya, ukupolisha kunye nezinye iinkonzo zokucubungula. Ii-substrate zethu ze-SiC zivela kwiTankeblue Factory eTshayina.


Iimbonakalo

Iinkcukacha zesiseko se-silicon carbide (SiC) esingububanzi obuyi-6 intshi

Ibanga

Akukho MPD

Imveliso

Ibanga loPhando

Ibanga elingeyonyani

Ububanzi

150.0mm±0.25mm

Ubukhulu

4H-N

350um±25um

4H-SI

500um±25um

Uqeqesho lweWafer

Kwi-axis:<0001>±0.5° ye-4H-SI
I-axis evaliweyo: 4.0°ukuya<1120>±0.5°kwi-4H-N

Iflethi Eyintloko

{10-10}±5.0°

Ubude obuPhambili obuSicaba

47.5mm±2.5mm

Ukukhutshwa komda

3mm

I-TTV/Isaphetha/I-Warp

≤15um/≤40um/≤60um

Uxinano lweeMipayipi ezincinci

≤1cm-2

≤5cm-2

≤15cm-2

≤50cm-2

Ukumelana 4H-N 4H-SI

0.015~0.028Ω!cm

≥1E5Ω!cm

Uburhabaxa

I-Polish Ra ≤1nm CMP Ra≤0.5nm

#Iqhekeka ngenxa yokukhanya okuphezulu

Akukho nanye

I-1 ivumelekile, ≤2mm

Ubude obuqokelelweyo ≤10mm, ubude obunye ≤2mm

*Iipleyiti zeHex ezikhanyiswe ngokukhanya okuphezulu

Indawo eqokelelweyo ≤1%

Indawo eqokelelweyo ≤ 2%

Indawo eqokelelweyo ≤ 5%

*Iindawo zePolytype ngokukhanya okuphezulu

Akukho nanye

Indawo eqokelelweyo ≤ 2%

Indawo eqokelelweyo ≤ 5%

*&Ikrwela ngenxa yokukhanya okuphezulu

Imikrwelo emi-3 ukuya kwi-1 x ubude obudibeneyo be-wafer ububanzi

Imikrwelo emi-5 ukuya kwi-1 x ubude obudibeneyo be-wafer ububanzi

Ukukrwela oku-5 ukuya kwi-1 x ubude obuqokelelweyo be-wafer ububanzi

Itshiphu yomphetho

Akukho nanye

Kuvunyelwe ii-3, ≤0.5mm nganye

5 zivumelekile, ≤1mm nganye

Ungcoliseko lokukhanya okuphezulu

Akukho nanye

Intengiso kunye neNkonzo yaBathengi

Ukuthengwa kwezinto

Isebe lokuthenga izinto linoxanduva lokuqokelela zonke izinto ezifunekayo ukuvelisa imveliso yakho. Ukulandeleka okupheleleyo kwazo zonke iimveliso kunye nezinto, kuquka uhlalutyo lweekhemikhali kunye nolwezinto ezibonakalayo kusoloko kufumaneka.

Umgangatho

Ngexesha nasemva kokwenziwa okanye ukucutshungulwa kweemveliso zakho, isebe lolawulo lomgangatho liyabandakanyeka ekuqinisekiseni ukuba zonke izixhobo kunye nokunyamezelana ziyahlangabezana okanye zidlula iinkcukacha zakho.

Inkonzo

Siyazingca ngokuba nabasebenzi bobunjineli bokuthengisa abanamava angaphezu kweminyaka emi-5 kwishishini le-semiconductor. Baqeqeshwe ukuphendula imibuzo yobugcisa kunye nokubonelela ngeekowuteshini ngexesha elifanelekileyo kwiimfuno zakho.

Sisecaleni kwakho nangaliphi na ixesha xa unengxaki, kwaye siyisombulule kwiiyure ezili-10.

Umzobo oneenkcukacha

Isiseko se-silicon carbide (1)
Isiseko se-silicon carbide (2)

  • Ngaphambili:
  • Okulandelayo:

  • Bhala umyalezo wakho apha uze uwuthumele kuthi