4H-N/6H-N SiC Wafer Reasearch imveliso Dummy grade Dia150mm Silicon carbide substrate

Inkcazelo emfutshane:

Sinokubonelela ngobushushu obuphezulu be-superconducting ifilimu encinci yefilimu, iifilimu ezizibuthe ezibhityileyo kunye ne-ferroelectric thin film substrate, i-semiconductor crystal, i-crystal optical, i-laser crystal materials, kwangaxeshanye ibonelela ngokuqhelaniswa, ukusika ikristale, ukugaya, ukupolisha kunye nezinye iinkonzo zokusetyenzwa. Ii-substrates zethu ze-SiC zivela kwi-Tankeblue Factory e-China.


Iinkcukacha zeMveliso

Iithegi zeMveliso

I-6 intshi ubukhulu besilicon carbide (SiC) ukucaciswa kwesubstrate

IBanga

Zero MPD

Imveliso

IBanga loPhando

IBanga leDummy

Ububanzi

150.0mm±0.25mm

Ukutyeba

4H-N

350um±25um

4H-SI

500um±25um

Iwafer Orientation

Kwi-axis : <0001> ± 0.5 ° ye-4H-SI
I-off axis : 4.0 ° ukuya <1120>±0.5° ye-4H-N

IFlethi yaseprayimari

{10-10} ±5.0°

Ubude beFlethi obuPhambili

47.5mm±2.5mm

Ukukhutshwa komda

3mm

TTV / isaphetha / Warp

≤15um/≤40um/≤60um

Ukuxinana kweMibhobho

≤1cm-2

≤5cm-2

≤15cm-2

≤50cm-2

Ukuxhathisa 4H-N 4H-SI

0.015~0.028Ω!cm

≥1E5Ω!cm

Uburhabaxa

I-Polish Ra ≤1nm CMP Ra≤0.5nm

#Izaphulelo ngokukhanya okukhulu

Akukho nanye

I-1 ivumelekile,≤2mm

Ubude obongezelekayo ≤10mm, ubude obunye≤2mm

*Iipleyiti zeHex ngokukhanya okuphezulu

Indawo eyongezelekayo ≤1%

Indawo eyongezelekayo ≤ 2%

Indawo eyongezelekayo ≤ 5%

*Iindawo zohlobo lwePolytype ngokukhanya okuphezulu kokuqina

Akukho nanye

Indawo eyongezelekayo ≤ 2%

Indawo eyongezelekayo ≤ 5%

*&Ukukrwempa ngokukhanya okuphezulu

Imikrwelo emi-3 ukuya kwi-1 x yafer idayamitha yobude obuqokelelweyo

Imikrwelo emi-5 ukuya kwi-1 x yafer idayamitha yobude obuqokelelweyo

Imikrwelo emi-5 ukuya kwi-1 x yafer idayamitha yobude obuqokelelweyo

chip edge

Akukho nanye

3 ivumelekile,≤0.5mm nganye

5 ivunyelwe ,≤1mm nganye

Ungcoliseko ngokukhanya okuphezulu

Akukho nanye

Intengiso kunye neNkonzo yabaThengi

Ukuthengwa kwezinto

Isebe lokuthenga imathiriyeli linoxanduva lokuqokelela zonke iimathiriyeli ekrwada ezifunekayo ukuvelisa imveliso yakho. Ukulandeleka okupheleleyo kwazo zonke iimveliso kunye nezixhobo, kubandakanywa uhlalutyo lweekhemikhali kunye nomzimba zihlala zikhona.

Umgangatho

Ngexesha nasemva kokwenziwa okanye ukwenziwa kweemveliso zakho, isebe lolawulo lomgangatho libandakanyeka ekuqinisekiseni ukuba zonke izixhobo kunye nokunyamezelana kuyahlangabezana okanye kudlule ingcaciso yakho.

Inkonzo

Siyazingca ngokuba nabasebenzi bobunjineli beentengiso abanamava angaphezu kweminyaka emi-5 kushishino lwesemiconductor. Baqeqeshelwa ukuphendula imibuzo yobugcisa kunye nokubonelela ngeekowuteshini ngexesha elifanelekileyo kwiimfuno zakho.

sisecaleni kwakho nanini na xa unengxaki, kwaye uyisombulule kwiiyure eziyi-10.

Idayagram eneenkcukacha

I-silicon ye-carbide substrate (1)
I-silicon carbide substrate (2)

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  • Okulandelayo:

  • Bhala umyalezo wakho apha kwaye uwuthumele kuthi