I-4H-N/6H-N SiC Wafer Research production Dummy grade Dia150mm Silicon carbide substrate
Iinkcukacha zesiseko se-silicon carbide (SiC) esingububanzi obuyi-6 intshi
| Ibanga | Akukho MPD | Imveliso | Ibanga loPhando | Ibanga elingeyonyani |
| Ububanzi | 150.0mm±0.25mm | |||
| Ubukhulu | 4H-N | 350um±25um | ||
| 4H-SI | 500um±25um | |||
| Uqeqesho lweWafer | Kwi-axis:<0001>±0.5° ye-4H-SI | |||
| Iflethi Eyintloko | {10-10}±5.0° | |||
| Ubude obuPhambili obuSicaba | 47.5mm±2.5mm | |||
| Ukukhutshwa komda | 3mm | |||
| I-TTV/Isaphetha/I-Warp | ≤15um/≤40um/≤60um | |||
| Uxinano lweeMipayipi ezincinci | ≤1cm-2 | ≤5cm-2 | ≤15cm-2 | ≤50cm-2 |
| Ukumelana 4H-N 4H-SI | 0.015~0.028Ω!cm | |||
| ≥1E5Ω!cm | ||||
| Uburhabaxa | I-Polish Ra ≤1nm CMP Ra≤0.5nm | |||
| #Iqhekeka ngenxa yokukhanya okuphezulu | Akukho nanye | I-1 ivumelekile, ≤2mm | Ubude obuqokelelweyo ≤10mm, ubude obunye ≤2mm | |
| *Iipleyiti zeHex ezikhanyiswe ngokukhanya okuphezulu | Indawo eqokelelweyo ≤1% | Indawo eqokelelweyo ≤ 2% | Indawo eqokelelweyo ≤ 5% | |
| *Iindawo zePolytype ngokukhanya okuphezulu | Akukho nanye | Indawo eqokelelweyo ≤ 2% | Indawo eqokelelweyo ≤ 5% | |
| *&Ikrwela ngenxa yokukhanya okuphezulu | Imikrwelo emi-3 ukuya kwi-1 x ubude obudibeneyo be-wafer ububanzi | Imikrwelo emi-5 ukuya kwi-1 x ubude obudibeneyo be-wafer ububanzi | Ukukrwela oku-5 ukuya kwi-1 x ubude obuqokelelweyo be-wafer ububanzi | |
| Itshiphu yomphetho | Akukho nanye | Kuvunyelwe ii-3, ≤0.5mm nganye | 5 zivumelekile, ≤1mm nganye | |
| Ungcoliseko lokukhanya okuphezulu | Akukho nanye
| |||
Intengiso kunye neNkonzo yaBathengi
Ukuthengwa kwezinto
Isebe lokuthenga izinto linoxanduva lokuqokelela zonke izinto ezifunekayo ukuvelisa imveliso yakho. Ukulandeleka okupheleleyo kwazo zonke iimveliso kunye nezinto, kuquka uhlalutyo lweekhemikhali kunye nolwezinto ezibonakalayo kusoloko kufumaneka.
Umgangatho
Ngexesha nasemva kokwenziwa okanye ukucutshungulwa kweemveliso zakho, isebe lolawulo lomgangatho liyabandakanyeka ekuqinisekiseni ukuba zonke izixhobo kunye nokunyamezelana ziyahlangabezana okanye zidlula iinkcukacha zakho.
Inkonzo
Siyazingca ngokuba nabasebenzi bobunjineli bokuthengisa abanamava angaphezu kweminyaka emi-5 kwishishini le-semiconductor. Baqeqeshwe ukuphendula imibuzo yobugcisa kunye nokubonelela ngeekowuteshini ngexesha elifanelekileyo kwiimfuno zakho.
Sisecaleni kwakho nangaliphi na ixesha xa unengxaki, kwaye siyisombulule kwiiyure ezili-10.



