I-LT Lithium Tantalate (LiTaO3) Crystal 2inch/3inch/4inch/6inch Orientaiton Y-42°/36°/108° Ubukhulu 250-500um
Iiparameter zobugcisa
| Igama | I-LiTaO3 yebanga lokubona | Inqanaba letafile yesandi iLiTaO3 |
| I-Axial | Ukusika okungu-Z + / - 0.2 ° | 36 ° ukusika u-Y / 42 ° ukusika u-Y / X ukusika(+ / - 0.2 °) |
| Ububanzi | 76.2mm + / - 0.3mm/100±0.2mm | 76.2mm + /-0.3mm100mm + /-0.3mm 0r 150±0.5mm |
| Indiza yeDatum | 22mm + / - 2mm | 22mm + /-2mm32mm + /-2mm |
| Ubukhulu | 500um + /-5mm1000um + /-5mm | 500um + /-20mm350um + /-20mm |
| I-TTV | ≤ 10um | ≤ 10um |
| Ubushushu beCurie | 605 °C + / - 0.7 °C (indlela ye-DTA) | 605 °C + / -3 °C (indlela ye-DTA |
| Umgangatho womphezulu | Ukupolisha okumacala amabini | Ukupolisha okumacala amabini |
| Imiphetho enemiphetho emincinci | ukujikeleza komphetho | ukujikeleza komphetho |
Iimpawu eziphambili
1. Ulwakhiwo lweCrystal kunye nokusebenza kombane
· Uzinzo lweCrystallographic: 100% 4H-SiC polytype dominance, akukho zi-inclusions ezininzi ze-crystalline (umz., 6H/15R), kunye ne-XRD rocking curve epheleleyo kwi-half-maximum (FWHM) ≤32.7 arcsec.
· UkuHamba Okuphezulu Kokuthwala: UkuHamba kwee-elektroni ezingama-5,400 cm²/V·s (4H-SiC) kunye nokuHamba kwemingxuma engama-380 cm²/V·s, okuvumela uyilo lwezixhobo ezisebenzisa i-frequency ephezulu.
·Ukuqina kwemitha: Imelana nokukhanyiswa kwemitha ye-neutron ye-1 MeV kunye nomda womonakalo wokufuduka we-1×10¹⁵ n/cm², ifanelekile kwizixhobo zeenqwelo-moya kunye nezenyukliya.
2. Iipropati zobushushu kunye nezoomatshini
· Ukuqhuba okungaqhelekanga kobushushu: 4.9 W/cm·K (4H-SiC), okuphindwe kathathu kune-silicon, okuxhasa ukusebenza okungaphezulu kwama-200°C.
· I-Coefficient Yokwandisa Ubushushu Obuphantsi: I-CTE ye-4.0×10⁻⁶/K (25–1000°C), iqinisekisa ukuhambelana nokupakishwa okusekwe kwi-silicon kwaye inciphisa uxinzelelo lobushushu.
3. Ulawulo olugqibeleleyo kunye nokuCwangcisa ngokuchanekileyo
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· Uxinano lweMicropipe: <0.3 cm⁻² (ii-wafers ezi-8-intshi), uxinano lwe-dislocation <1,000 cm⁻² (kuqinisekiswe nge-KOH etching).
· Umgangatho womphezulu: I-CMP-polished ukuya kwi-Ra <0.2 nm, ihlangabezana neemfuno ze-EUV lithography-grade flatness.
Izicelo eziphambili
| Idomeyini | Iziganeko zesicelo | Iingenelo zobugcisa |
| Unxibelelwano lwe-Optical | Iimodyuli ze-100G/400G ze-laser, ii-silicon photonics hybrid | Ii-substrates zembewu ye-InP zivumela i-bandgap ethe ngqo (1.34 eV) kunye ne-heteroepitaxy esekelwe kwi-Si, nto leyo enciphisa ukulahleka kwe-optical coupling. |
| Iimoto Ezintsha Zamandla | Ii-inverters ze-800V eziphezulu ze-voltage, iitshaja ezikwibhodi (OBC) | Ii-substrates ze-4H-SiC zimelana ne->1,200 V, nto leyo enciphisa ilahleko zokuqhuba nge-50% kunye nomthamo wenkqubo nge-40%. |
| Unxibelelwano lwe-5G | Izixhobo ze-RF ze-Millimeter-wave (PA/LNA), izixhobo zokukhulisa amandla zesikhululo esisezantsi | Ii-substrates ze-SiC ezizi-semi-insulating (resistivity >10⁵ Ω·cm) zivumela ukuhlanganiswa kwe-passive ye-high-frequency (60 GHz+). |
| Izixhobo zeMveliso | Izinzwa zobushushu obuphezulu, ii-transformers zangoku, iimonitha ze-reactor zenyukliya | Ii-substrates zembewu ye-InSb (0.17 eV bandgap) zinika uvakalelo lwemagnethi olufikelela kwi-300%@10 T. |
IiWafers zeLiTaO₃ - Iimpawu eziphambili
1. Ukusebenza kwePiezoelectric okuBalaseleyo
· Ii-coefficients eziphezulu ze-piezoelectric (d₃₃~8-10 pC/N, K²~0.5%) zivumela izixhobo ze-SAW/BAW ezisebenza rhoqo ezinelahleko yokufakelwa <1.5dB kwiifilitha ze-5G RF
· Ukudibanisa okugqwesileyo kwe-electromechanical kuxhasa uyilo lwe-wide-bandwidth (≥5%) lwezicelo ze-sub-6GHz kunye ne-mmWave
2. Iipropati zoKubona
· Ukucaca kwe-Broadband (>70% yokudluliselwa ukusuka kwi-400-5000nm) kwiimodulators ze-electro-optic ezifikelela kwi-bandwidth ye->40GHz
· Ubuthathaka obuqinileyo bokukhanya obungengomgca (χ⁽²⁾~30pm/V) bunceda ukuveliswa kwe-harmonic yesibini (SHG) ngokufanelekileyo kwiinkqubo ze-laser
3. Uzinzo lweNdalo
· Ubushushu obuphezulu beCurie (600°C) bugcina impendulo ye-piezoelectric kwiindawo ezikumgangatho weemoto (-40°C ukuya kwi-150°C)
· Ukungakwazi kweekhemikhali ukumelana nee-asidi/ii-alkali (pH1-13) kuqinisekisa ukuthembeka kwizicelo ze-sensor zoshishino
4. Amandla okwenza ngokwezifiso
· Ubunjineli bokuqhelanisa: X-cut (51°), Y-cut (0°), Z-cut (36°) kwiimpendulo zepiezoelectric ezenzelwe wena.
· Iindlela zokusebenzisa i-doping: I-Mg-doped (ukumelana nomonakalo we-optical), i-Zn-doped (i-d₃₃ ephuculweyo)
· Ukugqitywa komphezulu: Ukupholisha okulungele i-Epitaxial (Ra<0.5nm), i-ITO/Au metallization
IiWafers zeLiTaO₃ - Izicelo eziphambili
1. Iimodyuli zeRF Front-End
· Izihluzi ze-5G NR SAW (Ibhendi n77/n79) ezine-coefficient yobushushu be-frequency (TCF) <|-15ppm/°C|
· Iiresonator ze-BAW ezibanzi kakhulu ze-WiFi 6E/7 (5.925-7.125GHz)
2. Iifotoniki eziDibeneyo
· Iimodulators zeMach-Zehnder ezinesantya esiphezulu (>100Gbps) zonxibelelwano oluhambelanayo lwe-optical
· Ii-QWIP infrared detectors ezine-cutoff wavelengths ezihlengahlengiswayo ukusuka kwi-3-14μm
3. Izixhobo zombane zeemoto
· Izinzwa zokupaka ze-Ultrasonic ezine-frequency yokusebenza engaphezulu kwe-200kHz
· Iitransducer zeTPMS piezoelectric ezisindayo kwiqondo lobushushu eliphakathi kwe -40°C ukuya kwi-125°C
4. Iinkqubo zoKhuselo
· Izihluzi ze-EW receiver ezinokulahlwa ngaphandle kwebhendi engaphezulu kwe-60dB
· Iifestile ze-IR ezifuna imijukujelwa ezithumela imitha ye-MWIR eyi-3-5μm
5. Iiteknoloji Ezisakhasayo
· Ii-transducers ze-optomechanical quantum zokuguqula i-microwave ibe yi-optical
· Ii-PMUT arrays ze-medical ultrasound imaging (isisombululo se->20MHz)
IiWafers zeLiTaO₃ - Iinkonzo zeXKH
1. Ulawulo lweCandelo loNikezelo
· Ukulungiswa kwebhowule ukuya kwiwafer kunye nexesha lokunikezelwa kweenkonzo zeeveki ezi-4 ngokweemfuno ezisemgangathweni
· Imveliso ephuculiweyo ngexabiso inika inzuzo yexabiso eliyi-10-15% xa kuthelekiswa nabakhuphisana nabo
2. Izisombululo ezenziwe ngokwezifiso
· Ukucheba okucwangcisiweyo ngokwendlela ethile: 36°±0.5° Y-cut ukuze kusebenze kakuhle i-SAW
· Izinto ezixutyiweyo: I-MgO (5mol%) ye-doping yezicelo ze-optical
Iinkonzo zokwenziwa kwesinyithi: Cr/Au (100/1000Å) iipateni ze-electrode
3. Inkxaso yoBugcisa
· Ukuchazwa kwezinto: ii-XRD rocking curves (FWHM<0.01°), uhlalutyo lomphezulu we-AFM
· Ukulinganisa isixhobo: Ukumodela kwe-FEM kokwenziwa ngcono koyilo lwesihluzi se-SAW
Isiphelo
Ii-wafer zeLiTaO₃ ziyaqhubeka nokwenza kube lula ukuqhubela phambili kwezobuchwepheshe kunxibelelwano lwe-RF, ii-photonics ezidibeneyo, kunye nee-sensors ezingqongileyo ezingqongqo. Ubuchule be-XKH kwizinto eziphathekayo, ukuchaneka kwemveliso, kunye nenkxaso yobunjineli bezicelo zinceda abathengi ukuba boyise imingeni yoyilo kwiinkqubo ze-elektroniki zesizukulwana esilandelayo.









