LT Lithium Tantalate (LiTaO3) Crystal 2inch/3inch/4inch/6寸inch Orientaiton Y-42°/36°/108° Ukutyeba 250-500um
Iiparamitha zobugcisa
Igama | I-Optical-grade LiTaO3 | Inqanaba letafile yesandi LiTaO3 |
Axial | Z cut + / - 0.2 ° | 36 ° Y ukusika / 42 ° Y ukusika / X usike(+ / - 0.2 °) |
Ububanzi | 76.2mm + / - 0.3mm/100±0.2mm | 76.2mm + /-0.3mm100mm + /-0.3mm 0r 150±0.5mm |
Inqwelomoya yeDatum | 22mm +/ - 2mm | 22mm + /-2mm32mm + /-2mm |
Ukutyeba | 500um + /-5mm1000um + /-5mm | 500um + /-20mm350um + /-20mm |
TTV | ≤ 10um | ≤ 10um |
Ubushushu beCurie | 605 °C + / - 0.7 °C (Indlela ye-DTA) | 605 °C + / -3 °C (Indlela yeDTA |
Umgangatho womphezulu | Ukupolishwa kwamacala amabini | Ukupolishwa kwamacala amabini |
Imiphetho eChamfered | ukujikeleza komphetho | ukujikeleza komphetho |
Iimpawu eziphambili
1. Ubume beCrystal kunye nokuSebenza koMbane
· Ukuzinza kweCrystallographic: I-100% ye-4H-SiC i-polytype dominance, i-zero multicrystalline inclusions (umzekelo, i-6H / 15R), kunye ne-XRD yokugubha i-curve epheleleyo kwi-half-maximum (FWHM) ≤32.7 arcsec.
· High Carrier Mobility: Electron mobility of 5,400 cm²/V·s (4H-SiC) kunye nokushukuma komngxuma we-380 cm²/V·s, eyenza uyilo lwesixhobo esisebenza ngamaza aphezulu.
·Ubulukhuni bemitha: imelana nemitha ye-neutron eyi-1 kunye nomda womonakalo wokufuduswa we-1×10¹⁵ n/cm², ilungele i-aerospace kunye nokusetyenziswa kwenyukliya.
2.IiPropati ze-Thermal kunye ne-Mechanical
· I-Exceptional Thermal Conductivity: 4.9 W / cm·K (4H-SiC), i-triple ye-silicon, umsebenzi oxhasayo ngaphezu kwe-200 ° C.
· I-Coefficient yoKwandiswa kwe-Thermal ephantsi: i-CTE ye-4.0 × 10⁻⁶/K (25-1000 ° C), iqinisekisa ukuhambelana nokupakishwa kwe-silicon kunye nokunciphisa uxinzelelo lwe-thermal.
3.Ukulawula isiphene kunye nokuLungisa ukuCoca
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Uxinaniso lweMibhobho yeMicropipe: <0.3 cm⁻² (ii-intshi ezisi-8-intshi), ingxinano yokususa indawo engaphantsi kwe-1,000 cm⁻² (iqinisekiswe nge-KOH etching).
· Umgangatho woMphezulu: I-CMP-imenyezeliswe ukuya kwi-Ra <0.2 nm, ihlangabezana neemfuno ze-EUV lithography-grade flatness.
Usetyenziso oluphambili
I-Domain | Iimeko zosetyenziso | Izinto eziluncedo kwezobuGcisa |
Unxibelelwano lwe-Optical | I-100G / 400G lasers, iimodyuli ze-silicon photonics hybrid | I-substrates yembewu ye-InP yenza i-bandgap ngqo (i-1.34 eV) kunye ne-Si-based heteroepitaxy, ukunciphisa ilahleko yokudibanisa i-optical. |
Izithuthi zaMandla amatsha | Iziguquli ze-800V eziphezulu ze-voltage, iitshaja ezisebhodini (OBC) | I-4H-SiC substrates ukumelana> 1,200 V, ukunciphisa ilahleko yokuqhuba nge-50% kunye nomthamo wenkqubo nge-40%. |
Unxibelelwano lwe-5G | Izixhobo zeRF zeMillimeter-wave (PA/LNA), ii-amplifiers zamandla kwisikhululo sesiseko | ISemi-insulating SiC substrates (i-resistivity >10⁵ Ω·cm) yenza i-high-frequency (60 GHz+) indibaniselwano yokwenziwa. |
Izixhobo zoShishino | Izinzwa zobushushu obuphezulu, iziguquli zangoku, iimonitha zereactor yenyukliya | I-InSb seed substrates (0.17 eV bandgap) ihambisa ubuntununtunu bemagnethi ukuya kuthi ga kwi-300%@10 T. |
Ii-Wafers ze-LiTaO₃ - Iimpawu eziphambili
1. Ukusebenza okuphezulu kwePiezoelectric
· I-piezoelectric coefficients ephezulu (d₃₃~8-10 pC/N, K²~0.5%) yenza izixhobo ze-SAW/BAW ze-frequency ephezulu zifake ilahleko <1.5dB ye-5G RF izihluzi
Udibaniso olugqwesileyo lwe-electromechanical luxhasa i-width-bandwidth (≥5%) uyilo lokucoca kwi-sub-6GHz kunye ne-mmWave application
2. IiPropati zeOptical
· Ukucaca kweBroadband (>70% yosasazo ukusuka kwi-400-5000nm) kwiimodyuli ze-electro-optic ukufikelela> 40GHz bandwidth
· Ukuchaphazeleka okunamandla okungenamda kwamehlo (χ⁽²⁾~30pm/V) kuququzelela isizukulwana sesibini se-harmonic (SHG) kwiinkqubo ze-laser.
3. Uzinzo lokusiNgqongileyo
· Ubushushu obuphezulu beCurie (600°C) bugcina impendulo yepiezoelectric kwibakala lemoto (-40°C ukuya kwi-150°C) kubume bendawo
· I-Chemical inertness ngokuchasene ne-acids / alkalies (pH1-13) iqinisekisa ukuthembeka kwi-industrial sensor applications
4. Izakhono zokuziqhelanisa
· Ubunjineli boqhelaniso: X-cut (51°), Y-cut (0°), Z-cut (36°) ukwenzela iimpendulo zepiezoelectric ezilungiselelwe
· Iinketho zokusebenzisa i-doping: I-Mg-doped (i-optical damage resistance), i-Zn-doped (iphuculwe i-d₃₃)
· Ukugqitywa komphezulu: I-Epitaxial-ready polishing (Ra<0.5nm), ITO/Au metallization
I-LiTaO₃ Wafers - Izicelo eziphambili
1. RF Front-End Iimodyuli
· Izihlungi ze-5G NR SAW (Ibhendi n77/n79) kunye nomlinganiso wobushushu wokuphindaphinda (TCF) <|-15ppm/°C|
· Iiresonators ze-BAW ze-Ultra-wideband ze-WiFi 6E/7 (5.925-7.125GHz)
2. IiFotonikhi ezidibeneyo
· Iimodyuli ze-Mach-Zehnder ezinesantya esiphezulu (>100Gbps) zonxibelelwano lwamehlo oluhambelanayo
· Izixhobo ze-infrared ze-QWIP ezine-cutoff wavelengths ezinokugqithwa ukusuka kwi-3-14μm
3. I-Electronics yeemoto
·Iinzwa zokupaka zeUltrasonic ezine>200kHz yokusebenza rhoqo
· Iitransducer ze-TPMS piezoelectric zisinda -40°C ukuya kwi-125°C ukukhwela ibhayisekile ngokushushu
4. Iinkqubo zoKhuselo
· Izihluzi zomamkeli we-EW ezine>60dB ngaphandle kwebhendi yokukhatywa
· Iifestile ze-IR zomjukujelwa zisasaza 3-5μm MWIR radiation
5. IiTekhnoloji ezisakhulayo
· Iitransducer ze-Optomechanical quantum zoguqulelo lwe-microwave-to-optical
· Uluhlu lwe-PMUT kumfanekiso we-ultrasound yezonyango (>20MHz isisombululo)
I-LiTaO₃ Wafers - Iinkonzo ze-XKH
1. ULawulo lweNtengo
· Ukusetyenzwa kwe-Boule-to-wafer kunye ne-4-iveki ekhokelayo yexesha lokuchazwa kwemigangatho
· Imveliso enexabiso eliphezulu inikezela nge-10-15% inzuzo yexabiso xa kuthelekiswa nabakhuphisana nabo
2. Izisombululo zesiko
· I-wafering-specific wafering: 36 ° ± 0.5 ° Y-cut ukwenzela ukusebenza kakuhle kwe-SAW
· Iingoma ezifakwe kwi-Doped: I-MgO (5mol%) yedoping yokusetyenziswa kwamehlo
Iinkonzo zesinyithi: Cr/Au (100/1000Å) ipateni ye-electrode
3. Inkxaso yoBugcisa
· Iimpawu zeMathiriyeli: XRD ijika elijikajikayo (FWHM <0.01 °), uhlalutyo lomphezulu we-AFM
· Ukulinganisa isixhobo: Ukwenziwa kwe-FEM kuyilo loyilo lokucoca i-SAW
Ukuqukumbela
Ii-wafers ze-LiTaO₃ ziyaqhubeka nokwenza ukuqhubela phambili kwetekhnoloji kulo lonke unxibelelwano lweRF, iifotoni ezidityanisiweyo, kunye nezinzwa zendalo ezingqongileyo. Ubuchwephesha bezinto eziphathekayo ze-XKH, ukuchaneka kwemveliso, kunye nenkxaso yobunjineli besicelo inceda abathengi boyise imingeni yoyilo kwiinkqubo ze-elektroniki zesizukulwana esilandelayo.


