I-intshi e-4 Ucoceko oluphezulu lwe-Al2O3 99.999% iSapphire substrate wafer Dia101.6×0.65mmt enoBubude obuPhambili beFlethi
Inkcazo
Iimpawu eziqhelekileyo ze-4-intshi yesafire wafers yaziswa ngolu hlobo lulandelayo:
Ukutyeba: Ubukhulu beesafire eziqhelekileyo ziphakathi kwe-0.2 mm kunye ne-2 mm, kwaye ubukhulu obuthile bunokwenziwa ngokwezifiso ngokweemfuno zabathengi.
Umda wokubeka: Kudla ngokubakho icandelo elincinci kumda wewafer elibizwa ngokuba "ngumphetho wokubekwa" okhusela umphezulu we-wafer kunye nomphetho, kwaye uhlala u-amorphous.
Ukulungiswa komphezulu: Iziqwenga zesafire eziqhelekileyo zicolwa ngoomatshini kwaye zigudiswa ngokwemichiza ukugudisa umphezulu.
Iipropathi zomphezulu: Umphezulu wee-wafers zesafire uhlala uneempawu ezilungileyo zokubona, ezinje ngokukhanya okuphantsi kunye nesalathiso esisezantsi se-refractive, ukuphucula ukusebenza kwesixhobo.
Usetyenziso
● I-substrate yokukhula ye-III-V kunye ne-II-VI iikhompawundi
● I-Electronics kunye ne-optoelectronics
● izicelo zeIR
● I-Silicon On Sapphire Integrated Circuit(SOS)
● IRadio Frequency Integrated Circuit(RFIC)
Inkcazo
Into | 4-intshi C-plane (0001) 650μm Sapphire Wafers | |
Izinto zeCrystal | I-99,999%, i-High Purity, i-Monocrystalline Al2O3 | |
IBanga | Prime, Epi-Ready | |
Ukuqhelaniswa nomphezulu | Inqwelomoya (0001) | |
I-C-plane off-engile ukuya ku-M-axis 0.2 +/- 0.1 ° | ||
Ububanzi | 100.0 mm +/- 0.1 mm | |
Ukutyeba | 650 μm +/- 25 μm | |
Ukuqhelaniswa neFlethi ePhambili | I-A-plane(11-20) +/- 0.2 ° | |
Ubude beFlethi obuPhambili | 30.0 mm +/- 1.0 mm | |
Icala Elinye Likhazimlisiwe | Umphezulu ongaphambili | I-Epi-ipolishiwe, iRa < 0.2 nm (nge-AFM) |
(SSP) | Emva koMphezulu | Umhlaba omhle, iRa = 0.8 μm ukuya kwi-1.2 μm |
Icala eliphindwe kabini lilungisiwe | Umphezulu ongaphambili | I-Epi-ipolishiwe, iRa < 0.2 nm (nge-AFM) |
(DSP) | Emva koMphezulu | I-Epi-ipolishiwe, iRa < 0.2 nm (nge-AFM) |
TTV | < 20 μm | |
THOBEKA | < 20 μm | |
WARP | < 20 μm | |
Ukucoca / ukuPakisha | Ukucoca igumbi le-100 kunye nokupakishwa kwe-vacuum, | |
Amaqhekeza angama-25 kwikhasethi enye okanye kwipakethe yesiqwenga esinye. |
Sineminyaka emininzi yamava kwishishini lokulungisa isafire. Kubandakanywa imarike yababoneleli baseTshayina, kunye nemarike yeemfuno zamazwe ngamazwe. Ukuba unazo naziphi na iimfuno, nceda uzive ukhululekile ukuqhagamshelana nathi.