I-intshi e-4 Ucoceko oluphezulu lwe-Al2O3 99.999% iSapphire substrate wafer Dia101.6×0.65mmt enoBubude obuPhambili beFlethi
Inkcazo
Iimpawu eziqhelekileyo ze-4-intshi yesafire wafers yaziswa ngolu hlobo lulandelayo:
Ukutyeba: Ubukhulu beentsimbi eziqhelekileyo zesafire ziphakathi kwe-0.2 mm kunye ne-2 mm, kwaye ubukhulu obuthile bunokwenziwa ngokwezifiso ngokweemfuno zabathengi.
Umda wokubeka: Kudla ngokubakho icandelo elincinci kumda wewafer elibizwa ngokuba "ngumphetho wokubekwa" okhusela umphezulu we-wafer kunye nomphetho, kwaye uhlala u-amorphous.
Ukulungiswa komphezulu: Iziqwenga zesafire eziqhelekileyo zicolwa ngoomatshini kwaye zigudiswa ngokomatshini ukugudisa umphezulu.
Iipropathi zomphezulu: Umphezulu wee-wafers zesafire uhlala uneempawu ezilungileyo zokubona, ezinje ngokukhanya okuphantsi kunye nesalathiso esisezantsi se-refractive, ukuphucula ukusebenza kwesixhobo.
Usetyenziso
● I-substrate yokukhula ye-III-V kunye ne-II-VI iikhompawundi
● I-Electronics kunye ne-optoelectronics
● izicelo ze-IR
● I-Silicon On Sapphire Integrated Circuit(SOS)
● iRadio Frequency Integrated Circuit(RFIC)
Inkcazo
| Into | 4-intshi C-plane (0001) 650μm Sapphire Wafers | |
| Izinto zeCrystal | I-99,999%, i-High Purity, i-Monocrystalline Al2O3 | |
| IBanga | Prime, Epi-Ready | |
| Ukuqhelaniswa nomphezulu | Inqwelomoya (0001) | |
| I-C-plane off-engile ukuya ku-M-axis 0.2 +/- 0.1 ° | ||
| Ububanzi | 100.0 mm +/- 0.1 mm | |
| Ukutyeba | 650 μm +/- 25 μm | |
| Ukuqhelaniswa neFlethi okuPhambili | I-A-plane(11-20) +/- 0.2 ° | |
| Ubude beFlethi obuPhambili | 30.0 mm +/- 1.0 mm | |
| Icala Elinye Likhazimlisiwe | Umphezulu ongaphambili | I-Epi-ipolishiwe, i-Ra < 0.2 nm (nge-AFM) |
| (SSP) | Emva koMphezulu | Umhlaba omhle, iRa = 0.8 μm ukuya kwi-1.2 μm |
| Icala eliphindwe kabini lilungisiwe | Umphezulu ongaphambili | I-Epi-ipolishiwe, i-Ra < 0.2 nm (nge-AFM) |
| (DSP) | Emva koMphezulu | I-Epi-ipolishiwe, i-Ra < 0.2 nm (nge-AFM) |
| TTV | < 20 μm | |
| THOBEKA | < 20 μm | |
| WARP | < 20 μm | |
| Ukucoca / ukuPakisha | Ukucoca igumbi le-100 kunye nokupakishwa kwe-vacuum, | |
| Amaqhekeza angama-25 kwikhasethi enye okanye kwipakethe yesiqwenga esinye. | ||
Sineminyaka emininzi yamava kwishishini lokulungisa isafire. Kubandakanywa imarike yababoneleli baseTshayina, kunye nemarike yeemfuno zamazwe ngamazwe. Ukuba unazo naziphi na iimfuno, nceda uzive ukhululekile ukuqhagamshelana nathi.
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