I-156mm 159mm 6 intshi yeSapphire Wafer yomphathi we-C-Plane DSP TTV
Inkcazo
| Into | I-6-intshi ye-C-plane(0001) iiWafers zeSapphire | |
| Izinto zeCrystal | I-99,999%, i-High Purity, i-Monocrystalline Al2O3 | |
| IBanga | Prime, Epi-Ready | |
| Ukuqhelaniswa nomphezulu | Inqwelomoya (0001) | |
| I-C-plane off-engile ukuya ku-M-axis 0.2 +/- 0.1 ° | ||
| Ububanzi | 100.0 mm +/- 0.1 mm | |
| Ukutyeba | 650 μm +/- 25 μm | |
| Ukuqhelaniswa neFlethi okuPhambili | I-C-plane (00-01) +/- 0.2 ° | |
| Icala Elinye Likhazimlisiwe | Umphezulu ongaphambili | I-Epi-ipolishiwe, i-Ra < 0.2 nm (nge-AFM) |
| (SSP) | Emva koMphezulu | Umhlaba omhle, iRa = 0.8 μm ukuya kwi-1.2 μm |
| Icala eliphindwe kabini lilungisiwe | Umphezulu ongaphambili | I-Epi-ipolishiwe, i-Ra < 0.2 nm (nge-AFM) |
| (DSP) | Emva koMphezulu | I-Epi-ipolishiwe, i-Ra < 0.2 nm (nge-AFM) |
| TTV | < 20 μm | |
| THOBEKA | < 20 μm | |
| WARP | < 20 μm | |
| Ukucoca / ukuPakisha | Ukucoca igumbi le-100 kunye nokupakishwa kwe-vacuum, | |
| Amaqhekeza angama-25 kwikhasethi enye okanye kwipakethe yesiqwenga esinye. | ||
Indlela yeKylopoulos (indlela ye-KY) okwangoku isetyenziswa ziinkampani ezininzi zaseTshayina ukuvelisa iikristale zesafire ukuze zisetyenziswe kwi-electronics and optics industry.
Kule nkqubo, i-high-purity aluminium oxide iyancibilika kwi-crucible kumaqondo okushisa angaphezu kwama-2100 degrees Celsius. Ngokuqhelekileyo i-crucible yenziwe nge-tungsten okanye i-molybdenum. Ikristale yembewu ejongwe ngokuchanekileyo intywiliselwa kwi-alumina etyhidiweyo. Ikristale yembewu itsalwa ngokuthe chu ukuya phezulu kwaye inokujikeleziswa ngaxeshanye. Ngokulawula ngokuchanekileyo i-gradient yeqondo lokushisa, izinga lokutsala kunye nesantya sokupholisa, i-crystal enkulu, enye-crystal, i-ingot ephantse i-cylindrical inokuveliswa kwi-melted.
Emva kokuba i-ingots enye yekristale yesafire ikhulile, yombiwa kwiintonga zecylindrical, ezithi ke zisikwe kubukhulu befestile obufunwayo kwaye ekugqibeleni bukhazimliswe ukuya kumphezulu ofunekayo.
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