I-156mm 159mm I-Sapphire Wafer eyi-intshi ezi-6 ye-C-Plane DSP TTV yomphathi

I-156mm 159mm I-Sapphire Wafer eyi-intshi ezi-6 ye-carrier C-Plane DSP TTV Umfanekiso obonisiweyo

Inkcazo emfutshane:

Iiwafer zesafire ezicoliweyo (DSP) ezingama-156mm/159mm ububanzi, iiwafer zesafire ezicoliweyo (DSP) ezingama-6″ ze-Al2O3 ezine-TTV engaphantsi kwe-3 microns kwiibhodi zokuthwala. Iiwafers ezongezelelweyo ze-C-axis, A-axis, R-axis, M-axis eziyi-8″ / 6″ / 5″ / 2″ / 3″ / 4″ / 5″ ze-C-axis, i-A-axis, i-R-axis, i-M-axis. Iiwafers zesafire ezi-C-plane ezifikelela kwi-6 intshi (6″/6intshi) ububanzi, ezine-single-side polished (SSP) okanye i-double-side polished (DSP) ubuso, kwaye zinobukhulu obungama-650 microns okanye ama-1000 microns.

Thumela i-imeyile kuthi

Iimbonakalo

Inkcazo

Into	IiWafers zeSapphire ze-intshi ezi-6 (0001)
Izinto zekristale	99,999%, Ubumsulwa obuphezulu, i-Monocrystalline Al2O3
Ibanga	Inkulu, ilungele i-Epi
Ukujongwa komphezulu	I-C-plane(0001)
	I-C-plane off-engile ukuya kwi-M-axis 0.2 +/- 0.1°
Ububanzi	100.0 mm +/- 0.1 mm
Ubukhulu	650 μm +/- 25 μm
Uqhelaniso oluPhambili oluSicaba	I-C-plane(00-01) +/- 0.2°
Icala Elinye Elikhazimlisiweyo	Umphezulu ongaphambili	I-Epi-polished, i-Ra < 0.2 nm (yi-AFM)
(SSP)	Umphezulu Ongasemva	Ingca ecolekileyo, iRa = 0.8 μm ukuya kwi-1.2 μm
Icala Eliphindwe Kabini Elikhazimlisiweyo	Umphezulu ongaphambili	I-Epi-polished, i-Ra < 0.2 nm (yi-AFM)
(i-DSP)	Umphezulu Ongasemva	I-Epi-polished, i-Ra < 0.2 nm (yi-AFM)
I-TTV	< 20 μm
I-BOW	< 20 μm
I-WARP	< 20 μm
Ukucoca / Ukupakishwa	Ukucoca igumbi lokucoca kunye nokupakishwa kwe-vacuum yeklasi ye-100,
	Iziqwenga ezingama-25 kwiphakheji enye yekhasethi okanye kwiphakheji enye.

Indlela yeKylopoulos (indlela yeKY) ngoku isetyenziswa ziinkampani ezininzi eTshayina ukuvelisa iikristale zesafire ezisetyenziswa kumashishini e-elektroniki kunye ne-optics.

Kule nkqubo, i-aluminium oxide ecocekileyo kakhulu iyanyibilika kwi-crucible kumaqondo obushushu angaphezu kwama-2100 degrees Celsius. Ngokwesiqhelo i-crucible yenziwe nge-tungsten okanye i-molybdenum. I-seed crystal ejolise ngqo ifakwa kwi-alumina enyibilikisiweyo. I-seed crystal itsalwa kancinci phezulu kwaye inokujikeleza ngaxeshanye. Ngokulawula ngokuchanekileyo i-gradient yobushushu, isantya sokutsala kunye nesantya sokupholisa, i-ingot enkulu, enekristale enye, ephantse ibe silinda inokuveliswa kwi-melt.

Emva kokuba ii-single crystal sapphire ingots zikhuliswe, zigqojozwa zibe zii-cylindrical rods, ezithi emva koko zisikwe zibe bubukhulu obufunekayo befestile kwaye ekugqibeleni zicoliwe zibe ngumphezulu ofunekayo.