I-156mm 159mm 6 intshi yeSapphire Wafer yomphathi C-Plane DSP TTV

156mm 159mm 6 intshi yeSapphire Wafer yomphathi C-Plane DSP TTV Umfanekiso ofakiweyo

Inkcazelo emfutshane:

156mm/159mm ububanzi, 6 ″ Al2O3 enamacala amabini akhazimlisiweyo (DSP) iiwafi zesafire ezine-TTV engaphantsi kwe-3 microns kwiibhodi zokuthwala. Ezongezelelweyo 8″ / 6″ / 5″ / 2″ / 3″ / 4″ / 5″ C-axis, A-axis, R-axis, M-axis wafers. Iziqwenga zesafire zeC-plane ukuya kuthi ga kwi-intshi ezi-6 (6"/6intshi) ububanzi, zinecala elinye elipolishiwe (SSP) okanye umphezulu omacala omabini opolishiwe (DSP), kunye nobukhulu be-650 microns okanye i-1000 yemicrons.

Thumela i-imeyile kuthi

Iinkcukacha zeMveliso

Iithegi zeMveliso

Inkcazo

Into	6-intshi C-inqwelomoya(0001) iiWafers zeSapphire
Izinto zeCrystal	I-99,999%, i-High Purity, i-Monocrystalline Al2O3
IBanga	Prime, Epi-Ready
Ukuqhelaniswa nomphezulu	Inqwelomoya (0001)
	I-C-plane off-engile ukuya ku-M-axis 0.2 +/- 0.1 °
Ububanzi	100.0 mm +/- 0.1 mm
Ukutyeba	650 μm +/- 25 μm
Ukuqhelaniswa neFlethi ePhambili	I-C-plane (00-01) +/- 0.2 °
Icala Elinye Likhazimlisiwe	Umphezulu ongaphambili	I-Epi-ipolishiwe, iRa < 0.2 nm (nge-AFM)
(SSP)	Emva koMphezulu	Umhlaba omhle, iRa = 0.8 μm ukuya kwi-1.2 μm
Icala eliphindwe kabini lilungisiwe	Umphezulu ongaphambili	I-Epi-ipolishiwe, iRa < 0.2 nm (nge-AFM)
(DSP)	Emva koMphezulu	I-Epi-ipolishiwe, iRa < 0.2 nm (nge-AFM)
TTV	< 20 μm
THOBEKA	< 20 μm
WARP	< 20 μm
Ukucoca / ukuPakisha	Ukucoca igumbi le-100 kunye nokupakishwa kwe-vacuum,
	Amaqhekeza angama-25 kwikhasethi enye okanye kwipakethe yesiqwenga esinye.

Indlela ye-Kylopoulos (indlela ye-KY) okwangoku isetyenziswa ziinkampani ezininzi zase-China ukuvelisa iikristale zesafire ukuze zisetyenziswe kumashishini ombane kunye ne-optics.

Kule nkqubo, i-high-purity aluminium oxide iyancibilika kwi-crucible kumaqondo okushisa angaphezu kwama-2100 degrees Celsius. Ngokuqhelekileyo i-crucible yenziwe nge-tungsten okanye i-molybdenum. Ikristale yembewu ejongwe ngokuchanekileyo intywiliselwa kwi-alumina etyhidiweyo. Ikristale yembewu itsalwa ngokuthe chu ukuya phezulu kwaye inokujikeleziswa ngaxeshanye. Ngokulawula ngokuchanekileyo i-gradient yeqondo lokushisa, izinga lokutsala kunye nesantya sokupholisa, i-crystal enkulu, enye-crystal, i-ingot ephantse i-cylindrical inokuveliswa kwi-melted.

Emva kokuba i-ingots enye yekristale yesafire ikhulile, yombiwa kwiintonga zecylindrical, ezithi ke zisikwe kubukhulu befestile obufunwayo kwaye ekugqibeleni bukhazimliswe ukuya kumphezulu ofunekayo.