Umatshini wokuPolisha we-Ion Beam we-sapphire SiC Si

Inkcazo emfutshane:

Umatshini wokulinganisa nokupholisha i-Ion Beam usekelwe kumgaqo wokutshiza i-ion. Ngaphakathi kwigumbi eline-vacuum ephezulu, umthombo we-ion uvelisa i-plasma, ekhawuleziswa ibe yi-ion beam enamandla aphezulu. Lo mqadi uqhuma kumphezulu we-optical component, ususa izinto kwisikali se-athomu ukuze kufezekiswe ukulungiswa komphezulu ngokuchanekileyo kunye nokugqitywa kwawo.

Thumela i-imeyile kuthi

Iimbonakalo

Umzobo oneenkcukacha

Isishwankathelo seMveliso yoMshini wokuPolisha we-Ion Beam

Njengenkqubo engabandakanyi unxibelelwano, ukupolisha ngemitha ye-ion kususa uxinzelelo loomatshini kwaye kuthintele umonakalo ongaphantsi komhlaba, okwenza kube yeyona nto ifanelekileyo ekuveliseni ii-optics ezichanekileyo ezisetyenziswa kwi-astronomy, kwi-aerospace, kwi-semiconductors, nakwizicelo zophando eziphambili.

Umgaqo oSebenzayo woMshini wokuPolisha we-Ion Beam

Isizukulwana se-Ion
Igesi engasebenziyo (umz., i-argon) ifakwa kwigumbi le-vacuum kwaye i-ionized ngokukhupha umbane ukuze yenze i-plasma.

Ukukhawulezisa kunye noKwakha imisebe
Ii-ion zikhawuleziswa ukuya kwii-electron volts (eV) ezingamakhulu okanye amawaka kwaye zenziwe zibe yindawo ezinzileyo, egxile kwimitha.

Ukususwa kwezinto
Umqadi we-ion ukhupha ii-athomu ngokwasemzimbeni ngaphandle kokuqalisa ii-chemical reactions.

Ukufumanisa Iimpazamo kunye nokuCwangcisa Indlela
Ukuphambuka komfanekiso womphezulu kulinganiswa nge-interferometry. Imisebenzi yokususa isetyenziswa ukumisela amaxesha okuhlala kunye nokwenza iindlela zezixhobo ezilungiselelweyo.

Ukulungiswa kweLoop eValiweyo
Imijikelo yokuphinda-phinda yokucubungula nokulinganisa iyaqhubeka ide kufikelelwe kwiithagethi zokuchaneka kwe-RMS/PV.

Iimpawu eziphambili zoMshini wokuPolisha we-Ion Beam

Ukuhambelana koMphezulu weNdawo yonke– Isebenza ngemiphezulu ethe tyaba, engqukuva, ejikelezileyo, nekhululekileyo

Izinga lokususa elizinzileyo kakhulu- Ivumela ukulungiswa kwesibalo se-sub-nanometer

Ukucubungula Okungenamonakalo– Akukho ziphene okanye utshintsho kwisakhiwo esingaphantsi komhlaba

Ukusebenza Okuqhubekayo– Isebenza kakuhle ngokulinganayo kwizinto ezinobunzima obahlukeneyo

Ukulungiswa kweFrequency ephantsi/ephakathi- Isusa iimpazamo ngaphandle kokuvelisa izinto ezisetyenziswa rhoqo/ezisetyenziswa rhoqo

Imfuneko Yokugcinwa Ephantsi– Ukusebenza ixesha elide rhoqo kunye nexesha elincinci lokungasebenzi

Iinkcukacha eziphambili zobugcisa zoMshini wokuPolisha we-Ion Beam

Into	Inkcazo
Indlela Yokucubungula	I-ion itshiza kwindawo ene-vacuum ephezulu
Uhlobo Lokucubungula	Ukulinganisa kunye nokupolisha umphezulu ongadibaniyo
Ubungakanani boMsebenzi oMkhulu	Φ4000 mm
Ii-Axes zeMotion	I-axis ezi-3 / i-axis ezi-5
Uzinzo lokususa	≥95%
Ukuchaneka komphezulu	I-PV < 10 nm; I-RMS ≤ 0.5 nm (i-RMS eqhelekileyo < 1 nm; I-PV < 15 nm)
Ubuchule boLungiso lweeFrequency	Isusa iimpazamo zefrikhwensi ephantsi-phakathi ngaphandle kokufaka iimpazamo zefrikhwensi ephakathi/phezulu
Ukusebenza Okuqhubekayo	Iiveki ezi-3–5 ngaphandle kokugcinwa kwe-vacuum
Iindleko Zokulungisa	Iphantsi

Ubuchule bokucubungula boMshini wokuPolisha we-Ion Beam

Iintlobo zomphezulu ezixhaswayo

Elula: Ithe tyaba, ingqukuva, iprism

I-Complex: I-asphere elinganayo/engalinganiyo, i-asphere engaphandle kwe-axis, i-cylindrical

Ezikhethekileyo: Ii-optics ezibhityileyo kakhulu, ii-slat optics, ii-hemispherical optics, ii-conformal optics, ii-phase plates, iindawo ezizimeleyo

Izixhobo ezixhaswayo

Iglasi ebonakalayo: I-Quartz, i-microcrystalline, i-K9, njl.

Izinto ze-infrared: iSilicon, iGermanium, njl.

Iintsimbi: I-aluminium, intsimbi engatyiwayo, i-titanium alloy, njl.

Iikristale: YAG, i-single-crystal silicon carbide, njl.

Izinto eziqinileyo/ezibuthathaka: iSilicon carbide, njl.

Umgangatho womphezulu / ukuchaneka

I-PV < 10 nm

I-RMS ≤ 0.5 nm

Ukucubungula Izifundo zeTyala loMatshini wokuPolisha we-Ion Beam

Ityala 1 - Isipili Esithe tyaba Esiqhelekileyo

Umsebenzi: I-quartz flat D630 mm

Isiphumo: PV 46.4 nm; RMS 4.63 nm

Ityala lesi-2 - Isibuko esiKhangelayo se-X-ray

Umsebenzi: 150 × 30 mm i-silicon flat

Isiphumo: PV 8.3 nm; RMS 0.379 nm; Ithambeka 0.13 µrad

Ityala lesi-3 - Isibuko esingekho kwi-axis

Umsebenzi: Isibuko somhlaba esingekho axis D326 mm

Isiphumo: PV 35.9 nm; RMS 3.9 nm

Imibuzo ebuzwa rhoqo ngeeGlasi zeQuartz

Imibuzo Ebuzwa Rhoqo - Umatshini Wokupolisha we-Ion Beam

Q1: Yintoni ukupholisha imisebe ye-ion?
A1:Ukupolisha imisebe ye-ion yinkqubo engadibaniyo esebenzisa umqadi ogxile kwi-ion (ezifana ne-argon ions) ukususa izinto kumphezulu wezinto zokusebenza. Ii-ion ziyakhawuleziswa kwaye zijoliswe kumphezulu, nto leyo ebangela ukususwa kwezinto kwinqanaba le-athomu, nto leyo ebangela ukugqitywa okugudileyo kakhulu. Le nkqubo isusa uxinzelelo loomatshini kunye nomonakalo ongaphantsi komhlaba, nto leyo eyenza ukuba ilungele izinto ezibonakalayo ngokuchanekileyo.

Umbuzo 2: Zeziphi iintlobo zeendawo ezisetyenziswa yi-Ion Beam Polishing Machine?
A2:IUmatshini wokupolisha we-Ion Beaminokucubungula iindawo ezahlukeneyo, kuquka izinto ezilula ezibonakalayo ezifanaiiflethi, iisphere, kunye neeprismkunye nejometri ezintsonkothileyo ezifanaii-aspheres, ii-aspheres ezingaphandle kwe-axiskunyeimiphezulu ekhululekileyoIsebenza ngakumbi kwizinto ezifana neglasi ye-optical, i-infrared optics, iimetali, kunye nezinto eziqinileyo/ezibuthathaka.

Umbuzo 3: Zeziphi izinto ezingasetyenziswa ngumatshini wokupholisha we-Ion Beam?
A3:IUmatshini wokupolisha we-Ion Beamingapolisha uluhlu olubanzi lwezixhobo, kuquka:

Iglasi ebonakalayo: I-Quartz, i-microcrystalline, i-K9, njl.
Izinto ze-infrared: I-Silicon, i-germanium, njl.
Iintsimbi: I-aluminium, intsimbi engatyiwayo, i-titanium alloy, njl.
Izinto zekristale: YAG, i-single-crystal silicon carbide, njl.njl.
Ezinye izinto eziqinileyo/ezibuthathaka: I-silicon carbide, njl.njl.

Ngathi

I-XKH igxile kuphuhliso lobuchwepheshe obuphezulu, imveliso, kunye nokuthengiswa kweglasi ekhethekileyo ye-optical kunye nezixhobo ezintsha zekristale. Iimveliso zethu zibonelela nge-optical electronics, i-consumer electronics, kunye ne-military. Sinikezela nge-Sapphire optical components, ii-mobile phone lens covers, i-Ceramics, i-LT, i-Silicon Carbide SIC, i-Quartz, kunye ne-semiconductor crystal wafers. Ngobuchule obunobuchule kunye nezixhobo eziphambili, sigqwesile ekucutshungulweni kwemveliso okungaqhelekanga, sijolise ekubeni yishishini eliphambili le-optoelectronic materials high-tech.