Umatshini wokumenyezisa we-Ion Beam weSapphire SiC Si

Ion Beam Umatshini wokumenyezelisa wesafire SiC Si Umfanekiso obonakalayo

Inkcazelo emfutshane:

I-Ion Beam Figuring and Polishing Machine isekelwe kumgaqo wei-ion sputtering. Ngaphakathi kwegumbi eliphezulu le-vacuum, umthombo we-ion uvelisa iplasma, ekhawulezayo ibe yi-ion beam ephezulu. Lo mqadi ubhobhoza umphezulu wecandelo le-optical, ukususa imathiriyeli kwisikali se-athomu ukufezekisa ulungiso oluchanekileyo lomphezulu kunye nokugqiba.

Thumela i-imeyile kuthi

Iimbonakalo

Idayagram eneenkcukacha

Isishwankathelo seMveliso ye-Ion Beam yokuNgcwelisa uMshini

I-Ion Beam Figuring kunye ne-Polishing Machine isekelwe kumgaqo we-ion sputtering. Ngaphakathi kwegumbi eliphezulu le-vacuum, umthombo we-ion uvelisa iplasma, ekhawulezayo ibe yi-ion beam ephezulu. Lo mqadi ubhobhoza umphezulu wecandelo le-optical, ukususa imathiriyeli kwisikali se-athomu ukufezekisa ulungiso oluchanekileyo lomphezulu kunye nokugqiba.

Njengenkqubo engabandakanyiyo, i-ion beam polishing iphelisa uxinzelelo lomatshini kwaye igwema umonakalo ongaphantsi komhlaba, okwenza kube yinto efanelekileyo yokuvelisa i-optics ephezulu echanekileyo esetyenziswe kwi-astronomy, i-aerospace, i-semiconductors, kunye nezicelo zophando oluphezulu.

UmGaqo wokuSebenzisa we-Ion Beam womatshini wokugolisha

Isizukulwana seIon
Igesi ye-inert (umzekelo, i-argon) ifakwe kwi-vacuum chamber kwaye i-ionized ngokukhupha umbane ukwenza i-plasma.

Ukukhawulezisa kunye noLwakhiwo lweBeam
Iiyoni zikhawuleza ukuya kumakhulu aliqela okanye amawaka ee-electron volts (eV) kwaye zenziwe ukuba zibe yindawo ezinzileyo, egxininisiweyo yomqadi.

Ukususwa kwezinto eziphathekayo
Umqa we-ion ukhupha ii-athomu ngokwasemzimbeni ngaphandle kokuqalisa ukuphendula ngemichiza.

Ukufunyanwa kwemposiso kunye noCwangciso lweNdlela
Ukutenxa kumfanekiso womphezulu kulinganiswa nge-interferometry. Imisebenzi yokususa isetyenziselwa ukumisela amaxesha okuhlala kunye nokuvelisa iindlela zesixhobo eziphuculweyo.

Ulungiso oluvaliweyo
Imijikelo ephindaphindwayo yokusetyenzwa kunye nokulinganisa iyaqhubeka de i-RMS/PV echanekileyo ekujoliswe kuyo ifezekisiwe.

Iimpawu eziphambili ze-Ion Beam Polishing Machine

Ukuhambelana koMphezulu weHlabathi-Iqhuba umphezulu othe tyaba, ongqukuva, we-aspherical, kunye nokhululekileyo

Ireyithi yokuSuswa kwe-Ultra-Stable-Ivumela ulungiso lomzobo we-nanometer engaphantsi

ULungiselelo Olungenamonakalo- Akukho ziphene ezingaphantsi komhlaba okanye utshintsho kwisakhiwo

Intsebenzo engqinelanayo-Isebenza ngokulinganayo kwizixhobo zobunzima obahlukeneyo

ULungelo oluPhantsi/ oluPhakathi lokuQhuba-Ukuphelisa iimpazamo ngaphandle kokuvelisa i-middle / high-frequency artifics

Imfuneko yoLondolozo oluphantsi-Ixesha elide eliqhubekayo kunye nexesha elincinci lokuphumla

IiNgcaciso eziPhambili zobuGcisa be-Ion Beam yoMshini wokuNgcwelisa

Into	Inkcazo
Indlela Yokwenza	Ukutshiza kwe-Ion kwindawo enevacuum ephezulu
Uhlobo Lokuqhuba	Umphezulu ongaqhagamshelwanga womfanekiso & ukugulisa
Ubungakanani boMsebenzi oMax	Φ4000 mm
Iizembe ezishukumayo	I-3-axis / i-5-axis
Ukususwa Uzinzo	≥95%
Ukuchaneka komphezulu	I-PV <10 nm; I-RMS ≤ 0.5 nm (i-RMS eqhelekileyo < 1 nm; PV < 15 nm)
Isakhono sokuLulekisa rhoqo	Susa iimpazamo zefrikhwensi ephantsi-phakathi ngaphandle kokwazisa iimpazamo zefrikhwensi ephakathi/ephezulu
Umsebenzi oqhubekayo	Iiveki ezi-3-5 ngaphandle kokugcinwa kwe-vacuum
Iindleko zoLondolozo	Phantsi

Ukusetyenzwa koMsebenzi we-Ion Beam yokugulisa umatshini

Iintlobo zoMphezulu oXhasiweyo

Lula: Icaba, ingqukuva, iprism

I-Complex: i-Symmetric/asymmetric asphere, off-axis asphere, cylindrical

Okukhethekileyo: I-Ultra-thin optics, i-slat optics, i-hemispherical optics, i-conformal optics, iipleyiti zesigaba, imiphezulu ekhululekile

Izixhobo ezixhaswayo

Iglasi ye-Optical: I-quartz, i-microcrystalline, i-K9, njl.

Izixhobo ze-infrared: iSilicon, igermanium, njl.

Iintsimbi: iAluminiyam, intsimbi engatyiwa, ingxubevange yetitanium, njl.

Iikristale: YAG, enye-crystal silicon carbide, njl.

Izinto ezinzima / ezinqabileyo: I-silicon carbide, njl.

Umgangatho womphezulu / ukuchaneka

PV <10 nm

RMS ≤ 0.5 nm

Ukuqhuba izifundo ze-Ion Beam yokupholisha umatshini

I-Case 1 - Isibuko seFlat esiqhelekileyo

Umsebenzi: D630 mm quartz flat

Isiphumo: PV 46.4 nm; RMS 4.63 nm

Ityala lesi-2 – isipili esibonakalisa iX-reyi

Umsebenzi: 150 × 30 mm i-silicon flat

Isiphumo: PV 8.3 nm; RMS 0.379 nm; Ukuthambeka kwe-0.13 µrad

Ityala lesi-3 - Isibuko se-Off-Axis

Umsebenzi: D326 mm off-axis isipili esisezantsi

Isiphumo: PV 35.9 nm; RMS 3.9 nm

FAQ yeeglasi zeQuartz

I-FAQ – Umatshini woKucolisa we-Ion Beam

Q1: Yintoni i-ion beam polishing?
A1:I-Ion beam polishing yinkqubo engadibanisiyo esebenzisa umqadi ogxininisiweyo we-ion (ezifana ne-argon ion) ukususa izinto ezivela kumphezulu womsebenzi. Iiyoni ziyakhawuleza kwaye zijoliswe kumphezulu, zibangela ukususwa kwemathiriyeli yomgangatho weatom, okukhokelela ekugqityweni okugudileyo. Le nkqubo iphelisa uxinzelelo lomatshini kunye nomonakalo ongaphantsi komhlaba, okwenza kube yinto efanelekileyo kwizinto ezichanekileyo ze-optical.

I-Q2: Ziziphi iintlobo zemigangatho enokuthi inkqubo ye-Ion Beam Polishing Machine?
A2:IUmatshini wokugulisa we-Ion Beamiyakwazi ukucubungula imiphezulu eyahlukeneyo, kuquka izinto ezilula zamehlo ezifanaiiflethi, iingqukuva, kunye neeprism, kunye neejometri ezinzima ezifanaii-aspheres, ii-aspheres ezingekho-axis, kwayeimiphezulu ekhululekileyo. Isebenza ngakumbi kwimathiriyeli efana neglasi yokukhanya, i-infrared optics, isinyithi, kunye nemathiriyeli eqinileyo / enqabileyo.

I-Q3: Ziziphi izinto ezinokusebenza kunye noMshini we-Ion Beam Polishing Machine?
A3:IUmatshini wokugulisa we-Ion Beaminokupolisha uluhlu olubanzi lwemathiriyeli, kubandakanywa:

Iglasi ye-Optical: Quartz, microcrystalline, K9, njl.
Izixhobo ze-infrared: Isilicon, igermanium, njl.
Iintsimbi: Aluminiyam, intsimbi engatyiwa, titanium ingxubevange, njl.
Izinto zeCrystal: YAG, enye-crystal silicon carbide, njl.
Ezinye izinto ezilukhuni / ezinqabileyo: I-silicon carbide, njl.

Ngathi

I-XKH igxile kuphuhliso lobuchwepheshe obuphezulu, imveliso, kunye nokuthengiswa kweglasi ekhethekileyo yeglasi kunye nezinto ezintsha zekristale. Iimveliso zethu zisebenza ngombane obonakalayo, i-elektroniki yabathengi, kunye nomkhosi. Sinikezela ngezixhobo zeSapphire optical, iilensi zeselfowuni eziphathwayo, iiCeramics, LT, Silicon Carbide SIC, Quartz, kunye nesemiconductor crystal wafers. Ngobuchule bezakhono kunye nezixhobo ezibukhali, sigqwesa ekusetyenzweni kwemveliso engeyiyo eyomgangatho, sijonge ukuba lishishini eliphambili le-optoelectronic tech-tech.