8inch Silicon wafer P/N-uhlobo (100) 1-100Ω dummy reclaim substrate
Ukwazisa ngebhokisi ye-wafer
I-8-intshi ye-silicon wafer yinto eqhelekileyo esetyenziswa kwi-silicon substrate kwaye isetyenziswa ngokubanzi kwinkqubo yokwenziwa kweesekethe ezidibeneyo. Ezo ziphako zesilicon ziqhele ukusetyenziswa ukwenza iintlobo ezahlukeneyo zeesekethe ezidityanisiweyo, kubandakanya ii-microprocessors, iitshiphu zememori, izinzwa kunye nezinye izixhobo zombane. Ii-8-intshi ze-silicon wafers ziqhele ukusetyenziswa ukwenza iichips ezinobungakanani obukhulu, kunye nezibonelelo ezibandakanya indawo enkulu yomphezulu kunye nokukwazi ukwenza iichips ezingaphezulu kwi-silicon wafer enye, ekhokelela ekonyukeni kwemveliso. I-8-intshi ye-silicon wafer nayo ineempawu ezilungileyo zoomatshini kunye neekhemikhali, ezifanelekileyo kwimveliso yesekethe edibeneyo.
Iimpawu zemveliso
I-8" uhlobo lwe-P/N, i-silicon epholisiweyo ye-wafer (25 iipcs)
Ukuqhelaniswa: 200
Ukuxhathisa: 0.1 - 40 ohm•cm (Inokwahluka kwibhetshi ukuya kwibhetshi)
Ukutyeba: 725 +/-20um
Prime/Monitor/Test Grade
IIPROPATI ZOMNTU
Ipharamitha | Uphawu |
Uhlobo/Dopant | P, Boron N, Phosphorous N, Antimony N, Arsenic |
Uqhelaniso | <100>, <111> susa uqhelaniso ngokweenkcukacha zomthengi |
Umxholo we-Oxygen | 1019ppmA Ukunyamezelana ngokwesiko ngokwenkcazo yomthengi |
Umxholo weCarbon | <0.6 ppmA |
IIPROPATI ZOOMATSHINI
Ipharamitha | Prime | Ukubeka iliso/ Uvavanyo A | Uvavanyo |
Ububanzi | 200±0.2mm | 200 ± 0.2mm | 200 ± 0.5 mm |
Ukutyeba | 725±20µm (umgangatho) | 725±25µm(umgangatho) 450±25µm 625±25µm 1000±25µm 1300±25µm 1500±25µm | 725±50µm (umgangatho) |
TTV | < 5µm | < 10µm | < 15µm |
Ukuqubuda | < 30µm | < 30µm | < 50µm |
Ukusonga | < 30µm | < 30µm | < 50µm |
Ukujikeleza komda | I-SEMI-STD | ||
Ukumakisha | I-SEMI-Flat yokuqala kuphela, i-SEMI-STD Flats Jeida Flat, iNotshi |
Ipharamitha | Prime | Ukubeka iliso/ Uvavanyo A | Uvavanyo |
Iikhrayitheriya zecala langaphambili | |||
Imeko yomphezulu | I-Chemical Mechanical ekhazimlisiwe | I-Chemical Mechanical ekhazimlisiwe | I-Chemical Mechanical ekhazimlisiwe |
Uburhabaxa boMphezulu | < 2 A° | < 2 A° | < 2 A° |
Usulelo Amanqaku@ >0.3 µm | = 20 | = 20 | = 30 |
Inkungu, imingxuma I-Orenji peel | Akukho nanye | Akukho nanye | Akukho nanye |
Wabona, Marks Imijelo | Akukho nanye | Akukho nanye | Akukho nanye |
Iikhrayitheriya ezisecaleni ngasemva | |||
Iintanda, iinyawo zecrowswiet, amanqaku esarha, amabala | Akukho nanye | Akukho nanye | Akukho nanye |
Imeko yomphezulu | Caustic ifakiwe |