I-12 intshi ye-intshi ye-caltiker carbide ye-prime yenqanaba le-300mmm enkulu 4h-n ilungele ukubekwa kweSixhobo esiPhakamileyo
Iimpawu zeMveliso
I-1. Ukuqhutywa kweMpumelelo kakhulu: Ukuqhubela phambili kwe-thermal ye-selicon carbide kungaphezulu kwamaxesha ama-3 e-silicon, elungele ukungavisisani kwendawo enobushushu.
2. Amandla aphezulu entsimi ephezulu: Amandla aqhekeza aqhekeza: Amandla entsimi eqhekezayo ngamaxesha ali-10 aseSilicon, kufanelekile ukuba kusetyenziswe uxinzelelo oluphezulu.
3. I-bandgap ye-Bandggap: I-bandgap yi-3.26EV (4h-SIC), ifanelekile kubushushu obuphezulu kunye nezicelo eziphezulu.
4. Ubunzima obukhulu: I-MOHS Hardy yi-9.2, yesibini kuphela kwidayimani, ukunxiba kakuhle kunye namandla omatshini.
I-5. Uzinzo lwekhemikhali: Ukunganyangeki kwekhemikhali eqinileyo, ukusebenza okuzinzileyo kubushushu obuphezulu kunye nemeko engqongqo.
I-6. Ubungakanani obukhulu: I-12 intshi (i-300mm) ye-subtate, ukuphucula ukusebenza kwemveliso, ukunciphisa iindleko zeyunithi.
7.Ukuba nobuso obunefuthe: itekhnoloji ephezulu yokukhula kwekristali yokuqinisekisa ukuxinana okusulelayo kunye nokungqinelana okuphezulu.
Imveliso yemveliso yemveliso
1. Amandla e-elektroniki:
I-Mosfetts: isetyenziselwa kwizithuthi zombane, iinqwelo moya ezisebenza kunye nabaguquli bemihlaba.
Ii-Deds: ezinjenge-Schottky Dods (SBD), esetyenziselwa ukulungiswa ngokufanelekileyo kunye nokutshintsha iimpahla zamandla.
2. Izixhobo zeRF:
I-RF Porm Amplifier: isetyenziswe kwizikhululo zonxibelelwano ezi-5G zonxibelelwano kunye nonxibelelwano lweSatellite.
Izixhobo ze-microwave: ilungele iinkqubo zonxibelelwano ezingenazingcingo.
3. Izithuthi zamandla amatsha:
Iinkqubo zombane zombane: Abalawuli bezithuthi kunye ne-inverters kwizithuthi zombane.
Ukutshaja: Imodyuli yamandla kwizixhobo zokubiza ngokukhawuleza.
I-4. Izicelo zemveliso:
I-Inverter ephezulu yevolimu: yolawulo lweemoto kunye nolawulo lwamandla.
Igridi ye-Smart: kugqithiselo lwe-HVDC kunye ne-Electronics ye-elektroniki.
5. I-Aerospace:
Iqondo lobushushu ephezulu: Ilungele indawo yobushushu ephezulu yezixhobo ze-aerospace.
6. Intsimi yophando:
I-bandggap i-bandgap semiconductor: Ukuphuhliswa kwezinto ezintsha ze-semicondctor kunye nezixhobo.
I-12 ye-intshi ye-intshi ye-intshi luhlobo lwezinto eziphezulu ze-semiconductor ze-semiconductor ezifana nepropathi ebalaseleyo efana nokuqhushumba okuphezulu, amandla aphezulu entsimi ephakamileyo kunye nebhendi ebanzi. Isetyenziswe ngokubanzi kumandla e-elektroniki, izixhobo zerediyo zerediyo, izithuthi zamandla amatsha, ulawulo lwemizi-mveliso kunye ne-aerospace, kwaye yinto ephambili yokukhuthaza ukuphuculwa kwesizukulwana esilandelayo se-elektroniki nezixhobo ze-elektroniki.
Ngelixa i-Silicon Carbide inabantu abambalwa kwi-elektroniki e-Affiting ye-AFSE, i-ANTAURRORDE yoLawulo lwaMandla oluSebenzayo kunye ne-MALITIONS inokuxhasa izisombululo ze-AR / v. Okwangoku, ophuhliso oluphambili lwe-Silicon Carbide lugxile kwimimandla yamashishini anjengezithuthi ezitsha zamandla, iziseko zonxibelelwano kunye ne-automation automation yemveliso yokuphuhlisa ngendlela efanelekileyo nenokuthenjwa.
XKH izibophelele ekuboneleleni ngokusemgangathweni ophezulu 12 "I-SIC Remocises ngenkxaso ebanzi yobugcisa kunye neenkonzo, kubandakanya:
1. Imveliso eyenziwe ngokwezifiso: Ngokutsho kwabathengi kufuneka babonelele ngokuchasene nokuthintelwa, i-crystal yekristale kunye nonyango lomphezulu.
2. Ukuphuculwa kwenkqubo: Nika abathengi ngenkxaso yezobuchwephesha bokukhula kwe-epitamatial, ukuvelisa isixhobo kunye nezinye iinkqubo zokuphucula ukusebenza kwemveliso.
3. Uvavanyo kunye nesiqinisekiso: Nikezela ngephenyane nexabiso elingqongqo kunye nesiqinisekiso esisesikweni ukuqinisekisa ukuba ibala lemigangatho.
4.R & D Intsebenziswano: Ukuphuhlisa ngokudibeneyo izixhobo ze-selicon ze-calbickon kunye nabathengi ukukhuthaza ubuchwephesha betekhnoloji.
Itshathi yedatha
I-1 2 intshi ye-intshi ye-carbide (i-SIC) ye-Fightarate | |||||
Ibanga | Imveliso ye-ze-zeromp IBAKALA (IBAKALA) | Imveliso esemgangathweni Ibanga (Ibanga) | IBakala laseDummy (Ibanga) | ||
Ububanzi | I-3 0 0 0 mm ~ 130mmm | ||||
Ubukhulu | I-4h-n | 750μ ± 15 μm | 750μ ± 25 μm | ||
I-4h-si | 750μ ± 15 μm | 750μ ± 25 μm | |||
Ukuqhelaniswa ne-Wagfer | I-Axis: 4.0 ° I-1120> ± 0.5 ° kwi-4h-n, kwi-Axis: <0001> i-4h-SI | ||||
Ukuxinana kwentsholongwane | I-4h-n | ≤0.4cm-2 | ≤4cm-2 | ≤25cm-2 | |
I-4h-si | ≤5cm-2 | ≤10cm-2 | ≤25cm-2 | ||
Ukuxhathisa | I-4h-n | 0.015 ~ 0.024 ω c | 0.015 ~ 0.028 ω ω i | ||
I-4h-si | ≥1e10 ω · cm | ≥1e5 ω · c | |||
Isifundo esiyintloko | {10-10} ± ± 5.0 ° | ||||
Ubude obuyintloko | I-4h-n | N / A | |||
I-4h-si | I-notch | ||||
Umphetho | I-3 mm | ||||
I-LTV / i-TTV / isaphetha / i-warp | ≤يμm / ¶12 μm / ¶35 μm / ¶55 μm | ≤يμm / ≤15 □ □ □ □ □ □5m / ≤55 □ μm | |||
Rhabaxa | I-Polish Ra≤1 NM | ||||
I-CMP Raş0.2 NM | Ra≤0.5 nm | ||||
Umda we-rocks ngokuKhanya okuphezulu kokukhanya Iipleyiti ze-hex ngamandla aphezulu Iindawo ze-polytype ngokukhanya okuphezulu kokukhanya I-carbon ebonakalayo I-Silicon Strect Stratches ngokuKhanya okuphezulu | Akukho Indawo ekhulayo ≤0.05% Akukho Indawo ekhulayo ≤0.05% Akukho | Ubude obukhawulezileyo ≤ 20 mm, ubude obungatshatanga Indawo ekhulayo ≤0.1% Indawo yeNqanaba3 Indawo ekhulayo ≤3% Ubude bobude obuxhaphakileyo | |||
I-Edge chips ngamandla obukhulu bokukhanya | Akukho namnye ukuvunywa ≥0.2mm kwaye ubunzulu | 7 ivunyelwe, ¶1 mm nganye | |||
(I-TSD) i-screw ye-screw disw | ≤500 cm-2 | N / A | |||
(I-BPD) I-Clousing Fise | ≤1000 cm-2 | N / A | |||
Ukungcoliseka kwe-Silicon Tersulation ngokuKhangela okuphezulu kokukhanya | Akukho | ||||
Ukupakisha | Ikhasethi yekhasethi yesakhasi ezininzi okanye isitya esinye esiphezulu | ||||
Amanqaku: | |||||
Isiphene esinye semida sisebenza kuwo wonke umphandle wawufihliwe ngaphandle kwendawo yokukhuphela. 2Ukuba kufuneka kukhangelwa ubuso be-si. I-3 idatha yokufundisa ivela kuphela kwi-koh ekhutshiweyo. |
I-XKH iya kuqhubeka nokutyala imali kuphando kunye nophuhliso ukukhuthaza i-intshi ye-intshi yesilika, iziphene eziphantsi kunye nokungqinelana kweemodyuli zomthengi (ezinje ngeemo zekhompyutha. Ngokunciphisa iindleko kunye nokwanda komthamo, i-xkh iya kuzisa ubuchule kumzi mveliso we-semicondcuctor.
Umzobo oneenkcukacha


