Inkqubo ye-TVG kwi-quartz sapphire BF33 wafer Iglasi ye-wafer yokubetha

Uncedo lwe-TGV(NgeGlass Via) lubonakaliswa ikakhulu koku:

1) Iimpawu zombane ezigqwesileyo eziphakamileyo. Izinto zeglasi yimathiriyeli ye-insulator, i-dielectric engaguqukiyo imalunga ne-1/3 kuphela yezinto zesilicon, ilahleko yi-2-3 yeeodolo zobukhulu obuphantsi kunezinto ze-silicon, okwenza ilahleko ye-substrate kunye neziphumo zeparasitic zincitshiswe kakhulu ukuqinisekisa ukuba ukunyaniseka komqondiso ogqithisiweyo;

(2) Ubungakanani obukhulu kunye ne-ultra-thin glass substrate kulula ukuyifumana. Singabonelela ngeSapphire, iQuartz, Corning, kunye neSCHOTT kunye nabanye abavelisi beglasi banokubonelela ngesayizi enkulu kakhulu (>2m × 2m) kunye neglasi yeglasi ebhityileyo kakhulu (<50µm) kunye nemathiriyeli yeglasi ethambileyo kakhulu.

3) Iindleko eziphantsi. Inzuzo ekufikeleleni ngokulula kwiglasi yepaneli ye-ultra-thin enkulu, kwaye ayifuni ukubekwa kwe-insulating layers, iindleko zokuvelisa i-glass adapter plate kuphela malunga ne-1/8 ye-silicon-based adapter plate;

4) Inkqubo elula. Akukho mfuneko yokubeka i-insulating layer kwi-substrate surface kunye nodonga lwangaphakathi lwe-TGV (NgeGlasi ye-Glass Via), kwaye akukho mfuneko yokunciphisa i-adapter plate ye-ultra-thin;

(5) Ukuzinza okuqinileyo komatshini. Nokuba ubukhulu bepleyiti yeadaptha bungaphantsi kwe-100µm, iphepha lokulwa lisencinci;

6) Uluhlu olubanzi lwezicelo. Ukongeza kwimibono emihle yesicelo kwintsimi ye-high-frequency, njengento ebonakalayo, ingasetyenziselwa kwintsimi yokuhlanganiswa kwenkqubo ye-optoelectronic, i-airtightness kunye neenzuzo zokumelana nokubola kwenza i-glass substrate kwintsimi ye-MEMS encapsulation inamandla amakhulu.

Okwangoku, inkampani yethu ibonelela ngeglasi ye-TGV (NgeGlasi ngeGlasi ngokusebenzisa itekhnoloji yomngxuma, inokulungiselela ukusetyenzwa kwezinto ezingenayo kwaye ibonelele ngemveliso ngokuthe ngqo. Singabonelela ngeSapphire, iQuartz, iCorning, kunye neSCHOTT, BF33 kunye nezinye iindondo. Ukuba unesidingo, ungaqhagamshelana nathi ngokuthe ngqo nangaliphi na ixesha! Wamkelekile umbuzo!