I-SIC Ceramic Chutck tray ceram ceraic ceraction ye-CUPS

I-ceramic ceck chic cray ceram ye-ceram ye-cells ye-culls yomatshini wokuchaneka komfanekiso okwiphepha

Inkcazo emfutshane:

I-Silicon Carbide Tray Tray Sucker lukhetho olufanelekileyo lwemveliso ye-semiconductor ngenxa yobuqili bayo obuphakamileyo, ukwenziwa okuphezulu kwekhemithi kunye nokuzinza okuphezulu kunye nokuzinza okuphezulu. Iflethi yayo ephezulu kunye nokugqibela komphezulu kuqinisekisa unxibelelwano olupheleleyo phakathi kwe-wafer kunye ne-sucker, ukunciphisa ungcoliseko kunye nomonakalo; Ubushushu obuphezulu kunye nokuxhathisa kwe-corosion kwenza ukuba ilungele imeko yenkqubo enzima; Kwangelo xesha, uyilo olukhanyayo olukhanyayo kunye neempawu zobomi ezinde ukunciphisa iindleko zokuvelisa kwaye zizinto eziphambili zezinto zokusika, ipolishing, ilithography kunye nezinye iinkqubo.

Thumela i-imeyile kuthi

Iinkcukacha zemveliso

Iimpawu zeMveliso

Iimpawu zezinto ezibonakalayo:

I-1.High Shorest: I-MOHS Farty ye-Silicon Carbide yi-9.2.5, yesibini kuphela kwidayimani, enokungaphazamiseki ngamandla.
2. Ukuqhubela phambili kwe-thermal ephezulu: Ukuqhubela phambili kwe-sermal ye-selicon carbide kuphakama i-120-200 W / G · k, enokuthi isebenzise ubushushu ngokukhawuleza kwaye ilungele imeko yendawo yobushushu ephezulu.
3. Ukwanda kwe-thermal ophantsi ye-thermal ye-cound: I-Silicon Carbide ye-carrmil ye-thermal ye-therm iphantsi (4.0-4.5 × 10 × 10 × 10 × 10⁻⁶ / k), isenokugcina uzinzo kwiqondo lokuhlala.
4. Uzinzo lwekhemikhali: i-silicon carbide acid kunye ne-alkali corrosion, efanelekileyo ukuze usetyenziswe kwindawo yokugcina imichiza.
5. Amandla oMatshini abaPhezulu: I-Silicon Carbide inamandla aphezulu egodini kunye namandla ecinezelayo, kwaye inokumelana noxinzelelo olukhulu lwendlela.

Iimbonakalo:

I-1.in ishishini le-semicondcuctor, i-wafs emxinwa kakhulu kufuneka ibekwe kwikomityi ye-vacuum, i-vacuum curtion isetyenziselwa ukulungisa ii-wafring, kwaye inkqubo yokutyibilika, ukucofa, ukucocwa, ukucocwa kuya kwenziwa kwi-wafer.
I-2.silicicon Carbide msungud inesidima esihle se-duxing, sinokulitshisa ngokufanelekileyo ixesha lokuxhuzula kunye ne-waxing, ukuphucula ukusebenza kwemveliso.
I-3.silicicicn Carbide vacuum sucker ikwane-Acid kunye ne-Alkali Corrosion.
4.Clepated nePlayithi yeSiko leCoursum, nciphisa ukulayisha kunye nokutsala ixesha lokufudumeza kunye nexesha lokupholisa, ukuphucula ukusebenza kakuhle; Kwangelo xesha, inokunciphisa ukunxila phakathi kweepleyiti ezingaphezulu nezezantsi, gcina ukuchaneka kweplani elungileyo, kwaye kwandise ubomi benkonzo malunga ne-40%.
5.Inxalenye yezinto zincinci, ubunzima bokukhanya. Kulula ukuba abaqhubi bathwale i-Pallets, ukunciphisa umngcipheko womonakalo wokungqubana obangelwe bubunzima bezothutho malunga ne-20%.
6.Pize: I-Diaceter ephezulu ye-640mm; Iflethi: 3um okanye ngaphantsi

Intsimi yesicelo:

1. Imveliso ye-semicondcucy
● Ukulungiswa kwelanga:
Ukulungiswa kwe-wafer kwifoto ye-Phototithography, i-etching, ifilimu yefilimu yefilimu kunye nezinye iinkqubo, ekuqinisekiseni ukungangqinelani okuphakathi kwenkqubo. Ubushushu bayo beqondo lobushushu kunye nokuchasana ne-corrosion ilungele iindawo ezinobunkunkqele ze-semicondyctor.
● Ukukhula kuka-Entitaial:
Ukukhula kwe-SIC okanye i-gen pitatial pitatial, njengokuthwala ubushushu kunye nokulungisa ii-wifr, ukuqinisekisa ubushushu obufanayo kunye nekristali kubushushu obuphezulu, ukuphucula ukusebenza kwesixhobo.
2. Izixhobo zefoto
● Imveliso ye-LED:
Isetyenziselwa ukulungisa i-saphire okanye i-SIC Ristrest, kwaye njengomntu ophethe ubushushu kwinkqubo ye-MOCVD, ukuqinisekisa ukufana kwesitayile, ukuphucula ukusebenza kwe-LUMINOOD kunye nomgangatho.
● I-Laser Diode:
Njengomgca ophambili wokuchaneka, ukulungisa kunye nokufudumeza indawo yokuqinisekisa ukuzinza kweqondo lobushushu, ukuphucula amandla okukhupha kunye nokuthembeka kwe-laser diode.
3. Umatshini wokuchaneka
● Ukulungiswa kwecandelo elifanelekileyo:
Isetyenziselwa ukulungisa izinto ezichanekileyo ezinjengeelensi zokukhetha kunye neefilitha zokuqinisekisa ukuchaneka okuphezulu kunye nokungcoliseka okuphantsi ngexesha lokusebenza, kwaye kufanelekile ukuba kubekho ngokuqina.
● Ukulungiswa kwe-ceramic:
Njengommiselo ophezulu wokuzinza, kufanelekile ukuba kwenziwe i-ceramic izixhobo ze-ceramic ukuqinisekisa ukuchaneka komatshini kunye nokungqinelana phantsi kobushushu obuphezulu kunye nendawo yokugcina izinto.
4. Uvavanyo lwenzululwazi
● Ukuvavanywa kobushushu obuphezulu:
Njengesixhobo semodeli yesampulu kwimimandla yobushushu obuphezulu, ixhasa iimvavanyo zobushushu ezigqithisileyo ngaphezulu kwe-1600 ° C ukuqinisekisa ubushushu obufanayo kunye nokuzinza kwesampulu.
● Uvavanyo lwe-vacuum:
Njengolungiso lwesampulu kunye nokufudumeza kwindalo esingqongileyo, ukuqinisekisa ukuchaneka kunye nokuphinda-phinda koluvo, kufanelekile ukuba kunyango kunye nonyango lobushushu.

Inkcazo yobugcisa:

(Ipropathi yempahla)		(Iyunithi)	(i-SSIC)
(Umxholo we-SIC)		(I-WT)%	> 99
(I-avareji ephakathi)		micron	I-4-10
(Ukuxinana)		kg / dm3	> 3.14
(I-Porosity)		VO1%	<0.5
(I-Viskers)	Hv 0.5	I-GPA	28
* (Amandla e-flexi) * (amanqaku amathathu)	20ºc	Mpa	I-450
(Amandla e-comperres)	20ºc	Mpa	3900
(I-elastic modyul)	20ºc	I-GPA	I-420
(Ukuqhekeka kokuqhelisela)		Mpa / m '%	3.5
(Ukuqhutywa kwe-thermal)	I-20 ºC	*W / (m k)**	I-160
(Ukuxhathisa)	I-20 ºC	Ohm.cm	I-106-108
(Ukwanda kwe-thermal conder)	A (RT ... 80ºC)**	*K-1 10-6**	4.3
(Ubushushu obuninzi bokusebenza)		oºc	I-1700

Ngeminyaka yokuqokelelwa kobuchwephesha kunye namava oshishino, i-XKH ikwazile ukulungisa imilinganiselo ephambili efana nobukhulu, indlela yokufudumeza kunye noyilo lwe-adsuum ngokweemfuno ezithile zomthengi, ukuqinisekisa ukuba imveliso ihlengahlengiswa ngokugqibeleleyo kwinkqubo yomthengi. I-SIC Slicon Carbide Ceramic Chucks ingaba zenziwe izinto ezingafunekiyo kwiSoft, ukukhula kwe-epitamatial kunye nezinye iinkqubo eziphambili zokuphumelela, ukuzinza kweqondo lobushushu oluphezulu kunye nokuzinza kweqondo lobushushu. Ingakumbi ekwenzeni izinto zokwenza izinto zesithathu ze-semicondcuctor ezifana ne-SIC kunye ne-Gan, imfuno ye-selicon carbide cloramic cucks iyaqhubeka ikhula. Kwixesha elizayo, kunye nophuhliso olukhawulezileyo lwama-5g, izithuthi zombane, ubukrelekrele bobuchwephesha kunye nolunye uhlobo lwetekhnoloji, amathemba okusebenza, amathemba okusebenza e-Cemickoc Cemirac Chucks kwicandelo le-semicondcucre kwicandelo le-semicondcucre kwishishini le-semicondcucric liya kubanzi.