I-Sapphire Square Blank Substrate – I-Optical, i-Semiconductor, kunye ne-Test Wafer

Inkcazo emfutshane:

I-substrate engenanto yesikwere se-sapphire eboniswe kumfanekiso yinto ecocekileyo kakhulu, ene-single-crystal aluminum oxide (Al₂O₃), eyenzelwe ukuhlangabezana neemfuno ezifunekayo zeenkqubo ze-optical eziphambili, ukucubungula i-semiconductor, kunye novavanyo lwezixhobo ezichanekileyo. Yenziwe ngeendlela zokukhula kwekristale eziphambili ezifana nenkqubo yeKyropoulos (KY) okanye iCzochralski (CZ), le ngenanto ye-sapphire ibonisa ukucaca okubalaseleyo kwe-optical, ubunzima obugqwesileyo, kunye nokuzinza okumangalisayo kweekhemikhali, okwenza ukuba ibe lukhetho olufanelekileyo kwizicelo zoshishino ezisebenza kakuhle.

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Umzobo oneenkcukacha

Isishwankathelo seSapphire Square Blank Substrate

I-sapphire square blank substrate, njengoko kuboniswe kumfanekiso, yinxalenye ye-single-crystal aluminum oxide (Al₂O₃) ecocekileyo kakhulu eyenzelwe ukusetyenziswa kubunjineli bokukhanya obuphambili, ukuvelisa izixhobo ze-semiconductor, kunye novavanyo lwezixhobo ezichanekileyo. Idume ngeempawu zayo zomzimba nezekhemikhali ezibalaseleyo, i-sapphire ibe yenye yezona zinto zibalulekileyo kumashishini afuna ukuqina okugqithisileyo, uzinzo, kunye nokusebenza kokukhanya. Iveliswe ngeendlela zokukhulisa iikristale ezintsonkothileyo, ezifana neKyropoulos (KY), iHeat Exchange Method (HEM), okanye iinkqubo zeCzochralski (CZ), ezi square blanks zenziwe ngocoselelo ukuze zihlangabezane nemigangatho ephezulu yomgangatho.

Iimpawu eziphambili zeSapphire Square Blank Substrate

I-Sapphire yikristale e-uniaxial, anisotropic enesakhiwo se-lattice esinama-hexagonal, enika indibaniselwano engenakuthelekiswa nanto yamandla oomatshini, uzinzo lobushushu, kunye nokumelana neekhemikhali. Ngomgangatho wobunzima be-Mohs oyi-9, i-sapphire ilandela idayimani kuphela ngokumelana nokukrwela, iqinisekisa ukuhlala ixesha elide nangona iphantsi kweemeko zoshishino ezirhabaxa. Indawo yayo yokunyibilika idlula i-2000°C, ivumela ukusebenza okuthembekileyo kwiindawo ezinobushushu obuphezulu, ngelixa ukulahleka kwayo okuphantsi kwe-dielectric kuyenza ibe yinto ekhethwayo kwi-RF kunye nezicelo ze-elektroniki ezisebenzisa i-frequency ephezulu.

Kwicandelo le-optical, i-sapphire ibonisa uluhlu olubanzi lokudluliselwa ukusuka kwi-ultraviolet enzulu (~200nm) ukuya kwi-infrared ebonakalayo ukuya kwi-mid-infrared (~5000nm), kunye ne-homogeneity egqwesileyo ye-optical kunye ne-birefringence ephantsi xa ijongiswe ngokufanelekileyo. Ezi mpawu zenza ukuba i-sapphire square blanks ibe yinto ebalulekileyo kwiindawo ezisebenzisa i-optics njengeenkqubo ze-laser, i-photonics, i-spectroscopy, kunye nemifanekiso.

Ukuvelisa kunye nokuCwangcisa

Isiseko ngasinye esingenanto sesafire square sidlula kwinkqubo yemveliso engqongqo, siqala ngeepowders ze-alumina eluhlaza ezicocekileyo kakhulu ezilawulwa yikristale kwiifurnace ezishushu kakhulu. Emva kokuba ikristale enkulu ikhuliswe, ijoliswa ngokuchanekileyo (ngokuqhelekileyo yi-C-plane (0001), i-A-plane (11-20), okanye i-R-plane (1-102)) ukuze ihambelane neemfuno ezithile zesicelo. Emva koko ikristale isikwa ibe ziindawo ezingenanto zesikwere ngeesarha ezigqunywe yidayimani, kulandele ukugoba okuchanekileyo ukuze kufezekiswe ukufana kobukhulu. Kwizicelo ze-optical kunye ne-semiconductor, iindawo zingapholishwa zibe buthambileyo kwinqanaba le-athomu, zihlangabezane nobunzima obuqinileyo, ukufana, kunye neenkcukacha zoburhabaxa bomphezulu.

Iingenelo eziphambili

Ukucaca Okubalaseleyo Kokubona– Ukuhanjiswa kwe-wideband ukusuka kwi-UV ukuya kwi-IR kwenza ukuba ilungele iifestile ezibonakalayo, imingxunya yelaser, kunye nezigqubuthelo zesensor.
Amandla Oomatshini Aphezulu– Amandla aphezulu okuxinwa, ukuqina kokuqhekeka, kunye nokumelana nokukrwela kuqinisekisa ukuhlala ixesha elide kwiindawo ezixinezelekileyo kakhulu.
Uzinzo lweThermal kunye neeKhemikhali– Ayimelani nobushushu, amaqondo obushushu aphezulu, kunye neekhemikhali ezirhabaxa, igcina ukuthembeka ngexesha lokucubungula i-semiconductor kunye nokuvezwa okunzima kokusingqongileyo.
Ulawulo oluchanekileyo lweMilinganiselo– Ukunyamezela ubukhulu obunokufikelelwa ngaphakathi kwe-±5µm kunye nobuthe tyaba bomphezulu ukuya kuthi ga kwi-λ/10 (kwi-632.8nm), okubalulekileyo kwi-photolithography kunye nokusetyenziswa kwe-wafer bonding.
Ukuguquguquka– Ifanelekile kwiintlobo ngeentlobo zezicelo kuquka izinto ezibonakalayo, izinto ezikhulisa i-epitaxial, kunye nee-wafers zovavanyo loomatshini.

Izicelo

Izicelo ze-Optical: Isetyenziswa njengeefestile, izihluzi, izibambi ze-laser gain medium, izigqubuthelo zokukhusela ii-sensors, kunye ne-photonics substrates ngenxa yokucaca kwayo kokukhanya kunye nokuqina kwayo.
Iisubstrates zeSemiconductor: Isebenza njengesiseko esisisiseko see-LED ezisekelwe kwiGaN, izixhobo ze-elektroniki zamandla (izakhiwo zeSiC-on-sapphire), izixhobo zeRF, kunye neesekethe ze-microelectronic, apho ukuhanjiswa kobushushu kunye nokumelana neekhemikhali kubaluleke kakhulu.
Uvavanyo lwezixhobo kunye neeWafers ezingezizo: Isetyenziswa rhoqo njengezixhobo zovavanyo kwimigca yokwenziwa kwe-semiconductor, esetyenziselwa ukulinganisa oomatshini, ukulinganisa inkqubo, kunye novavanyo lokunyamezela kwezixhobo zokugrumba, zokubeka, okanye zokuhlola.
Uphando lwezeNzululwazi: Kubalulekile kwiisetingi zovavanyo ezifuna amaqonga angasebenziyo, acacileyo, kwaye azinzileyo oomatshini kwizifundo ze-optical, electrical, kunye nezixhobo.

FAQ

Umbuzo 1: Yintoni inzuzo yokusebenzisa isafire engenanto enesikwere phezu kwewafer engqukuva?
A: Izikhewu zesikwere zibonelela ngendawo enokusetyenziselwa ukusika ngokwezifiso, ukwenziwa kwezixhobo, okanye ukuvavanywa koomatshini, okunciphisa inkunkuma yezinto kunye neendleko.

Q2: Ngaba ii-substrates zesafire zingamelana neemeko zokucubungula i-semiconductor?
A: Ewe, ii-substrates ze-sapphire zigcina uzinzo phantsi kobushushu obuphezulu, ukugrumba kwe-plasma, kunye nonyango lweekhemikhali oluqhelekileyo ekwenziweni kwe-semiconductor.

Umbuzo 3: Ngaba ukujongwa komphezulu kubalulekile kwisicelo sam?
A: Ngokuqinisekileyo. I-C-plane sapphire isetyenziswa kakhulu kwi-GaN epitaxy kwimveliso ye-LED, ngelixa i-A-plane kunye ne-R-plane orientations zikhethwa kwizicelo ezithile ze-optical okanye ze-piezoelectric.

Umbuzo 4: Ngaba ezi zikhewu ziyafumaneka xa kufakwe izinto ezenziwe ngokwezifiso?
A: Ewe, ii-anti-reflective, dielectric, okanye i-conductive coating zingasetyenziswa ukuhlangabezana neemfuno ezithile ze-optical okanye ze-elektroniki.

Ngathi

I-XKH igxile kuphuhliso lobuchwepheshe obuphezulu, imveliso, kunye nokuthengiswa kweglasi ekhethekileyo ye-optical kunye nezixhobo ezintsha zekristale. Iimveliso zethu zibonelela nge-optical electronics, i-consumer electronics, kunye ne-military. Sinikezela nge-Sapphire optical components, ii-mobile phone lens covers, i-Ceramics, i-LT, i-Silicon Carbide SIC, i-Quartz, kunye ne-semiconductor crystal wafers. Ngobuchule obunobuchule kunye nezixhobo eziphambili, sigqwesile ekucutshungulweni kwemveliso okungaqhelekanga, sijolise ekubeni yishishini eliphambili le-optoelectronic materials high-tech.