ISapphire Ingot Isixhobo sokuKhulisa iCzochralski CZ Indlela yokuVelisa ii-2inch-12inch zeSapphire Wafers
UmGaqo wokuSebenza
Indlela ye-CZ isebenza ngala manyathelo alandelayo:
1. I-Melting Raw Materials: Ucoceko oluphezulu lwe-Al₂O₃ (ubunyulu> 99.999%) luyancibilika kwi-iridium crucible kwi-2050-2100 ° C.
2. I-Crystal ye-Seed Intshayelelo: I-crystal yembewu iyancipha kwi-melt, ilandelwa ngokukhawuleza ukutsala ukwenza intamo (i-diameter <1 mm) ukuphelisa ukuchithwa.
3. Ukuqulunqwa kwamagxa kunye nokuKhula koBuninzi: Isantya sokutsala sincitshiswe kwi-0.2-1 mm / h, ngokuthe ngcembe sandise i-crystal diameter kwi-target target (umz, i-4-12 intshi).
4. I-Anealing and Cooling: I-crystal ipholile kwi-0.1-0.5 ° C / min ukunciphisa ukuxhatshazwa kwe-thermal-induced cracking.
5. Iindidi zeCrystal ezihambelanayo:
IBanga loMbane: Ii-semiconductor substrates (TTV <5 μm)
Ibakala elibonakalayo: iifestile ze-UV laser (ukudluliselwa>90%@200 nm)
Izahluko eziDoped: IRuby (Cr³⁺ yoxinaniso 0.01–0.5 wt.%), ityhubhu yesafire eluhlaza
Amacandelo eNkqubo engundoqo
1. Inkqubo yokunyibilikisa
I-Iridium Crucible: Imelana ne-2300 ° C, imelana nomhlwa, iyahambelana nezinyibiliko ezinkulu (100-400 kg).
I-Induction Heating Furnace: Ulawulo lobushushu obuzimeleyo kwindawo ezininzi (± 0.5°C), udidi oluphuculweyo lwe-thermal.
2. Ukutsalwa kunye neNkqubo yokujikeleza
I-High-Precision Servo Motor: Ukutsalwa kwesisombululo 0.01 mm/h, ukugxila okujikelezayo <0.01 mm.
IMagnetic Fluid Seal: Usasazo olungaqhagamshelwanga lukhula ngokuqhubekayo (>72 iiyure).
3. Inkqubo yokulawula iThermal
Ulawulo lwe-PID oluvaliweyo lwe-Loop: Uhlengahlengiso lwamandla exesha lokwenyani (50–200 kW) ukuzinzisa indawo eshushu.
Ukukhuselwa kwegesi engasebenziyo: Umxube we-Ar/N₂ (ubunyulu obungama-99.999%) ukunqanda i-oxidation.
4. Ukuzenzekela kunye nokuBeka iliso
UkuJonga i-Diameter ye-CCD: Ingxelo yexesha lokwenyani (ukuchaneka ± 0.01 mm).
I-Infrared Thermography: Ibeka iliso kwimopholoji yojongano olululwelo oluqinileyo.
CZ vs. KY Indlela yokuthelekisa
IParameter | Indlela yeCZ | Indlela ye-KY |
Ubukhulu Ubungakanani beCrystal | 12 intshi (300 mm) | 400 mm (ingot emile okwepere) |
I-Defect Density | <100/cm² | <50/cm² |
Izinga lokuKhula | 0.5-5 mm / h | 0.1–2 mm/h |
Ukusetyenziswa kwamandla | 50–80 kWh/kg | 80–120 kWh/kg |
izicelo | I-substrates ze-LED, i-GaN epitaxy | Iifestile ze-Optical, ii-ingots ezinkulu |
Iindleko | Ephakathi (utyalo-mali lwezixhobo eziphezulu) | Phezulu (inkqubo entsonkothileyo) |
Usetyenziso oluphambili
1. Ishishini leSemiconductor
I-GaN Epitaxial Substrates: 2–8-intshi yewafers (TTV <10 μm) yeeMicro-LEDs kunye ne-laser diode.
IiWafers ze-SOI: Uburhabaxa bomphezulu <0.2 nm yeetshiphusi ezidityanisiweyo ze-3D.
2. Optoelectronics
IiWindows zeLaser ye-UV: Ukumelana ne-200 W/cm² yoxinzelelo lwamandla kwi-lithography optics.
Amacandelo e-Infrared: I-coefficient yokufunxa <10⁻³ cm⁻¹ yomfanekiso we-thermal.
3. Ii-Electronics zabathengi
IKhamera ye-Smartphone Igubungela: Ubulukhuni be-Mohs 9, 10 × ukuphuculwa kokuchasa umkrwelo.
Iziboniso zeSmartwatch: Ukutyeba 0.3-0.5 mm, ukuhanjiswa> 92%.
4. Ukhuselo kunye ne-Aerospace
I-Nuclear Reactor Windows: Ukunyamezela imitha ukuya kuthi ga kwi-10¹⁶ n/cm².
Izipili zeLaser eziPhezulu-Amandla: Ukuguqulwa kweThermal <λ/20@1064 nm.
Iinkonzo ze-XKH
1. ULungiselelo lweZixhobo
Uyilo lweGumbi eliScalable: Φ200–400 mm ulungelelwaniso lwe-2–12-intshi yemveliso ye-wafer.
I-Doping Flexibility: Ixhasa umhlaba onqabileyo (Er/Yb) kunye noguqulo-yesinyithi (Ti/Cr) idoping kwiipropathi ezilungelelanisiweyo ze-optoelectronic.
2. Inkxaso yokuphela ukuya esiphelweni
Inkqubo yokuPhumeza: Iiresiphi eziqinisekisiweyo kwangaphambili (50+) ze-LED, izixhobo zeRF, kunye nezinto ezenziwe lukhuni ngemitha.
Inethiwekhi yeNkonzo yeHlabathi: I-24/7 yoxilongo olukude kunye nokugcinwa kwendawo kunye newaranti yeenyanga ezingama-24.
3. Ukulungiswa komlambo
I-Wafer Fabrication: Ukusika, ukucola, kunye nokupholisha ii-intshi ezi-2-12-intshi (i-C/A-plane).
Iimveliso ezongeziweyo kwixabiso:
Amacandelo okukhanya: iifestile ze-UV/IR (0.5-50 mm ubukhulu).
Izixhobo zeBanga lobucwebe: Cr³⁺ ruby (isiqinisekiso se-GIA), iTi³⁺ star sapphire.
4. UbuNkokheli boBugcisa
Iziqinisekiso: Iiwafers ezithobela i-EMI.
Amalungelo awodwa omenzi wechiza: Amalungelo awodwa omenzi wechiza kwindlela entsha yeCZ.
Ukuqukumbela
Isixhobo sendlela ye-CZ sihambisa ukuhambelana komgangatho omkhulu, amaxabiso aphantsi kakhulu, kunye nozinzo oluphezulu lwenkqubo, nto leyo iyenza ibe luphawu loshishino lwe-LED, isemiconductor, kunye nezicelo zokhuselo. I-XKH inikezela ngenkxaso ebanzi ukusuka ekusetyenzisweni kwezixhobo ukuya kwi-post-processing process, evumela ukuba abathengi bafikelele kwixabiso eliphantsi, imveliso yekristale yesafire ephezulu.

