Isixhobo se-quartz sekristale yesikhephe sobushushu obuphezulu kunye nokumelana nokunxiba

Izikhephe zekristale ze-quartz ziyilelwe ukubamba kunye nokuthutha ii-silicone wafers kwindawo ezinobushushu obuphezulu, njengakwiziko ezisetyenziselwa iinkqubo ezifana ne-oxidation, i-diffusion kunye nokufaka i-annealing. Ukusetyenziswa kwe-quartz kuqinisekisa ukuba inqanawa inokumelana namaqondo okushisa aphezulu kunye neemeko ezibuhlungu zeekhemikhali ezidibana nazo kule nkqubo yokuvelisa i-semiconductor.

Uyilo lwesikhephe se-quartz luvumela ukulayishwa ngokufanelekileyo kunye nokukhulula ama-wafers amaninzi, okwenza kube lula ukuveliswa kwemveliso kwiindawo zokuvelisa i-semiconductor. Ukusetyenziswa kwezikhephe ze-quartz kunceda ukuqinisekisa ukuthembeka kunye nomgangatho wee-silicon wafers ngexesha lonyango olwahlukeneyo lwe-thermal kunye neekhemikhali, ukunceda ukuphucula ukuchaneka ngokubanzi kunye nokuthembeka kwezixhobo ze-semiconductor eziveliswayo.

Isikhephe se-quartz wafer sisixhobo esikhethekileyo esisetyenziswa kwishishini le-semiconductor ukuphatha ii-silicone wafers. Ngokuqhelekileyo yenziwe nge-quartz ecocekileyo, ekhethiweyo ngenxa yeempawu zayo ezintle zokushisa kunye neekhemikhali.

Isikhephe se-wafer siyilelwe ukuthwala kunye nokusetyenzwa kwee-wafers ze-silicon kwindawo yobushushu obuphezulu, njengakwiziko ezisetyenziselwa iinkqubo ezinje nge-oxidation, ukusasazwa, kunye nokufakwa kwe-annealing. Ukusetyenziswa kwe-quartz kuqinisekisa ukuba iinqanawa ziyakwazi ukumelana namaqondo okushisa aphezulu kunye neemeko ezibuhlungu zeekhemikhali ezidibana nazo kule nkqubo yokuvelisa i-semiconductor.

Uyilo lweenqanawa luvumela ukulayishwa ngokufanelekileyo kunye nokukhulula ama-wafers amaninzi, okukhokelela kwimveliso ephezulu yokuvelisa kwiindawo zokuvelisa i-semiconductor. Ukusetyenziswa kwee-wafers ze-quartz kunceda ukuqinisekisa ukuthembeka kunye nomgangatho wee-silicon wafers ngexesha lonyango olwahlukeneyo lwe-thermal kunye neekhemikhali, ngaloo ndlela ukwandisa ukuchaneka kunye nokuthembeka kwezixhobo ze-semiconductor eziveliswayo.