Izixhobo zesikhephe sekristale seQuartz ezenziwe ngokwezifiso zobushushu obuphezulu kunye nokumelana nokuguguleka

Iinqanawa zekristale zeQuartz zenzelwe ukubamba nokuthutha ii-wafers zesilicon kwiindawo ezinobushushu obuphezulu, njengakwii-oven ezisetyenziselwa iinkqubo ezifana ne-oxidation, diffusion kunye ne-annealing. Ukusetyenziswa kwequartz kuqinisekisa ukuba inqanawa inokumelana nobushushu obugqithisileyo kunye neendawo ezinzima zeekhemikhali ezidibana nazo kwezi nkqubo zokwenziwa kwee-semiconductor.

Uyilo lwenqanawa ye-quartz luvumela ukulayishwa nokuthululwa kwee-wafers ezininzi ngokufanelekileyo, okuvumela imveliso ephezulu kwiindawo zokwenza ii-semiconductor. Ukusetyenziswa kweenqanawa ze-quartz kunceda ukuqinisekisa ukuthembeka kunye nomgangatho wee-wafers ze-silicon ngexesha lonyango oluhlukeneyo lobushushu kunye neekhemikhali, okunceda ukuphucula ukuchaneka kunye nokuthembeka kwezixhobo ze-semiconductor eziveliswayo.

I-quartz wafer boat sisixhobo esikhethekileyo esisetyenziswa kwishishini le-semiconductor ukuphatha ii-silicon wafers. Ngokwesiqhelo yenziwe nge-quartz ecocekileyo kakhulu, ekhethwa ngenxa yeempawu zayo ezibalaseleyo zobushushu kunye neekhemikhali.

Isikhephe se-wafer senzelwe ukuthwala nokucubungula ii-wafer ze-silicon kwiindawo ezinobushushu obuphezulu, njengakwii-oven ezisetyenziselwa iinkqubo ezifana ne-oxidation, diffusion, kunye ne-annealing. Ukusetyenziswa kwe-quartz kuqinisekisa ukuba ii-boat ziyakwazi ukumelana nobushushu obugqithisileyo kunye neendawo ezinzima zeekhemikhali ezidibana nazo kwezi nkqubo zokuvelisa ii-semiconductor.

Uyilo lweenqanawa luvumela ukulayisha nokuthulula ii-wafers ezininzi ngendlela efanelekileyo, nto leyo ekhokelela kwimveliso ephezulu kwiindawo zokwenza ii-semiconductor. Ukusetyenziswa kwee-wafers ze-quartz kunceda ukuqinisekisa ukuthembeka kunye nomgangatho wee-wafers ze-silicon ngexesha lonyango oluhlukeneyo lobushushu kunye neekhemikhali, ngaloo ndlela kwandisa ukuchaneka kunye nokuthembeka kwezixhobo ze-semiconductor eziveliswayo.