Izikhonkwane zokuPhakamisa iSapphire Eyenye ikristale enye Al₂O₃ iphini yokuphakamisa iWafer

Inkcazelo emfutshane:

Izikhonkwane zokuPhakamisa iSapphire zimele ukuqhubela phambili okubalulekileyo kumacandelo okulungisa i-semiconductor, eyinjineli ukusuka kwisafire ephezulu ephezulu-ephakamileyo ye-single-crystal (Al₂O₃) ukuhlangabezana neemfuno ezithe ngqo zetekhnoloji ye-microfabrication yanamhlanje. La macandelo achanekileyo aye ayimfuneko kwimveliso yesixhobo se-semiconductor, iinkqubo zokukhula kwe-LED epitaxial, kunye nosetyenziso oluphezulu lwe-wafer. Ulwakhiwo olukhethekileyo lwekristale yesafire yokwenziwa lunika iipropati zemathiriyeli ezingaqhelekanga ezenza ukuba ezi zikhonkwane zokuphakamisa zisebenze ukodlula ezinye iindlela eziqhelekileyo kwezona ndawo zisebenza nzima kakhulu. Uzinzo lwabo olukhethekileyo lwe-thermal lugcina intembeko yomatshini kuwo wonke amaqondo obushushu agqithisileyo, ngelixa ukuxhathisa kwabo ngokwendalo kweekhemikhali kuqinisekisa ukusebenza okungaguquguqukiyo xa bevezwe kwiikhemistri zenkqubo enobundlobongela. Oku kudityaniswa kweempawu kwenza i-Sapphire Lift Pins ibe sisisombululo esithandwayo se-wafer ebaluleke kakhulu yokuphatha izicelo apho ukuchaneka kwe-nanometer-level, ulawulo longcoliseko, kunye nokuthembeka kwenkqubo kubaluleke kakhulu.


Iinkcukacha zeMveliso

Iithegi zeMveliso

Iiparamitha zobugcisa

Ukuqulunqwa kweekhemikhali Al2O3
Ukuqina 9Mohs
Ubume be-Optic Uniaxial
Isalathiso sokuqhafaza 1.762-1.770
I-Birefringence 0.008-0.010
Ukusasazwa Phantsi, 0.018
Luster Vitreous
I-Pleochroism Phakathi ukuya kuOmelele
Ububanzi 0.4mm-30mm
Ukunyamezela kwe-diameter 0.004mm-0.05mm
ubude 2mm-150mm
ukunyamezela ubude 0.03mm-0.25mm
Umgangatho womphezulu 40/20
Umphezulu ongqukuva RZ0.05
Imilo eqhelekileyo zombini iziphelo zisicaba, esinye isiphelo redius, zombini isiphelo redius,
izikhonkwane zesali kunye neemilo ezikhethekileyo

Ezona mpawu

I-1.Ubunzima obuKhethekileyo kunye nokuNxitywa kwe-Resistance: Ngomlinganiselo wobulukhuni be-Mohs we-9, okwesibini kuphela kwidayimane, i-Sapphire Lift Izikhonkwane zibonisa iimpawu zokunxiba ezigqithisa ngokugqithiseleyo i-silicon carbide yendabuko, i-alumina ceramic, okanye i-alloy alloy alternatives. Obu bunzima bugqithisekileyo buguqulela ekunciphiseni kakhulu iimfuno zokuvelisa kunye nokugcinwa kwezinto, kunye nobomi benkonzo ngokuqhelekileyo ngamaxesha angama-3-5 ubude kunemathiriyeli eqhelekileyo kwizicelo ezifanayo.

I-2.I-Superior High-Temperature Resistance: Yenzelwe ukujamelana nokusebenza okuqhubekayo kumaqondo okushisa angaphezu kwe-1000 ° C ngaphandle kokuthotywa, i-Sapphire Lift Pins igcina ukuzinza kwe-dimensional kunye namandla omatshini kwiinkqubo ezifunwa kakhulu ze-thermal. Oku kubenza baxabiseke ngokukodwa kwizicelo ezibalulekileyo ezifana nekhemikhali yokubeka umphunga (CVD), i-metal-organic chemical vapor deposition (MOCVD), kunye neenkqubo zobushushu obuphezulu bobushushu apho ukungahambelani kwe-thermal kungabeka esichengeni isivuno senkqubo.

I-3.I-Chemical Inertness: Isakhiwo esisodwa se-crystal sapphire sibonisa ukuchasana okuphawulekayo ukuhlaselwa kwi-HF acid, i-chlorine-based based chemistries, kunye nezinye iigesi zenkqubo ezinobundlobongela eziqhelekileyo ezidibana nazo kwi-semiconductor fabrication. Oku kuzinza kweekhemikhali kuqinisekisa ukusebenza okuhambelanayo kwiindawo ze-plasma kunye nokuthintela ukubunjwa kweziphene zomhlaba ezingakhokelela ekungcoleni kwe-wafer.

I-4.I-Intamination ye-Particle ephantsi: Yenziwe kwi-crystals-free-free, i-high-purity sapphire crystals (ngokuqhelekileyo> 99.99%), ezi zikhonkwane zokuphakamisa zibonisa ukuchithwa kwe-particle encinci nangemva kokusetyenziswa okwandisiweyo. Ulwakhiwo lwazo lwangaphandle olungenazimbobo kunye nokugqitywa okugudisiweyo kuhlangabezana nezona mfuno zingqongqo zegumbi lokucoca, zinegalelo ngokuthe ngqo ekuphuculweni kwezivuno zenkqubo yokwenziwa kwe-node semiconductor ephezulu.

I-High-Precision Machining: Ukusebenzisa iindlela eziphambili zokusila idayimane kunye ne-laser processing, izikhonkwane zeSapphire Lift zingaveliswa ngokunyamezela kwe-sub-micron kunye nokugqitywa komphezulu ngaphantsi kwe-0.05μm Ra. Iijiyometri zesiko ezibandakanya iiprofayili ezithe chatha, ulungelelwaniso lweengcebiso ezikhethekileyo, kunye neempawu zolungelelwaniso ezidityanisiweyo zinokuyilwa ukujongana nemiceli mngeni ethile yokuphatha i-wafer kwisixhobo sokwenziwa kwesizukulwana esilandelayo.

Izicelo eziphambili

I-1.I-Semiconductor Manufacturing: Izikhonkwane zokuphakamisa i-Sapphire zidlala indima ebalulekileyo kwiinkqubo eziphezulu zokulungisa i-wafer, ukubonelela ngenkxaso ethembekileyo kunye nokubeka ngokuchanekileyo ngexesha le-photolithography, i-etching, i-deposition, kunye neenkqubo zokuhlola. Uzinzo lwabo lwe-thermal kunye neekhemikhali lubenza baxabiseke ngakumbi kwizixhobo ze-EUV ze-lithography kunye nezicelo zokupakisha eziphambili apho uzinzo lwe-dimensional kwi-nanometer scales luyimfuneko.

I-2.LED Epitaxy (MOCVD): Kwi-gallium nitride (GaN) kunye neenkqubo ezihambelanayo ze-semiconductor epitaxial ukukhula, ii-Sapphire Lift Pins zibonelela ngenkxaso ye-wafer ezinzileyo kumaqondo okushisa ahlala edlula i-1000 ° C. Iimpawu zabo ezihambelana nokwanda kwe-thermal kunye ne-sapphire substrates zinciphisa ukugoba kwe-wafer kunye nokwakheka kwe-slip ngexesha lenkqubo yokukhula kwe-epitaxial.

I-3.I-Photovoltaic Industry: Inzuzo ephezulu yokwenziwa kweeseli zelanga ezivela kwiipropati ezikhethekileyo zesafire kwi-high-temperature diffusion, sintering, kunye neenkqubo zokubeka ifilimu encinci. Ukunganyangeki kwezikhonkwane kuxabiseke ngokukodwa kwiindawo zokuvelisa ngobuninzi apho ixesha elide lichaphazela iindleko zokwenziwa.

I-4.I-Precision Optics kunye ne-Electronics Processing: Ngaphandle kwezicelo ze-semiconductor, i-Sapphire Lift Pins ifumana ukusetyenziswa ekuphatheni i-optical components e-delicate, izixhobo ze-MEMS, kunye ne-substrates ezikhethekileyo apho u-contamination-free processing kunye nokuthintela ukukrwela kubaluleke kakhulu. Iipropathi zabo zokugquma umbane zibenza balungele usetyenziso olubandakanya izixhobo ezibuthathaka kwi-electrostatic.

Iinkonzo ze-XKH zezikhonkwane zokuphakamisa isafire

I-XKH ibonelela ngenkxaso yobugcisa ebanzi kunye nezisombululo ezilungiselelwe wena kwiSapphire Lift Pins:

1. Iinkonzo zoPhuhliso lweSiko
· Inkxaso yokulungiswa komgangatho, ijometri kunye nomphezulu wokulungisa
· Ukukhetha izinto eziphathekayo kunye neengcebiso zokuphucula iparamitha
· Uyilo lwemveliso edibeneyo kunye nokuqinisekiswa kokulinganisa
2. Ukuchaneka kweZakhono zokuVelisa
· Ukuchaneka okuphezulu komatshini kunye nokunyamezela okulawulwa ngaphakathi kwe-±1μm
· Unyango olulodwa olubandakanya ukugulisa isipili kunye nokuchamsha emphethweni
· Izisombululo ozikhethelayo zokulungiswa komphezulu ezifana ne-anti-stick yokugquma
3. Inkqubo yoQinisekiso loMgangatho
· Ukuphunyezwa okungqongqo kokuhlolwa kwezinto ezingenayo kunye nolawulo lwenkqubo
· Uhlolo olupheleleyo lwamehlo kunye nohlalutyo lobume bomhlaba
· Ukubonelela ngeengxelo zovavanyo lokusebenza kwemveliso
4. Iinkonzo zoBonelelo lweeNkonzo
· Ukuhanjiswa ngokukhawuleza kweemveliso eziqhelekileyo
· Ulawulo lwe-inventri olunikezelweyo lweeakhawunti eziphambili
5. Inkxaso yoBugcisa
· Ukubonisana ngesisombululo sesicelo
· Ukusabela ngokukhawuleza emva kokuthengisa
Sizimisele ukubonelela ngeemveliso zeSapphire Lift Lift ezikumgangatho ophezulu kunye neenkonzo zobuchwephesha ukuze sihlangabezane neemfuno ezingqongqo zesemiconductor, i-LED kunye namanye amashishini aphambili.

Izikhonkwane zokuphakamisa iSapphire 1
Izikhonkwane zokuphakamisa iSapphire 4