I-LNOI Wafer (iLithium Niobate kwi-Insulator) I-Telecommunications Sensing High Electro-Optic
Umzobo oneenkcukacha
Isishwankathelo
Ngaphakathi kwebhokisi ye-wafer kukho imingxunya elinganayo, ubukhulu bayo bufana nqwa ukuxhasa amacala amabini e-wafer. Ibhokisi yekristale ngokubanzi yenziwe ngezinto ze-PP zeplastiki ezikhanyayo ezimelana nobushushu, ukuguguleka kunye nombane ongashukumiyo. Imibala eyahlukeneyo yezongezo isetyenziselwa ukwahlula amacandelo enkqubo yesinyithi kwimveliso ye-semiconductor. Ngenxa yobukhulu obuncinci be-semiconductors, iipateni ezixineneyo, kunye neemfuno ezingqongqo kakhulu zobukhulu bezinto kwimveliso, ibhokisi ye-wafer kufuneka iqinisekiswe ukuba ikwindawo ecocekileyo yokuqhagamshela kwindawo yokusabela kwebhokisi ye-microenvironment yemishini eyahlukeneyo yemveliso.
Indlela Yokuvelisa
Ukwenziwa kwee-wafers ze-LNOI kuqulathe amanyathelo aliqela achanekileyo:
Inyathelo 1: Ukufakelwa kwe-Helium IonIi-ion zeHelium zifakwa kwi-bulk LN crystal kusetyenziswa i-ion implanter. Ezi i-ion zihlala kubunzulu obuthile, zenze i-plane ebuthathaka eya kuthi ekugqibeleni incede ukwahlukana kwefilimu.
Inyathelo lesi-2: Ukwakhiwa kweSiseko seNqanabaI-silicon okanye i-LN wafer eyahlukileyo ifakwa i-oxidized okanye ifakwe i-SiO2 kusetyenziswa i-PECVD okanye i-thermal oxidation. Umphezulu wayo ucwangcisiwe ukuze ube nokudityaniswa okufanelekileyo.
Inyathelo lesi-3: Ukudibanisa i-LN kwi-SubstrateIkristale ye-LN efakwe kwi-ion iyajikwa ize incamathiselwe kwi-base wafer kusetyenziswa i-direct wafer bonding. Kwiimeko zophando, i-benzocyclobutene (BCB) ingasetyenziswa njengesincamathiselo ukwenza kube lula ukubopha phantsi kweemeko ezingqongqo.
Inyathelo lesi-4: Unyango lwe-Thermal kunye noKwahlulwa kweFilimuI-Annealing ivuselela ukwakheka kwamaqamza kubunzulu obufakelweyo, nto leyo evumela ukwahlukana kwefilimu encinci (umaleko ophezulu we-LN) kwi-bulk. Amandla oomatshini asetyenziswa ukugqiba ukukhupha i-exfoliation.
Inyathelo lesi-5: Ukupholisha umphezuluI-Chemical Mechanical Polishing (CMP) isetyenziswa ukuthambisa umphezulu we-LN ophezulu, nto leyo ephucula umgangatho wokukhanya kunye nokuveliswa kwezixhobo.
Iiparameters zobugcisa
| Izinto eziphathekayo | I-Optical Ibanga I-LiNbO3 iiwafes (ezimhlophe or Mnyama) | |
| I-Curie Ubushushu | 1142±0.7℃ | |
| Ukusika I-engile | X/Y/Z njl. njl. | |
| Ububanzi/ubukhulu | 2”/3”/4” ±0.03mm | |
| I-Tol(±) | <0.20 mm ±0.005mm | |
| Ubukhulu | 0.18～0.5mm okanye ngaphezulu | |
| Isikolo esiphambili Iflethi | 16mm/22mm/32mm | |
| I-TTV | <3μm | |
| Ukuqubuda | -30 | |
| I-Warp | <40μm | |
| Ukuqhelaniswa Iflethi | Zonke ziyafumaneka | |
| Umphezulu Uhlobo | Icala Elinye Elikhazimlisiweyo (SSP)/Icala Eliphindwe Kabini Elikhazimlisiweyo (DSP) | |
| Ipolished icala Ra | <0.5nm | |
| S/D | 20/10 | |
| Umphetho Iikhrayitheriya | R=0.2mm Uhlobo lwe-C or Impumlo yenkunzi | |
| Umgangatho | Mahala of ukuqhekeka (amaqamza kwaye inclusions) | |
| I-Optical idosi | I-Mg/Fe/Zn/MgO njl. njl. ngenxa i-optical ibakala I-LN iiwafers nganye iceliwe | |
| Isonka esisicaba Umphezulu Iikhrayitheriya | Isalathisi sokubonisa ukukhanya | Hayi=2.2878/Ne=2.2033 @632nm indlela yokudibanisa ubude/iprism. |
| Ungcoliseko, | Akukho nanye | |
| Amasuntswana c>0.3μ m | <=30 | |
| Ukukrwela, ukuqhekeza | Akukho nanye | |
| Isiphene | Akukho mikrwelo, imikrwelo, amabala esarha, amabala amdaka | |
| Ukupakisha | Ubungakanani/Ibhokisi yeWafer | 25pcs ngebhokisi nganye |
Iimeko zokusetyenziswa
Ngenxa yokuguquguquka kwayo nokusebenza kwayo, i-LNOI isetyenziswa kumashishini amaninzi:
Iifotoniki:Ii-compact modulators, ii-multiplexers, kunye nee-photonic circuits.
I-RF/Izandi:Iimodulators ze-Acousto-optic, izihluzi zeRF.
Ikhompyutha yeQuantum:Abaxubi beefrikhwensi ezingezizo ezingqalileyo kunye neejenereyitha zephoton-pair.
Ukhuselo kunye neenqwelo-moya:Izixhobo zokutshintsha i-frequency gyros, ezisebenzisa i-optical gyros ezingasebenzi kakuhle.
Izixhobo zonyango:Ii-biosensors ezibonakalayo kunye nee-probes zesignali ezisebenzisa i-frequency ephezulu.
FAQ
Q: Kutheni i-LNOI ikhethwa ngaphezu kwe-SOI kwiinkqubo ze-optical?
A:I-LNOI inee-coefficients eziphezulu ze-electro-optic kunye noluhlu olubanzi lokucaca, okuvumela ukusebenza okuphezulu kwiisekethe ze-photonic.
Q: Ingaba i-CMP iyimfuneko emva kokuqhekeka?
A:Ewe. Umphezulu we-LN obonakalayo urhabaxa emva kokusikwa kwe-ion kwaye kufuneka upholishwe ukuze uhlangabezane neemfuno ze-optical-grade.
Q: Yeyiphi i-wafer enkulu ekhoyo?
A:Iiwafer ze-LNOI zorhwebo ikakhulu ziyi-3” kunye ne-4”, nangona abanye abathengisi bevelisa iintlobo ze-6”.
Q: Ngaba umaleko we-LN ungaphinda usetyenziswe emva kokuqhekeka?
A:Ikristale esisiseko ingaphinda ipholishwe kwaye isetyenziswe kwakhona izihlandlo ezininzi, nangona umgangatho wayo unokwehla emva kwemijikelo emininzi.
Q: Ngaba ii-wafers ze-LNOI ziyahambelana nokucubungula i-CMOS?
A:Ewe, zenzelwe ukuba zihambelane neenkqubo zemveli zokwenza i-semiconductor, ingakumbi xa kusetyenziswa ii-silicon substrates.
