I-8inch LNOI (LiNbO3 kwi-Insulator) iWafer ye-Optical Modulators ii-Waveguides iiSekethe eziDityanisiweyo
Idayagram eneenkcukacha
Intshayelelo
I-Lithium Niobate kwi-Insulator (i-LNOI) i-wafers yimathiriyeli ye-cutting-edge esetyenziswa kwi-optical ephezulu kunye ne-electronic applications. Ezi wafers ziveliswa ngokudlulisa umaleko obhityileyo we-lithium niobate (LiNbO₃) kwi-substrate ekhuselayo, ngokuqhelekileyo isilicon okanye enye imathiriyeli efanelekileyo, kusetyenziswa ubuchule obuntsonkothileyo obufana nokufakelwa kwe-ion kunye ne-wafer bonding. Itekhnoloji ye-LNOI yabelana ngeendlela ezininzi ezifanayo kunye ne-Silicon kwi-Insulator (i-SOI) iteknoloji ye-wafer kodwa ithatha inzuzo yeempawu ezizodwa ze-lithium niobate, izinto eziyaziwayo nge-piezoelectric, i-pyroelectric, kunye ne-nonlinear optical features.
Ii-wafers ze-LNOI zifumene ingqwalasela ebalulekileyo kwiinkalo ezifana ne-optics edibeneyo, unxibelelwano, kunye ne-quantum computing ngenxa yokusebenza kwabo okuphezulu kwi-high-frequency kunye ne-high-speed applications. Ii-wafers ziveliswa kusetyenziswa ubuchule be-"Smart-cut", obuvumela ulawulo oluchanekileyo phezu kobunzima befilimu ye-lithium niobate ebhityileyo, iqinisekisa ukuba ii-wafers ziyahlangabezana nemigaqo efunekayo kwizicelo ezahlukeneyo.
Umgaqo
Inkqubo yokudala ii-wafers ze-LNOI iqala nge-lithium niobate crystal eninzi. I-crystal ingena kwi-ion implantation, apho i-ioni ye-helium ephezulu yamandla ifakwe kumphezulu we-lithium niobate crystal. Ezi ion zingena kwikristale ukuya kubunzulu obuthile kwaye ziphazamise ukwakheka kwekristale, zenze inqwelomoya ebuthathaka enokuthi kamva isetyenziswe ukwahlula ikristale ibe ngamaleko amancinci. Amandla athile eeoni ze-helium alawula ubunzulu bokufakelwa, obuchaphazela ngokuthe ngqo ukutyeba koqweqwe lokugqibela lwe-lithium niobate.
Emva kokufakelwa kwe-ion, ikristale ye-lithium niobate idityaniswe kwi-substrate isebenzisa ubuchule obubizwa ngokuba yi-wafer bonding. Inkqubo yokudibanisa ngokuqhelekileyo isebenzisa indlela yokudibanisa ngokuthe ngqo, apho iindawo ezimbini (i-ion-implanted lithium niobate crystal kunye ne-substrate) zixinzelelwe kunye phantsi kobushushu obuphezulu kunye noxinzelelo lokudala ibhondi eqinile. Kwezinye iimeko, i-adhesive material efana ne-benzocyclobutene (BCB) ingasetyenziselwa inkxaso eyongezelelweyo.
Ukulandela ukudityaniswa, iwafer ingena kwinkqubo yokunqanda ukulungisa nawuphi na umonakalo owenziwe kukufakelwa kwe-ion kunye nokuphucula ibhondi phakathi kweeleya. Inkqubo ye-annealing ikwanceda umaleko we-lithium niobate obhityileyo ukuba uqhawule kwikristale yokuqala, ushiye ngasemva umaleko obhityileyo, okumgangatho ophezulu we-lithium niobate onokusetyenziswa ukwenza isixhobo.
Iinkcukacha
Ii-wafers ze-LNOI zibonakaliswa neenkcukacha ezininzi ezibalulekileyo eziqinisekisa ukufaneleka kwazo kwizicelo ezisebenza kakhulu. Ezi ziquka:
Iinkcukacha zeMathiriyeli
| Izinto eziphathekayo | Iinkcukacha |
| Izinto eziphathekayo | I-Homogeneous: LiNbO3 |
| Umgangatho weMaterial | Amabhamuza okanye ukubandakanywa <100μm |
| Ukuqhelaniswa | I-Y-isike ± 0.2 ° |
| Ukuxinana | 4.65 g/cm³ |
| Ubushushu beCurie | 1142 ±1°C |
| Ukungafihli | > 95% kuluhlu lwe-450-700 nm (10 mm ubukhulu) |
IiNgcaciso zoMveliso
| Iparamitha | Inkcazo |
| Ububanzi | 150 mm ±0.2 mm |
| Ukutyeba | 350 μm ±10 μm |
| Ukucaba | <1.3 μm |
| Ukwahluka koKutyeba ngokupheleleyo (TTV) | Ukurhweba <70 μm @ 150 mm wafer |
| Ukwahluka koButyenene beNdawo (LTV) | <70 μm @ 150 mm wafer |
| Uburhabaxa | I-Rq ≤0.5 nm (ixabiso le-AFM RMS) |
| Umgangatho womphezulu | 40-20 |
| Amanqaku (ayikususwa) | 100-200 μm ≤3 amasuntswana |
| Iitshiphusi | <300 μm (i-wafer epheleleyo, akukho ndawo yokuhluthwa) |
| Iintanda | Akukho zintanda (i-wafer epheleleyo) |
| Usulelo | Akukho mabala angasukiyo (wafer epheleleyo) |
| Ukufana | <30 imizuzwana |
| iNqwelo-moya yoKuqhelanisa (i-X-axis) | 47 ±2 mm |
Usetyenziso
Ii-wafers ze-LNOI zisetyenziswa kuluhlu olubanzi lwezicelo ngenxa yeepropathi zazo ezizodwa, ngakumbi kwimimandla yeefotonics, ezonxibelelwano, kunye ne-quantum technologies. Ezinye zezicelo eziphambili ziquka:
Ii-Optics eziDityanisiweyo:Ii-wafers ze-LNOI zisetyenziswa ngokubanzi kwiisekethe zamehlo ezidityanisiweyo, apho zenza izixhobo ezisebenza ngokuphezulu zeefotonic ezinjengeemodyuli, ii-waveguides, kunye neeresonators. Iimpawu eziphezulu ze-optical ze-lithium niobate zenza ukuba kube yinto ekhethekileyo yokukhetha izicelo ezifuna ukuphathwa kakuhle kokukhanya.
Unxibelelwano:Ii-wafers ze-LNOI zisetyenziswa kwiimodyuli ze-optical, eziyinxalenye ebalulekileyo kwiinkqubo zonxibelelwano ezinesantya esiphezulu, kubandakanya uthungelwano lwefiber optic. Ukukwazi ukumodareyitha ukukhanya kwiifrikhwensi eziphezulu kwenza ii-wafers ze-LNOI zilungele iinkqubo zonxibelelwano lwangoku.
I-Quantum Computing:Kwitekhnoloji ye-quantum, ii-wafers ze-LNOI zisetyenziselwa ukwenza amacandelo eekhompyuter ze-quantum kunye neenkqubo zonxibelelwano lwe-quantum. Iipropati ze-LNOI ezingenangqamaniso ze-LNOI zisetyenziselwa ukudala izibini eziphothiweyo zefoton, ezibaluleke kakhulu ekuhanjisweni kwesitshixo se-quantum kunye ne-cryptography ye-quantum.
Iinzwa:Ii-wafers ze-LNOI zisetyenziswa kwizicelo ezahlukeneyo zokuva, kubandakanya i-optical kunye ne-acoustic sensors. Ukukwazi kwabo ukusebenzisana nokukhanya kunye nesandi kubenza baguquguquke kwiintlobo ezahlukeneyo zetekhnoloji yeemvakalelo.
FAQ
Q:Yintoni iteknoloji yeLNOI?
A: Itekhnoloji ye-LNOI ibandakanya ukuhanjiswa kwefilimu ye-lithium niobate encinci kwi-substrate ekhuselayo, ngokuqhelekileyo i-silicon. Le teknoloji iphakamisa iimpawu ezikhethekileyo ze-lithium niobate, ezifana neempawu zayo eziphezulu ze-optical nonlinear, i-piezoelectricity, kunye ne-pyroelectricity, iyenza ibe yinto efanelekileyo kwi-optics edibeneyo kunye nonxibelelwano.
Q:Yintoni umahluko phakathi kwe-LNOI kunye ne-SOI wafers?
A:Zombini ii-wafers ze-LNOI kunye ne-SOI ziyafana kuba ziquka umaleko obhityileyo wezinto ezidityaniswe kwi-substrate. Nangona kunjalo, ii-wafers ze-LNOI zisebenzisa i-lithium niobate njengemathiriyeli yefilimu ebhityileyo, ngelixa ii-wafers ze-SOI zisebenzisa i-silicon. Umahluko ongundoqo ulele kwiipropati zemathiriyeli yefilimu ebhityileyo, kunye ne-LNOI enikezela ngeempawu eziphezulu ze-optical kunye ne-piezoelectric.
Q:Zeziphi iingenelo zokusebenzisa ii-wafers ze-LNOI?
A:Ezona zinto ziluncedo kwii-wafers ze-LNOI ziquka iipropathi zazo ezibalaseleyo zamehlo, ezifana ne-nonlinear optical coefficients ephezulu, kunye namandla azo omatshini. Ezi mpawu zenza ii-wafers ze-LNOI zilungele ukusetyenziswa kwi-high-speed, high-frequency, kunye ne-quantum applications.
Q:Ngaba ii-wafers ze-LNOI zingasetyenziselwa usetyenziso lwe-quantum?
A: Ewe, ii-wafers ze-LNOI zisetyenziswa ngokubanzi kubuchwepheshe be-quantum ngenxa yokukwazi ukuvelisa iperi ephothiweyo yeefoton kunye nokuhambelana kwazo neefotoni ezihlanganisiweyo. Ezi mpawu zibalulekile kusetyenziso lwe-quantum computing, unxibelelwano, kunye ne-cryptography.
Q:Yintoni ubukhulu obuqhelekileyo beefilimu ze-LNOI?
A: Iifilimu ze-LNOI zihlala zisuka kumakhulu ambalwa e-nanometers ukuya kwii-micrometers ezininzi ngobukhulu, kuxhomekeke kwisicelo esithile. Ubunzima bulawulwa ngexesha lenkqubo yokufakelwa kwe-ion.
