I-8intshi LNOI (LiNbO3 kwi-Insulator) I-Wafer yeeModulators ze-Optical Ii-Waveguides Iisekethe eziDibeneyo
Umzobo oneenkcukacha
Intshayelelo
Ii-wafer zeLithium Niobate on Insulator (LNOI) zizinto ezisetyenziswa kakhulu kwizicelo ezahlukeneyo ze-optical neze-elektroniki. Ezi wafer ziveliswa ngokudlulisela umaleko omncinci we-lithium niobate (LiNbO₃) kwi-substrate yokukhusela, ngesiqhelo i-silicon okanye enye into efanelekileyo, kusetyenziswa iindlela ezintsonkothileyo ezifana nokufakelwa kwe-ion kunye nokubopha i-wafer. Itekhnoloji ye-LNOI ifana kakhulu netekhnoloji ye-wafer yeSilicon on Insulator (SOI) kodwa isebenzisa iipropati ezizodwa ze-optical ze-lithium niobate, into eyaziwa ngeempawu zayo ze-piezoelectric, pyroelectric, kunye ne-nonlinear optical.
Ii-wafer ze-LNOI zifumene ingqwalasela enkulu kwiindawo ezifana ne-integrated optics, i-telecommunications, kunye ne-quantum computing ngenxa yokusebenza kwazo okuphezulu kwizicelo ze-high-frequency kunye ne-high-speed. Ii-wafers ziveliswa kusetyenziswa indlela ethi "Smart-cut", evumela ulawulo oluchanekileyo phezu kobukhulu befilimu encinci ye-lithium niobate, ukuqinisekisa ukuba ii-wafers ziyahlangabezana neemfuno ezifunekayo kwizicelo ezahlukeneyo.
Umgaqo
Inkqubo yokwenza ii-wafers ze-LNOI iqala nge-bulk lithium niobate crystal. I-crystal ifakwa kwi-ion, apho ii-ion ze-helium ezinamandla aphezulu zifakwa kumphezulu we-lithium niobate crystal. Ezi i-ion zingena kwi-crystal ukuya kubunzulu obuthile kwaye ziphazamise isakhiwo se-crystal, zenze i-plane ebuthathaka enokusetyenziswa kamva ukwahlula i-crystal ibe ziingqimba ezincinci. Amandla athile ee-ion ze-helium alawula ubunzulu bokufakelwa, obuchaphazela ngokuthe ngqo ubukhulu bomaleko wokugqibela we-lithium niobate.
Emva kokufakelwa kwee-ion, i-lithium niobate crystal idityaniswa kwi-substrate kusetyenziswa indlela ebizwa ngokuba yi-wafer bonding. Inkqubo yokudibanisa idla ngokusebenzisa indlela yokudibanisa ngokuthe ngqo, apho iindawo ezimbini (i-ion-implanted lithium niobate crystal kunye ne-substrate) zicinezelwa kunye phantsi kobushushu obuphezulu kunye noxinzelelo ukwenza i-bond eqinileyo. Kwezinye iimeko, izinto ezinamathelayo ezifana ne-benzocyclobutene (BCB) zinokusetyenziselwa inkxaso eyongezelelweyo.
Emva kokubopha, i-wafer idlula kwinkqubo yokuqhoboshela ukuze kulungiswe nawuphi na umonakalo obangelwe kukufakelwa kwe-ion kunye nokuphucula ukubopha phakathi kweeleya. Inkqubo yokuqhoboshela ikwanceda umaleko omncinci we-lithium niobate ukuba uphume kwikristale yokuqala, ishiye umaleko omncinci, okumgangatho ophezulu we-lithium niobate onokusetyenziselwa ukwenza izixhobo.
Iinkcukacha
Ii-wafer ze-LNOI ziphawulwa ziinkcukacha ezibalulekileyo eziqinisekisa ukuba zifanelekile kwizicelo ezisebenza kakuhle. Ezi ziquka:
Iinkcukacha zezinto
| Izinto | Iinkcukacha |
| Izinto eziphathekayo | Ifanayo: LiNbO3 |
| Umgangatho wezinto eziphathekayo | Amaqamza okanye izinto ezifakiweyo <100μm |
| Ukuqhelaniswa | Ukusika okungu-Y ±0.2° |
| Uxinano | 4.65 g/cm³ |
| Ubushushu beCurie | 1142 ±1°C |
| Ukungafihlisi | >95% kuluhlu lwe-450-700 nm (ubukhulu be-10 mm) |
Iinkcukacha zoMveliso
| Ipharamitha | Iinkcukacha |
| Ububanzi | 150 mm ±0.2 mm |
| Ubukhulu | 350 μm ±10 μm |
| Ukuthe tyaba | <1.3 μm |
| Utshintsho Lobukhulu Obupheleleyo (TTV) | I-Warp <70 μm @ 150 mm wafer |
| Utshintsho Lobukhulu Bendawo (LTV) | <70 μm @ 150 mm iwafer |
| Uburhabaxa | I-Rq ≤0.5 nm (Ixabiso le-AFM RMS) |
| Umgangatho womphezulu | 40-20 |
| Amasuntswana (Awasuswa) | 100-200 μm ≤3 amasuntswana |
| Iitships | <300 μm (i-wafer epheleleyo, akukho ndawo yokukhupha) |
| Imifantu | Akukho ziqhekeko (i-wafer epheleleyo) |
| Ungcoliseko | Akukho mabala angasuswayo (i-wafer epheleleyo) |
| Ukufana | <30 iisekhondi ze-arc |
| Iplani yesalathiso soQondiso (i-X-axis) | 47 ±2 mm |
Izicelo
Ii-wafer ze-LNOI zisetyenziswa kwiintlobo ngeentlobo zezicelo ngenxa yeempawu zazo ezikhethekileyo, ngakumbi kwicandelo le-photonics, unxibelelwano, kunye netekhnoloji ye-quantum. Ezinye zezicelo eziphambili ziquka:
Ii-Optics eziDibeneyo:Ii-wafer ze-LNOI zisetyenziswa kakhulu kwiisekethe ze-optical ezihlanganisiweyo, apho zivumela izixhobo ze-photonic ezisebenzayo kakhulu ezifana nee-modulators, ii-waveguides, kunye nee-resonators. Iipropati eziphezulu ze-optical ezingezizo ezi-linear ze-lithium niobate zenza ukuba ibe lukhetho oluhle kakhulu kwizicelo ezifuna ukulungiswa kokukhanya okusebenzayo.
Unxibelelwano:Ii-wafer ze-LNOI zisetyenziswa kwii-optical modulators, eziyinxalenye ebalulekileyo kwiinkqubo zonxibelelwano ezikhawulezayo, kuquka neenethiwekhi ze-fiber optic. Ukukwazi ukuguqula ukukhanya kwiifrequencies eziphezulu kwenza ii-wafer ze-LNOI zibe zezona zifanelekileyo kwiinkqubo zonxibelelwano zanamhlanje.
Ikhompyutha yeQuantum:Kwiteknoloji ye-quantum, ii-wafers ze-LNOI zisetyenziselwa ukwenza izinto zeekhompyutha ze-quantum kunye neenkqubo zonxibelelwano lwe-quantum. Iipropati ze-optical ezingezizo ezi-linear ze-LNOI zisetyenziswa ukwenza ii-photon pairs ezidibeneyo, ezibaluleke kakhulu ekuhanjisweni kwe-quantum key kunye ne-quantum cryptography.
Izinzwa:Ii-wafer ze-LNOI zisetyenziswa kwiindlela ezahlukeneyo zokuva, kuquka ii-optical kunye nee-acoustic sensors. Ukukwazi kwazo ukusebenzisana nokukhanya kunye nesandi kuzenza zibe nobuchule kwiintlobo ezahlukeneyo zobuchwepheshe bova.
FAQ
Q:Yintoni iteknoloji ye-LNOI?
Itekhnoloji ye-A:LNOI ibandakanya ukudluliselwa kwefilimu encinci ye-lithium niobate kwi-substrate yokukhusela, edla ngokuba yi-silicon. Le teknoloji isebenzisa iipropati ezikhethekileyo ze-lithium niobate, ezifana neempawu zayo eziphezulu ze-optical ezingezizo ezingqalileyo, i-piezoelectricity, kunye ne-pyroelectricity, okwenza ukuba ifaneleke kwi-optics edibeneyo kunye nonxibelelwano.
Q:Yintoni umahluko phakathi kwee-wafers ze-LNOI kunye ne-SOI?
A: Zombini ii-wafer ze-LNOI kunye ne-SOI ziyafana kuba zenziwe ngomaleko obhityileyo wezinto ezidityaniswe kwi-substrate. Nangona kunjalo, ii-wafer ze-LNOI zisebenzisa i-lithium niobate njengezinto zefilimu ebhityileyo, ngelixa ii-wafer ze-SOI zisebenzisa i-silicon. Umahluko ophambili ukwiimpawu zezinto zefilimu ebhityileyo, apho i-LNOI inikezela ngeempawu eziphezulu ze-optical kunye ne-piezoelectric.
Q:Zithini iingenelo zokusebenzisa ii-wafer ze-LNOI?
A:Iingenelo eziphambili zee-wafers ze-LNOI ziquka iipropati zazo ezintle zokukhanya, ezifana nee-coefficients eziphezulu ze-optical ezingezizo ezilandelelanayo, kunye namandla azo oomatshini. Ezi mpawu zenza ii-wafers ze-LNOI zilungele ukusetyenziswa kwizicelo zesantya esiphezulu, ii-frequency eziphezulu, kunye ne-quantum.
Q:Ngaba ii-wafers ze-LNOI zingasetyenziselwa ukusetyenziswa kwe-quantum?
A: Ewe, ii-wafer ze-LNOI zisetyenziswa kakhulu kwitekhnoloji ye-quantum ngenxa yokukwazi kwazo ukuvelisa ii-photon pairs ezidibeneyo kunye nokuhambelana kwazo ne-photonics edibeneyo. Ezi mpawu zibalulekile kwizicelo ze-quantum computing, unxibelelwano, kunye ne-cryptography.
Q:Bungakanani ubukhulu obuqhelekileyo beefilimu ze-LNOI?
Iifilimu ze-A:LNOI zihlala ziqala kwiinanometers ezingamakhulu ambalwa ukuya kwii-micrometers ezininzi ngobukhulu, kuxhomekeke kwisicelo esithile. Ubukhulu bulawulwa ngexesha lenkqubo yokufakelwa kwee-ion.
