Umatshini wesikwere wesitishi esiphindwe kabini ukucubungula intonga ye-silicon e-monocrystalline 6/8/12 intshi umphezulu othe tyaba Ra≤0.5μm
Iimpawu zezixhobo:
(1) Ukucubungula ngaxeshanye kwesitishi esiphindwe kabini
· Ukusebenza kabini: Ukucubungula ngaxeshanye iintonga ezimbini ze-silicon (Ø6"-12") kwandisa imveliso nge-40%-60% xa kuthelekiswa nezixhobo ze-Simplex.
· Ulawulo oluzimeleyo: Isitishi ngasinye sinokuzilungisa ngokwaso iiparameter zokusika (uxinzelelo, isantya sokutya) ukuze zilungelelanise neenkcukacha ezahlukeneyo zentonga yesilicon.
(2) Ukusika ngokuchanekileyo
· Ukuchaneka kobukhulu: ukunyamezelana komgama osecaleni webha yesikwere ± 0.15mm, uluhlu ≤0.20mm.
· Umgangatho womphezulu: ukuqhekeka komphetho osikiweyo <0.5mm, kunciphisa ubungakanani bokugaywa okulandelayo.
(3) Ulawulo olukrelekrele
· Ukusika okuhlengahlengiswayo: ukujonga ngexesha langempela imo yentonga yesilicon, uhlengahlengiso oluguquguqukayo lwendlela yokusika (njengokucubungula intonga yesilicon egobileyo).
· Ukulandeleka kwedatha: bhala phantsi iiparameter zokucubungula zentonga nganye yesilicon ukuxhasa ukufakwa kwenkqubo ye-MES.
(4) Ixabiso eliphantsi lokusetyenziswa
· Ukusetyenziswa kwentambo yedayimani: ≤0.06m/mm (ubude bentonga yesilicon), ububanzi bentambo ≤0.30mm.
· Ukujikeleza kwe-coolant: Inkqubo yokucoca yandisa ubomi benkonzo kwaye inciphisa ukulahlwa kolwelo olungcolileyo.
Iingenelo zobuchwepheshe kunye nophuhliso:
(1) Ukusika ukwenziwa ngcono kwetekhnoloji
- Ukusika ngemigca emininzi: Imigca yedayimani eli-100-200 isetyenziswa ngaxeshanye, kwaye isantya sokusika si-≥40mm/min.
- Ulawulo loxinzelelo: Inkqubo yokulungisa iluphu evaliweyo (±1N) ukunciphisa umngcipheko wokuqhekeka kwentambo.
(2) Ulwandiso lokuhambelana
- Ukulungelelaniswa kwezinto: Ixhasa i-silicon ye-monocrystalline yohlobo lwe-P/N, ehambelana ne-TOPCon, i-HJT kunye nezinye iintambo ze-silicon zebhetri ezisebenzayo kakhulu.
- Ubungakanani obuguquguqukayo: ubude bentonga yesilicon yi-100-950mm, umgama wentonga yesikwere ecaleni yi-166-233mm enokulungiseka.
(3) Uphuculo lwe-automation
- Ukulayisha nokukhulula iirobhothi: ukulayisha/ukukhulula iintonga zesilicon ngokuzenzekelayo, ukubetha imizuzu eyi-≤3.
- Ukuxilongwa okukrelekrele: Ukulungiswa kwangaphambili ukuze kuncitshiswe ixesha lokungasebenzi elingacwangciswanga.
(4) Ubunkokeli kushishino
- Inkxaso yeWafer: ingacubungulwa i-silicon eyi-≥100μm ebhityileyo kakhulu ngeentonga zesikwere, izinga lokuqhekeka <0.5%.
- Ukuphuculwa kokusetyenziswa kwamandla: Ukusetyenziswa kwamandla ngeyunithi nganye yentonga yesilicon kuncitshiswa ngama-30% (xa kuthelekiswa nezixhobo zemveli).
Iiparameter zobugcisa:
| Igama lepharamitha | Ixabiso lesalathiso |
| Inani leebha ezicutshungulweyo | Iziqwenga ezi-2/iseti |
| Uluhlu lobude bebha yokucubungula | 100~950mm |
| Uluhlu lomda womatshini | 166 ~ 233mm |
| Isantya sokusika | ≥40mm/ngomzuzu |
| Isantya sentambo yedayimani | 0~35m/s |
| Ububanzi bedayimani | 0.30 mm okanye ngaphantsi |
| Ukusetyenziswa komgca | 0.06 m/mm okanye ngaphantsi |
| Ububanzi bentonga ejikelezayo ehambelanayo | Ububanzi bentonga yesikwere egqityiweyo +2mm, Qinisekisa izinga lokupasa lokupholisha |
| Ulawulo lokwaphuka oluphambili | Umphetho oluhlaza ≤0.5mm, Akukho zitshiphu, umgangatho ophezulu womphezulu |
| Ubude be-arc bufana | Uluhlu lweprojektha <1.5mm, Ngaphandle kokuphazamiseka kwentonga yesilicon |
| Ubukhulu bomatshini (umatshini omnye) | 4800×3020×3660mm |
| Amandla apheleleyo alinganisiweyo | 56kW |
| Ubunzima obungapheliyo bezixhobo | 12t |
Itheyibhile yesalathisi sokuchaneka kweMishini:
| Into echanekileyo | Uluhlu lokunyamezelana |
| Ukunyamezela umda webha yesikwere | ± 0.15mm |
| Uluhlu lomphetho webha yesikwere | ≤0.20mm |
| I-engile kumacala onke entonga yesikwere | 90°±0.05° |
| Ubungangamsha bentonga yesikwere | ≤0.15mm |
| Ukuchaneka kokubeka okuphindaphindiweyo kwerobhothi | ± 0.05mm |
Iinkonzo ze-XKH:
I-XKH ibonelela ngeenkonzo zomjikelo opheleleyo kwiimashini ze-silicon ezimbini ze-mono-crystalline, kubandakanya ukwenziwa ngokwezifiso kwezixhobo (ezihambelana neentonga ezinkulu ze-silicon), ukugunyaziswa kwenkqubo (ukwenziwa ngcono kweeparameter zokusika), uqeqesho lokusebenza kunye nenkxaso emva kokuthengisa (ubonelelo lwezixhobo eziphambili, ukuxilongwa okukude), ukuqinisekisa ukuba abathengi bafumana isivuno esiphezulu (>99%) kunye nemveliso yeendleko eziphantsi zokusetyenziswa, kunye nokubonelela ngohlaziyo lobuchwephesha (njengokwenziwa ngcono kokusika i-AI). Ixesha lokuhambisa liziinyanga ezi-2-4.
Umzobo oneenkcukacha









