Ifilimu ye-AR yokulwa nokubonakalisa eyenziwe nge-silicon lens egqunywe nge-monocrystalline silicon eyenziwe ngokwezifiso

Ifilimu ye-AR yokulwa nokubonakalisa eyenziwe nge-silicon lens egqunywe nge-monocrystalline silicon egqunywe ngokwezifiso Umfanekiso obonisiweyo

Inkcazo emfutshane:

Ilensi ye-silicon enombala ocwebezelayo yinto esebenzayo esekwe kwi-silicon enombala ocwebezelayo (Si) ecocekileyo kakhulu ngokusebenzisa ubuchwepheshe bokucubungula okuchanekileyo kunye nobuchwepheshe bokugquma. I-silicon enombala ocwebezelayo inokudluliselwa kokukhanya okugqwesileyo kwi-infrared band (1.2-7μm), kwaye xa idibene neengubo ezifana nefilimu echasene nokukhanya (AR), ifilimu ekhanyayo ephezulu (HR) okanye ifilimu yesihluzi, inokuphucula kakhulu ukuhanjiswa okanye ukusebenza kokukhanya kweebhendi ezithile. Ezi mveliso zisetyenziswa kakhulu kwimifanekiso ye-infrared, i-laser optics kunye nokufunyanwa kwe-semiconductor.

Thumela i-imeyile kuthi

Iimbonakalo

Iimpawu zelensi yesilicon egqunywe ngentsimbi:

1. Ukusebenza kwe-Optical:
Uluhlu lokudlulisa: 1.2-7μm (kufutshane ne-infrared ukuya kwi-mid-infrared), ukudlulisa >90% kwi-atmospheric window band ye-3-5μm (emva kokugquma).
Ngenxa ye-refractive index ephezulu (n≈ 3.4@4μm), ifilimu echasene nokukhanya (efana ne-MgF₂/Y₂O₃) kufuneka ifakwe ipleyiti ukuze kuncitshiswe ukulahleka kokukhanya komphezulu.

2. Uzinzo lobushushu:
I-coefficient yokwandisa ubushushu ephantsi (2.6×10⁻⁶/K), ukumelana nobushushu obuphezulu (ubushushu bokusebenza ukuya kuthi ga kwi-500℃), ifanelekile kwizicelo ze-laser ezinamandla aphezulu.

3. Iimpawu zoomatshini:
Ubunzima beMohs 7, ukumelana nokukrwela, kodwa ukuba buthathaka okuphezulu, kufuna ukhuseleko lokuchamfelwa ngumphetho.

4. Iimpawu zokwaleka:
Customized anti-reflection film (AR@3-5μm), high reflection film (HR@10.6μm for CO₂ laser), bandpass filter film, etc.

Izicelo zelensi yesilicon egqunywe nge-coated:

(1) Inkqubo yomfanekiso wobushushu be-infrared
Njengenxalenye ephambili yeelensi ze-infrared (3-5μm okanye 8-12μm band) zokubeka esweni ukhuseleko, ukuhlolwa kwemizi-mveliso kunye nezixhobo zomkhosi zokubona ebusuku.

(2) Inkqubo ye-laser optical
I-CO₂ Laser (10.6μm): Ilensi ebonakalisa ukukhanya okuphezulu kwiiresonators zelaser okanye i-beam steering.

I-laser yefayibha (1.5-2μm): Ilensi yefilimu echasene nokukhanya iphucula ukusebenza kakuhle kokudibanisa.

(3) Izixhobo zovavanyo lwe-semiconductor
Injongo ye-infrared microscopic yokufumanisa iziphene ze-wafer, ukumelana nokugqwala kwe-plasma (kufuneka ukhuseleko olukhethekileyo lokugquma).

(4) izixhobo zohlalutyo lwe-spectral
Njengenxalenye ye-spectral ye-Fourier infrared spectrometer (FTIR), kufuneka ukuhanjiswa okuphezulu kunye nokuphazamiseka kwamaza asezantsi.

Iiparameter zobugcisa:

Ilensi yesilicon enombala ocwebezelayo ibe yinxalenye ebalulekileyo engenakutshintshwa kwinkqubo ye-infrared optical ngenxa yokudluliselwa kwayo kokukhanya okugqwesileyo kwe-infrared, uzinzo oluphezulu lobushushu kunye neempawu zokugquma ezinokwenziwa ngokwezifiso. Iinkonzo zethu ezizodwa zenzelwe wena ziqinisekisa ukusebenza kakuhle kweelensi kwizicelo ze-laser, zokuhlola kunye nezokufota.

Umgangatho	Ixabiso Eliphezulu
Izinto eziphathekayo	I-silicon
Ubungakanani	5mm-300mm	5mm-300mm
Ukunyamezela Ubungakanani	± 0.1mm	± 0.02mm
Imbobo ecacileyo	≥90%	95%
Umgangatho womphezulu	60/40	20/10
Iziko eliphakathi	3'	1'
Ukunyamezela Ubude beFocal	±2%	± 0.5%
Ukwaleka	Ayigqunywanga, i-AR, i-BBAR, ibonakalisa

Inkonzo yesiko ye-XKH

I-XKH inikezela ngokwenziwa ngokwezifiso ngokupheleleyo kwenkqubo yeelensi ze-silicon ezine-coated monocrystalline: Ukususela ekukhetheni i-substrate ye-silicon ene-monocrystalline (ukuxhathisa >1000Ω·cm), ukucutshungulwa kwe-optical ngokuchanekileyo (i-spherical/aspherical, ukuchaneka komphezulu λ/4@633nm), ukugquma okwenziwe ngokwezifiso (i-anti-reflection/high reflection/filter film, inkxaso yoyilo lwe-multi-band), ukuya kuvavanyo olungqongqo (isantya sokudluliselwa, umda womonakalo we-laser, uvavanyo lokuthembeka kokusingqongileyo), inkxaso yebhetshi encinci (iziqwenga ezili-10) ukuya kwimveliso enkulu. Ikwabonelela ngamaxwebhu obuchwephesha (ii-coating curves, ii-optical parameters) kunye nenkxaso emva kokuthengisa ukuhlangabezana neemfuno ezifunekayo zeenkqubo ze-infrared optical.