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Indlela ye-sapphire boule ingot crystal ky ekhulileyo

Indlela ye-sapphire boule ingot crystal ky ekhulileyo Umfanekiso obonisiweyo
  • Indlela ye-sapphire boule ingot crystal ky ekhulileyo
  • Indlela ye-sapphire boule ingot crystal ky ekhulileyo
  • Indlela ye-sapphire boule ingot crystal ky ekhulileyo
  • Indlela ye-sapphire boule ingot crystal ky ekhulileyo

Inkcazo emfutshane:

An i-sapphire boule ekhulileyoyi-single-crystal sapphire ingot eveliswa ngqo kwi-growth furnace kwaye inikezelwa ngaphambi kokuba kusetyenzwe okwesibini okufana nokujongwa, ukunqunyulwa, okanye ukupolisha. Inika ubunzima obungaqhelekanga, ukungangeni kweekhemikhali, uzinzo oluphezulu lobushushu, kunye nokucaca okubanzi kwe-optical ukusuka kwi-UV ukuya kwi-IR. Ezi mpawu zenza ukuba ibe yinto efanelekileyo yokuqala yokwenza izinto ezisezantsi kwiifestile, ii-wafers/substrates, iilensi, kunye nezigqubuthelo zokukhusela. Ukusetyenziswa okuqhelekileyo kubandakanya ii-LED kunye ne-laser components, iifestile ze-infrared/ezibonakalayo, iiwotshi kunye nobuso bezixhobo ezinganyangekiyo, kunye ne-substrates ze-RF, i-sensor, kunye nezinye izixhobo ze-elektroniki. Ii-Boules zihlala zihlelwa ngokwe-crystal orientation, ububanzi/ubude, ukusasazeka okanye uxinano lwe-defect, ukufana kombala, kunye nokufakwa, kunye neenkonzo ezikhethiweyo ezikhoyo zokujongwa kunye nokusika ngokweemfuno zabathengi.


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    • Iimbonakalo

    Umgangatho we-Ingot

    ubungakanani be-ingot

    Ifoto ye-Ingot

    Umzobo oneenkcukacha

    isafire ingot11
    isafire ingot08
    njengoko ikhule isafire ingot01

    Isishwankathelo

    A ibhowule yesafireyikristale enkulu, ekhuliswe njenge-aluminium oxide (Al₂O₃) esebenza njenge-feedstock ephezulu yee-wafers ze-sapphire, iifestile ze-optical, iindawo ezinganyangekiyo, kunye nokusika amatye anqabileyo.Ubunzima beMohs 9, uzinzo oluhle kakhulu lobushushu(iqondo lokunyibilika ~2050 °C), kunyeukucaca kwe-broadbandukusuka kwi-UV ukuya kwi-mid-IR, i-sapphire yeyona nto ibalulekileyo apho ukuqina, ukucoceka, kunye nomgangatho wokukhanya kufuneka kuhlale kunye.

    Sinikezela ngeebhowule zesafire ezingenambala nezinodongwe eziveliswe ziindlela zokukhula eziqinisekisiweyo kushishino, ezilungiselelweI-GaN/AlGaN epitaxy, i-optics echanekileyokunyeizixhobo zoshishino ezithembeke kakhulu.

    Kutheni iSapphire Boule isuka kuthi

    • Umgangatho wekristale kuqala:uxinzelelo oluphantsi lwangaphakathi, umxholo ophantsi webhamuza/i-striae, ulawulo oluqinileyo lokujolisa ukusika ngezantsi kunye ne-epitaxy.

    • Ukuguquguquka kwenkqubo:Iindlela zokukhula ze-KY/HEM/CZ/Verneuil zokulinganisela ubungakanani, uxinzelelo, kunye neendleko zesicelo sakho.

    • Ijometri enokukhuliswa:Iibhola ezisilinda, ezimile okwekherothi, okanye ezibloko ezineeflethi ezenziwe ngokwezifiso, unyango lwembewu/isiphelo, kunye neendlela zereferensi.

    • Inokulandeleka kwaye iyaphinda-phinda:iirekhodi zebhetshi, iingxelo zemetrology, kunye neendlela zokwamkelwa ezihambelana neenkcukacha zakho.

    Ubuchwepheshe bokuKhula

    • I-KY (iKyropoulos):Iibhola ezinkulu, ezinobukhulu obuphantsi, zithandwa kakhulu kwii-wafers ze-epi-grade kunye ne-optics apho ukufana kwe-birefringence kubalulekile.

    • I-HEM (Indlela yokuTshintshiselana nobushushu):Iigradients ezishushu ezigqwesileyo kunye nolawulo loxinzelelo; zinomtsalane kwi-thick optics kunye ne-premium epi feedstock.

    • CZ (Czochralski):Ulawulo oluqinileyo lokujolisa kunye nokuzala kwakhona; ukhetho olufanelekileyo lokusika rhoqo, okuvelisa isivuno esiphezulu.

    • IVerneuil (iFlame-Fusion):Ixabiso layo liphantsi, inamandla aphezulu; ifanelekile kwi-optics jikelele, kwiindawo zoomatshini, kunye nee-gem preforms.

    Ubuchule bekristale, ijiyometri kunye nobungakanani

    • Iindlela eziqhelekileyo zokufundisa: i-c-plane (0001), inqwelo-moya (11-20), i-r-plane (1-102), i-m-plane (10-10)iindiza ezenziwe ngokwezifiso ziyafumaneka.

    • Ukuchaneka kokuqondisa:≤ ±0.1° nguLaue/XRD (iqina ngakumbi xa iceliwe).

    • Iimilo:Iibhola ezisilinda okanye eziluhlobo lwekherothi, iibhloko zesikwere/unxande, kunye neentonga.

    • Imvulophu yobukhulu obuqhelekileyo: Ø30–220 mm, ubude 50–400 mm(enkulu/encinci yenziwe ngokwe-odolo).

    • Iimpawu zokuphela/zesalathiso:ukucutshungulwa kobuso bembewu/isiphelo, iiflethi/iindawo zokubeka ireferensi, kunye neefiducials zokulungelelanisa umlambo osezantsi.

    Izinto kunye neempawu zokukhanya

    • Ulwakhiwo:I-Al₂O₃ yekristale enye, ubumsulwa bezinto ezikrwada ≥ 99.99%.

    • Uxinano:~3.98 g/cm³

    • Ubunzima:IiMohs 9

    • Isalathisi sokuhombisa (589 nm): nₒ≈ 1.768,nₑ≈ 1.760 (i-uniaxial engalunganga; Δn ≈ 0.008)

    • Ifestile yokudlulisa: I-UV ukuya kwi ~5 µm(kuxhomekeke kubukhulu kunye nokungcola)

    • Ukuqhuba kobushushu (300 K):~25 W·m⁻¹·K⁻¹

    • I-CTE (20–300 °C):~5–8 × 10⁻⁶ /K (kuxhomekeke kwindlela ojolisa ngayo)

    • Imodyuli kaYoung:~345 GPa

    • Umbane:Ikhusela kakhulu (ukumelana nomthamo ngokuqhelekileyo ≥ 10¹⁴ Ω·cm)

    Amabanga kunye neenketho

    • Ibanga le-Epitaxy:Amaqamza/i-striae esezantsi kakhulu kunye ne-birefringence yoxinzelelo oluncitshisiweyo kwii-wafers ze-GaN/AlGaN MOCVD ezinemveliso ephezulu (ii-intshi ezi-2–8 nangaphezulu ngezantsi).

    • Ibanga lokubona:Uthumelo lwangaphakathi oluphezulu kunye nokuhambelana okuphezulu kweefestile, iilensi, kunye neendawo zokujonga ze-IR.

    • Ibanga Jikelele/loMatshini:I-feedstock ehlala ixesha elide, ephucukileyo nexabiso liphezulu yeekristale zewotshi, amaqhosha, iindawo ezigugileyo, kunye neendawo zokugcina.

    • Ukuxuba/Umbala:

      • Akukho mbala(esemgangathweni)
        Cr:Al₂O₃(irubhi),Ti:Al₂O₃(Ti:safire) iipreforms
        Ezinye iikhromophore (Fe/Ti) xa ziceliwe

    Izicelo

    I-Semiconductor: Ii-substrates ze-GaN LEDs, ii-micro-LEDs, ii-HEMTs zamandla, izixhobo ze-RF (i-feedstock ye-sapphire wafer).

    I-Optics kunye ne-Photonics: Iifestile ezinobushushu obuphezulu/uxinzelelo, ii-viewports ze-IR, iifestile ze-laser cavity, izigqubuthelo ze-detector.

    Izinto ezisetyenziswa ngabathengi nezinxitywayo: Iikristale zewotshi, izigqubuthelo zelensi zekhamera, izigqubuthelo zenzwa yeminwe, iindawo zangaphandle zeprimiyamu.

    Imizi-mveliso kunye neenqwelo-moya: Ii-nozzles, izihlalo zeevalvu, iiringi zokutywina, iifestile zokukhusela, kunye neendawo zokujonga.

    Ukukhula kweLaser/Crystal: IiTi:saphire kunye neeruby hosts ezivela kwiiboules ezinxityisiweyo.

    Idatha ejongwayo (Eqhelekileyo, njengereferensi)

    Ipharamitha Ixabiso (Eliqhelekileyo)
    Ukwakhiwa I-Al₂O₃ enekristale enye (≥ ubunyulu obuyi-99.99%)
    Ukuqhelaniswa c / a / r / m (ngokwezifiso xa uceliwe)
    Isalathisi @ 589 nm nₒ≈ 1.768,nₑ≈ 1.760
    Uluhlu loThumelo ~0.2–5 µm (ixhomekeke kubukhulu)
    Ukuqhuba kweThermal ~25 W·m⁻¹·K⁻¹ (300 K)
    I-CTE (20–300 °C) ~5–8 × 10⁻⁶/K
    IModulus kaYoung ~345 GPa
    Uxinano ~3.98 g/cm³
    Ukuqina IiMohs 9
    Zombane Ukuthintela; ukumelana nomthamo ≥ 10¹⁴ Ω·cm

     

    Inkqubo yokwenziwa kweWafer yeSapphire

    1. Ukukhula kwekristale
      I-alumina ecocekileyo kakhulu (Al₂O₃) iyanyibilika ize ikhule ibe yi-ingot enye yekristale yesafire kusetyenziswa i-IKyropoulos (KY) or ICzochralski (CZ)indlela.

    2. Ukucubungula i-Ingot
      I-ingot yenziwe ngomatshini ukuze ibe nomfanekiso oqhelekileyo — ukucheba, ukubumba ububanzi, kunye nokucubungula ubuso obuphelayo.

    3. Ukusika
      I-sapphire ingot isikwa ibe zii-wafers ezibhityileyo kusetyenziswaisarha yentambo yedayimani.

    4. Ukuleqa okumacala mabini
      Amacala omabini e-wafer ajikeleziswa ukuze kususwe amabala esarha kwaye kufunyanwe ubukhulu obufanayo.

    5. Ukuqokelela
      Iiwafers zinyangwa ngobushushu ukuzekhupha uxinzelelo lwangaphakathikunye nokuphucula umgangatho wekristale kunye nokucaca.

    6. Ukusila Umphetho
      Imiphetho ye-wafer iyajikwa ukuze kuthintelwe ukuqhekeka nokuqhekeka ngexesha lokucubungula okuqhubekayo.

    7. Ukufakelwa
      Iiwafers zifakelwa kwiinqwelo okanye kwiindawo zokuphatha ukuze zipolishwe kwaye zihlolwe ngokuchanekileyo.

    8. I-DMP (Ukupholisha oomatshini okumacala mabini)
      Imiphezulu ye-wafer ipholishwa ngoomatshini ukuphucula ukuguda komphezulu.

    9. I-CMP (Ukupholisha oomatshini beKhemikhali)
      Inyathelo elicolekileyo lokupholisha elidibanisa izenzo zeekhemikhali nezoomatshini ukwenzaumphezulu ofana nesipili.

    10. Uhlolo olubonakalayo
      Abaqhubi okanye iinkqubo ezizenzekelayo zijonga iziphene ezibonakalayo kumphezulu.

    11. Uhlolo lweFlatness
      Ukufana kobukhulu kunye nobukhulu kulinganiswa ukuqinisekisa ukuchaneka kobukhulu.

    12. Ukucoca i-RCA
      Ukucoca okuqhelekileyo ngamakhemikhali kususa izinto ezingcolisayo zendalo, zesinyithi, kunye neenxalenye ezithile.

    13. Ukucoca iiScrubber
      Ukukrwela ngoomatshini kususa amasuntswana aseleyo angabonakaliyo.

    14. Ukuhlolwa Okugqibeleleyo Kweziphene Zomphezulu
      Ukuhlolwa kwamehlo okwenziwa ngokuzenzekelayo kufumanisa iziphene ezincinci ezifana nemikrwelo, imingxunya, okanye ungcoliseko.

     

    1. Ukukhula kwekristale
      I-alumina ecocekileyo kakhulu (Al₂O₃) iyanyibilika ize ikhule ibe yi-ingot enye yekristale yesafire kusetyenziswa i-IKyropoulos (KY) or ICzochralski (CZ)indlela.

    2. Ukucubungula i-Ingot
      I-ingot yenziwe ngomatshini ukuze ibe nomfanekiso oqhelekileyo — ukucheba, ukubumba ububanzi, kunye nokucubungula ubuso obuphelayo.

    3. Ukusika
      I-sapphire ingot isikwa ibe zii-wafers ezibhityileyo kusetyenziswaisarha yentambo yedayimani.

    4. Ukuleqa okumacala mabini
      Amacala omabini e-wafer ajikeleziswa ukuze kususwe amabala esarha kwaye kufunyanwe ubukhulu obufanayo.

    5. Ukuqokelela
      Iiwafers zinyangwa ngobushushu ukuzekhupha uxinzelelo lwangaphakathikunye nokuphucula umgangatho wekristale kunye nokucaca.

    6. Ukusila Umphetho
      Imiphetho ye-wafer iyajikwa ukuze kuthintelwe ukuqhekeka nokuqhekeka ngexesha lokucubungula okuqhubekayo.

    7. Ukufakelwa
      Iiwafers zifakelwa kwiinqwelo okanye kwiindawo zokuphatha ukuze zipolishwe kwaye zihlolwe ngokuchanekileyo.

    8. I-DMP (Ukupholisha oomatshini okumacala mabini)
      Imiphezulu ye-wafer ipholishwa ngoomatshini ukuphucula ukuguda komphezulu.

    9. I-CMP (Ukupholisha oomatshini beKhemikhali)
      Inyathelo elicolekileyo lokupholisha elidibanisa izenzo zeekhemikhali nezoomatshini ukwenzaumphezulu ofana nesipili.

    10. Uhlolo olubonakalayo
      Abaqhubi okanye iinkqubo ezizenzekelayo zijonga iziphene ezibonakalayo kumphezulu.

    11. Uhlolo lweFlatness
      Ukufana kobukhulu kunye nobukhulu kulinganiswa ukuqinisekisa ukuchaneka kobukhulu.

    12. Ukucoca i-RCA
      Ukucoca okuqhelekileyo ngamakhemikhali kususa izinto ezingcolisayo zendalo, zesinyithi, kunye neenxalenye ezithile.

    13. Ukucoca iiScrubber
      Ukukrwela ngoomatshini kususa amasuntswana aseleyo angabonakaliyo.

    14. Ukuhlolwa Okugqibeleleyo Kweziphene Zomphezulu
      Ukuhlolwa kwamehlo okwenziwa ngokuzenzekelayo kufumanisa iziphene ezincinci ezifana nemikrwelo, imingxunya, okanye ungcoliseko.

    I-Sapphire Boule (i-Single-Crystal Al₂O₃) — Imibuzo Ebuzwa Rhoqo

    Q1: Yintoni i-sapphire boule?
    A: Ikristale enye ye-aluminium oxide (Al₂O₃) esele ikhulile. Yi "ingot" ephezulu esetyenziselwa ukwenza ii-wafers ze-sapphire, iifestile ze-optical, kunye nezinto ezigugileyo.

    Umbuzo 2: Ibhola inxulumene njani nee-wafers okanye iifestile?
    A: Ibhola ijongiswe → inqunqiwe → ilaphulwe → ipolishiwe ukuvelisa ii-wafers ze-epi-grade okanye iindawo ze-optical/mechanical. Ukufana kwebhola ephumayo kuchaphazela kakhulu isivuno esisezantsi.

    UMBUZO 3: Zeziphi iindlela zokukhulisa ezikhoyo kwaye zahluke njani?
    A: I-KY (iKyropoulos)kwayeI-HEMisivuno esikhulu,uxinzelelo oluphantsiiibhola—ezikhethwayo kwi-epitaxy nakwi-optics ephezulu.CZ (Czochralski)inikezela ngokugqwesileyoulawulo lokuqondisakunye nokuhambelana kwento nganye.I-Verneuil (i-flame-fusion) is engabizi kakhulukwi-optics jikelele kunye nee-gem preforms.

    Umbuzo 4: Zeziphi iindlela ozinikayo? Kukuphi ukuchaneka okuqhelekileyo?
    A: i-c-plane (0001), i-a-plane (11-20), i-r-plane (1-102), i-m-plane (10-10), kunye namasiko. Ukuchaneka kolwazi ngokwesiqhelo≤ ±0.1°iqinisekiswe yiLaue/XRD (iqiniswe ngakumbi xa iceliwe).

  • Ngaphambili:
  • Okulandelayo:

    • Iikristale ze-Optical-Grade ezine-Responsible In-House Scrap Management

    Zonke iibhola zethu zesafire zenziwe ukuzeibakala le-optical, ukuqinisekisa ukuhanjiswa okuphezulu, ukuhambelana okuqinileyo, kunye noxinano oluphantsi lokubandakanywa/amaqamza kunye nokusasazeka kwezixhobo zokukhanya ezifuna amandla kunye ne-elektroniki. Silawula ukujongwa kwekristale kunye nokuqhekeka kwebhola ukusuka kwimbewu ukuya kwibhola, ngokulandelela okupheleleyo kunye nokuhambelana phakathi kokugijima. Ubukhulu, ukujongwa (c-, a-, r-plane), kunye nokunyamezelana kunokwenziwa ngokwezifiso ngokweemfuno zakho zokusika/ukupolisha ezisezantsi.
    Okubalulekileyo kukuba, nayiphi na into engahambelaniyo neenkcukachaicutshungulwe ngokupheleleyo ngaphakathingokusebenzisa indlela yokusebenza evaliweyo—ehleliwe, ephinda isetyenziswe, kwaye ilahlwe ngendlela efanelekileyo—ukuze ufumane umgangatho othembekileyo ngaphandle kokuphatha okanye ukuthobela imiqathango. Le ndlela inciphisa umngcipheko, inciphisa amaxesha okukhokela, kwaye ixhasa iinjongo zakho zokuzinza.

    Ibhendi yoBunzima be-Ingot (kg) 2″ 4″ 6″ 8″ 12″ Amanqaku
    10–30 Ifanelekile Ifanelekile Kunqongophele/kunokwenzeka Ayiqhelekanga Ayisetyenziswanga Ukusikwa okuncinci; 6″ kuxhomekeke kububanzi/ubude obusebenzisekayo.
    30–80 Ifanelekile Ifanelekile Ifanelekile Kunqongophele/kunokwenzeka Ayiqhelekanga Usetyenziso olubanzi; iindawo zokuhlola ezingama-8″ ngamanye amaxesha.
    80–150 Ifanelekile Ifanelekile Ifanelekile Ifanelekile Ayiqhelekanga Ibhalansi elungileyo yemveliso ye-6–8″.
    150–250 Ifanelekile Ifanelekile Ifanelekile Ifanelekile I-Limited/R&D Ixhasa uvavanyo lokuqala lwe-12″ kunye neenkcukacha eziqinileyo.
    250–300 Ifanelekile Ifanelekile Ifanelekile Ifanelekile Ilinganiselwe/ichazwe ngokucacileyo I-8″ ephezulu; ii-12″ ezikhethiweyo zibaleka.
    >300 Ifanelekile Ifanelekile Ifanelekile Ifanelekile Ifanelekile Isikali seFrontier; 12″ inokwenzeka ngokulingana okungqongqo/ulawulo lokukhupha.

     

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