4inch 6inch Lithium niobate enye crystal film LNOI wafer

Inkcazelo emfutshane:

I-Lithium niobate ineepropati ezintle kakhulu ze-electro-optical, nonlinear kunye ne-piezoelectric. Ngoncedo lweteknoloji ye-micro kunye ne-nano processing technology, izixhobo ezidibeneyo ze-photonics ezisekelwe kwiifilimu ze-lithium niobate ezincinci (LNOI) kwii-insulators ziye zaphuhliswa ngokubanzi. Kwixesha elizayo, izinto eziphezulu zokusebenza ze-LNOI ziya kuxhasa uphuhliso olongezelelweyo lwe-LNOI-based micro-nano optics, i-photonics edibeneyo, kunye ne-microwave photonics. Ukuveliswa kwezinto eziphezulu ze-LNOI kuya kuba yinyathelo elibalulekileyo kwi-industrial application ye-lithium niobate optoelectronics devices.

Thumela i-imeyile kuthi

Iinkcukacha zeMveliso

Iithegi zeMveliso

Inkqubo yokulungiselela izinto ze-LNOI yahlulwe ikakhulu kula manyathelo mane alandelayo

(1) Ii-ion zafakwa kwi-X-cut lithium niobate material kumandla athile, kwaye yangeniswa kuluhlu lwesiphene kubunzulu obuthile ngaphantsi komgangatho we-lithium niobate;

(2) I-ion ehlonyelwe izinto ze-lithium niobate ziboshwe kwi-silicon substrate kunye ne-oxide layer ukuze yenze isakhiwo sokubambisana;

(3) Ulwakhiwo oludityanisiweyo lwaxhuzulwa ukwenza iziphene eziveliswe yi-He ion implantation ziguquke kwaye zidibanise ukwenza iintanda. Ekugqibeleni, i-lithium niobate yahlulwa ecaleni komgangatho wesiphene ukwenza izilayi ze-lithium niobate ezishiyekileyo kunye nee-wafers ze-LNOI.

Usetyenziso kunye noncedo lwe-LNOI wafer

I-1--I-Lithium niobate piezoelectric films (LNOI) ine-coefficient ephezulu ye-piezoelectric kunye ne-dielectric constant, enokuguqula amandla omatshini kumandla ombane okanye amandla ombane kumandla omatshini. Ngoko ke, isetyenziswa ngokubanzi kwintsimi yeenzwa, ezifana nezinzwa zoxinzelelo, i-acceleration sensors, i-sensor sensors kunye nokunye. Ukongeza, ifilimu ye-lithium niobate piezoelectric ingasetyenziselwa izixhobo ze-acoustic kunye nezixhobo zokungcangcazela, ezifana ne-piezoelectric ceramic transducer complex piezoelectric ceramic filter.

I-2-Ukuzinza kwefilimu ye-lithium niobate piezoelectric nayo enye yeenzuzo zayo. Ngenxa yokuzinza kwe-crystal structure kunye ne-inertness ye-chemical inertness, ifilimu ye-lithium niobate piezoelectric inokusebenza kwiqondo lokushisa eliphezulu, umswakama ophezulu, i-asidi eqinile, i-alkali eyomeleleyo kunye nezinye izinto ezisingqongileyo ezinobunzima, ezinokumelana nokugqwala okulungileyo kunye nokuqina.

Ifilimu ye-3-Lithium niobate piezoelectric yinto entsha ye-piezoelectric kunye nokusebenza okugqwesileyo kunye nokuzinza, kwaye inethemba elibanzi lokusebenzisa. Ngophuhliso oluqhubekayo lwesayensi kunye netekhnoloji, ifilimu ye-lithium niobate piezoelectric iya kusetyenziswa kwizixeko ezininzi, izisa ukulungelelaniswa kunye nokutsha kubomi babantu.