2 intshi 4 intshi 6 intshi enePattered Sapphire Substrate (PSS) ekukhuliswe kuyo imathiriyeli yeGaN enokusetyenziswa kwizibane zeLED

I-intshi ezi-2 ii-intshi ezi-4 ii-intshi ezi-6 ii-intshi ezinePateni yeSapphire Substrate (PSS) ekukhuliswe kuyo imathiriyeli ye-GaN enokusetyenziselwa izibane ze-LED Umfanekiso ofakiweyo.

Inkcazelo emfutshane:

I-Pattered sapphire substrate (PSS) yimaski ye-etching eyomileyo kwi-substrate yesafire, imaski ikrolwe ngepatheni ngenkqubo ye-lithography esemgangathweni, kwaye emva koko isafire ifakwe nge-ICP etching technology, kwaye imaski iyasuswa, kwaye ekugqibeleni i-GaN ikhuliswe kuyo, ukuze i-epitaxy longitudinal ye-epitaxy ye-GaN ibe yi-horizori. Le nkqubo ibandakanya amanyathelo amaninzi anje nge-photoresist coating, i-step exposure, ukuphuhlisa ipateni yokuvezwa, i-ICP etching etching kunye nokucoca.

Thumela i-imeyile kuthi

Iinkcukacha zeMveliso

Iithegi zeMveliso

Iimpawu eziphambili

1. Iimpawu zesakhiwo:
Umphezulu we-PSS une-cone enocwangco okanye ipateni ye-conical engunxantathu omilo, ubungakanani kunye nokusabalalisa kunokulawulwa ngokulungelelanisa iiparameters zenkqubo ye-etching.
Ezi zakhiwo zegraphic zinceda ukutshintsha indlela yokusasaza ukukhanya kunye nokunciphisa ukubonakaliswa okupheleleyo kokukhanya, ngaloo ndlela kuphuculwe ukusebenza kakuhle kokutsalwa kokukhanya.

2. Iimpawu zezinto eziphathekayo:
I-PSS isebenzisa umgangatho ophezulu wesafire njenge-substrate material, eneempawu zobunzima obuphezulu, i-conductivity ephezulu ye-thermal, ukuzinza kakuhle kweekhemikhali kunye nokubonakala kwe-optical transparency.
Ezi mpawu zenza ukuba i-PSS ikwazi ukumelana neemeko ezinzima ezifana namaqondo obushushu aphezulu kunye noxinzelelo ngelixa igcina ukusebenza kakuhle kwe-optical.

3. Ukusebenza kwamehlo:
Ngokutshintsha ukusasazeka okuphindaphindiweyo kwi-interface phakathi kwe-GaN kunye ne-sapphire substrate, i-PSS yenza iifotoni ezibonakaliswe ngokupheleleyo ngaphakathi kwe-GaN layer zibe nethuba lokubalekela kwi-substrate yesafire.
Eli nqaku liphucula kakhulu ukusebenza kakuhle kokutsalwa kokukhanya kwe-LED kwaye liphucula ubunzulu obukhanyayo be-LED.

4. Iimpawu zenkqubo:
Inkqubo yokuvelisa i-PSS inzima kakhulu, ibandakanya amanyathelo amaninzi afana ne-lithography kunye ne-etching, kwaye ifuna izixhobo ezichanekileyo eziphezulu kunye nolawulo lwenkqubo.
Nangona kunjalo, ngenkqubela phambili eqhubekayo yetekhnoloji kunye nokuncitshiswa kweendleko, inkqubo yokwenziwa kwePSS ngokuthe ngcembe iphuculwa kwaye iphuculwe.

Inzuzo engundoqo

I-1.Ukuphucula ukusebenza kokukhanya kokukhanya: I-PSS iphucula kakhulu ukukhanya kokukhanya kwe-LED ngokuguqula indlela yokusabalalisa ukukhanya kunye nokunciphisa ukubonakaliswa okupheleleyo.

I-2.Ukwandisa ubomi be-LED: I-PSS inokunciphisa ukuxinana kwe-dislocation ye-GaN epitaxial materials, ngaloo ndlela inciphisa ukuphindaphinda okungenayo i-radiative kunye nokubuyisela ukuvuza kwangoku kwingingqi esebenzayo, ukwandisa ubomi be-LED.

3.Ukuphucula ukukhanya kwe-LED: Ngenxa yokuphuculwa kokusebenza kokukhanya kokukhanya kunye nokwandiswa kobomi be-LED, ukukhanya kwe-LED okukhanyayo kwi-PSS kuphuculwe kakhulu.

4.Ukunciphisa iindleko zokuvelisa: Nangona inkqubo yokuvelisa i-PSS inzima kakhulu, inokuphucula kakhulu ukusebenza okukhanyayo kunye nobomi be-LED, ngaloo ndlela inciphisa iindleko zokuvelisa ukuya kwinqanaba elithile kunye nokuphucula ukukhuphisana kwemveliso.

Iindawo zesicelo eziphambili

1. Ukukhanyisa kwe-LED: I-PSS njenge-substrate ye-chips ye-LED, inokuphucula kakhulu ukusebenza okukhanyayo kunye nobomi be-LED.
Kwintsimi yokukhanyisa kwe-LED, i-PSS isetyenziswa ngokubanzi kwiimveliso ezahlukeneyo zokukhanyisa, njengezibane zesitrato, izibane zetafile, izibane zemoto kunye nokunye.

Izixhobo ze-2.Semiconductor: Ngaphandle kokukhanyisa kwe-LED, i-PSS ingasetyenziselwa ukuvelisa ezinye izixhobo ze-semiconductor, ezifana nezixhobo zokukhanya, i-laser, njl. Ezi zixhobo zinezicelo ezininzi zonxibelelwano, unyango, umkhosi kunye nezinye iinkalo.

I-3.Ukuhlanganiswa kwe-Optoelectronic: Iimpawu ze-optical kunye nokuzinza kwe-PSS zenza enye yezinto ezifanelekileyo kwintsimi ye-optoelectronic integration.In optoelectronic integration, i-PSS ingasetyenziselwa ukwenza i-waveguides optical waveguides, i-optical switches kunye nezinye izinto zokuqonda ukuhanjiswa kunye nokulungiswa kwezibonakaliso ze-optical.

Iiparamitha zobugcisa

Into	ISapphire Substrate enePatheni (2~6inch)
Ububanzi	50.8 ± 0.1 mm	100.0 ± 0.2 mm	150.0 ± 0.3 mm
Ukutyeba	430 ± 25μm	650 ± 25μm	1000 ± 25μm
Ukuqhelaniswa nomphezulu	I-C-plane (0001) i-off-angle ukuya ku-M-axis (10-10) 0.2 ± 0.1°
	I-C-plane (0001) i-off-angle ukuya kwi-Axis (11-20) 0 ± 0.1°
Ukuqhelaniswa neFlethi okuPhambili	I-A-Plane (11-20) ± 1.0 °
Ubude beFlethi obuPhambili	16.0 ± 1.0 mm	30.0 ± 1.0 mm	47.5 ± 2.0 mm
R-Inqwelomoya	9-o'clock
Umphezulu ongaphambili Gqiba	Yenza ipateni
Ngasemva Surface Gqiba	SSP:Umhlaba ocolekileyo,Ra=0.8-1.2um; I-DSP: I-Epi-ipolishwe, iRa<0.3nm
Laser uphawu	Icala elingasemva
TTV	≤8μm	≤10μm	≤20μm
THOBEKA	≤10μm	≤15μm	≤25μm
WARP	≤12μm	≤20μm	≤30μm
Ukungabandakanywa kuMda	≤2 mm
Inkcazo yePatheni	Ulwakhiwo lweMilo	Idome, iCone, iPiramidi
	Umzekelo Ubude	1.6~1.8μm
	Ipatheni Ububanzi	2.75 ~ 2.85μm
	Isithuba sepateni	0.1~0.3μm

I-XKH igxile ekuphuhliseni, ekuveliseni nasekuthengiseni i-pattered sapphire substrate (PSS), kwaye izimisele ukubonelela ngekhwalithi ephezulu, iimveliso zePSS eziphezulu kubathengi emhlabeni jikelele. I-XKH inobuchwepheshe obuphambili bokuvelisa kunye neqela lobuchwephesha lobuchwephesha, elinokwenza iimveliso ze-PSS ngokwezifiso ezahlukeneyo kunye nezakhiwo zeepateni ezahlukeneyo ngokweemfuno zabathengi. Ngelo xesha, i-XKH iqwalasela umgangatho wemveliso kunye nomgangatho wenkonzo, kwaye izimisele ukubonelela abathengi ngenkxaso epheleleyo yobugcisa kunye nezisombululo. Kwintsimi ye-PSS, i-XKH iqokelele amava atyebileyo kunye neenzuzo, kwaye ijonge phambili ekusebenzisaneni kunye namaqabane ehlabathi ukukhuthaza ngokubambisana ukuphuhliswa kokukhanya kwe-LED, izixhobo ze-semiconductor kunye namanye amashishini.