I-2 intshi 4 intshi 6 intshi I-Patterned Sapphire Substrate (PSS) apho kukhuliswa khona izinto zeGaN ezinokusetyenziswa ekukhanyiseni i-LED

I-intshi ezi-2, i-intshi ezi-4, i-intshi ezi-6, i-Patterned Sapphire Substrate (PSS) apho kukhuliswa khona izinto zeGaN, ezinokusetyenziswa ekukhanyiseni i-LED Umfanekiso oPhambili

Inkcazo emfutshane:

I-substrate yesafire enepatheni (PSS) yimaski yokukrola okomileyo kwi-substrate yesafire, imaski ikrolwa ngepateni ngokwenkqubo ye-lithography eqhelekileyo, ize emva koko i-safire ikrolwe ngetekhnoloji yokukrola ye-ICP, ize isuswe imaski, kwaye ekugqibeleni izinto zeGaN zikhuliswe kuyo, ukuze i-epitaxy ende yezinto zeGaN ibe yi-epitaxy ethe tye. Le nkqubo ibandakanya amanyathelo aliqela afana nokugquma nge-photoresist, ukukrola ngenyathelo, ukuphuhlisa ipateni yokukrola, ukukrola okomileyo kwe-ICP kunye nokucoca.

Thumela i-imeyile kuthi

Iimbonakalo

Iimpawu eziphambili

1. Iimpawu zesakhiwo:
Umphezulu wePSS unekhowuni ehlelekileyo okanye ipatheni yekhowuni engunxantathu apho imilo, ubungakanani kunye nokusasazwa kunokulawulwa ngokulungelelanisa iiparamitha zenkqubo yokukrola.
Ezi zakhiwo zemizobo zinceda ekutshintsheni indlela yokusasazwa kokukhanya kwaye zinciphise ukubonakaliswa kokukhanya okupheleleyo, ngaloo ndlela ziphucula ukusebenza kakuhle kokukhupha ukukhanya.

2. Iimpawu zezinto ezibonakalayo:
I-PSS isebenzisa isafire ekumgangatho ophezulu njengezinto ezisetyenziswa kwi-substrate, eneempawu zobulukhuni obuphezulu, ukuqhuba okuphezulu kobushushu, uzinzo oluhle lweekhemikhali kunye nokubonakala okubonakalayo.
Ezi mpawu zivumela i-PSS ukuba ikwazi ukumelana neendawo ezinzima ezifana namaqondo obushushu aphezulu kunye noxinzelelo ngelixa igcina ukusebenza kakuhle kokukhanya.

3. Ukusebenza kwe-Optical:
Ngokutshintsha ukusasazeka okuninzi kwindawo ephakathi kweGaN kunye nesafire substrate, iPSS yenza iiphoton ezibonakala ngokupheleleyo ngaphakathi komaleko weGaN zibe nethuba lokuphuma kwisafire substrate.
Olu phawu luphucula kakhulu ukusebenza kakuhle kokukhupha ukukhanya kwe-LED kwaye luphucula ukukhanya kwe-LED.

4. Iimpawu zenkqubo:
Inkqubo yokuvelisa i-PSS iyinkimbinkimbi, ibandakanya amanyathelo amaninzi afana ne-lithography kunye ne-etching, kwaye ifuna izixhobo ezichanekileyo kunye nolawulo lwenkqubo.
Nangona kunjalo, ngokuqhubela phambili iteknoloji kunye nokunciphisa iindleko, inkqubo yokuvelisa i-PSS iphuculwa kancinci kancinci kwaye iphuculwa.

Inzuzo engundoqo

1.Phucula ukusebenza kakuhle kokukhupha ukukhanya: I-PSS iphucula kakhulu ukusebenza kakuhle kokukhupha ukukhanya kwe-LED ngokutshintsha indlela yokusasazwa kokukhanya kunye nokunciphisa ukubonakaliswa okupheleleyo.

2.Ubomi be-LED obude: I-PSS inokunciphisa uxinano lwe-dislocation yezinto ze-epitaxial ze-GaN, ngaloo ndlela inciphise i-non-radiative recombination kunye ne-reverse leak current kwindawo esebenzayo, yandisa ubomi be-LED.

3.Phucula ukukhanya kwe-LED: Ngenxa yokuphuculwa kokusebenza kakuhle kokukhupha ukukhanya kunye nokwandiswa kobomi be-LED, ubunzulu bokukhanya kwe-LED kwi-PSS buphuculwe kakhulu.

4.Nciphisa iindleko zemveliso: Nangona inkqubo yokuvelisa yePSS inzima kakhulu, inokuphucula kakhulu ukusebenza kakuhle kokukhanya kunye nobomi be-LED, ngaloo ndlela inciphise iindleko zemveliso ukuya kwinqanaba elithile kwaye iphucule ukukhuphisana kwemveliso.

Iindawo eziphambili zesicelo

1. Ukukhanya kwe-LED: I-PSS njengesixhobo se-substrate seetships ze-LED, inokuphucula kakhulu ukusebenza kakuhle kokukhanya kunye nobomi be-LED.
Kwicandelo lokukhanyisa nge-LED, i-PSS isetyenziswa kakhulu kwiimveliso ezahlukeneyo zokukhanyisa, ezifana nezibane zesitalato, izibane zetafile, izibane zeemoto njalo njalo.

2. Izixhobo ze-semiconductor: Ukongeza kwizibane ze-LED, i-PSS ingasetyenziselwa ukuvelisa ezinye izixhobo ze-semiconductor, ezifana nezixhobo zokubona ukukhanya, ii-laser, njl. Ezi zixhobo zinoluhlu olubanzi lwezicelo kumacandelo onxibelelwano, ezonyango, ezomkhosi nakwezinye iindawo.

3. Ukuhlanganiswa kwe-Optoelectronic: Iimpawu zokukhanya kunye nozinzo lwe-PSS zenza ukuba ibe yenye yezona zinto zifanelekileyo kwicandelo lokuhlanganiswa kwe-optoelectronic. Kukuhlanganiswa kwe-optoelectronic, i-PSS ingasetyenziselwa ukwenza ii-optical waveguides, ii-optical switches kunye nezinye izinto ukuze kufezekiswe ukuhanjiswa kunye nokucutshungulwa kwemiqondiso ye-optical.

Iiparameter zobugcisa

Into	I-substrate yeSapphire enePattern (2 ~ 6inch)
Ububanzi	50.8 ± 0.1 mm	100.0 ± 0.2 mm	150.0 ± 0.3 mm
Ubukhulu	430 ± 25μm	650 ± 25μm	1000 ± 25μm
Ukujongwa komphezulu	I-C-plane (0001) i-off-engile ejonge kwi-M-axis (10-10) 0.2 ± 0.1°
	I-C-plane (0001) i-off-engile ejonge kwi-A-axis (11-20) 0 ± 0.1°
Uqhelaniso oluPhambili oluSicaba	Inqwelo-moya (11-20) ± 1.0°
Ubude obuPhambili obuSicaba	16.0 ± 1.0 mm	30.0 ± 1.0 mm	47.5 ± 2.0 mm
I-R-Plane	Intsimbi ye-9
Ukugqitywa komphezulu ongaphambili	Ipetheni
Ukugqitywa komphezulu ongasemva	I-SSP: Ecoliweyo kakuhle, iRa=0.8-1.2um; iDSP: Epi-polished, iRa<0.3nm
Uphawu lweLaser	Icala elingasemva
I-TTV	≤8μm	≤10μm	≤20μm
I-BOW	≤10μm	≤15μm	≤25μm
I-WARP	≤12μm	≤20μm	≤30μm
Ukukhutshwa komda	≤2 mm
Inkcazelo yePateni	Ulwakhiwo lweMilo	IDome, iKhowuni, iPiramidi
	Ukuphakama kwePateni	1.6~1.8μm
	Ububanzi bePateni	2.75~2.85μm
	Indawo yePateni	0.1~0.3μm

I-XKH igxile ekuphuhlisweni, ekuvelisweni nasekuthengisweni kwe-patterned sapphire substrate (PSS), kwaye izibophelele ekuboneleleni ngeemveliso zePSS ezikumgangatho ophezulu nezisebenza kakuhle kubathengi kwihlabathi liphela. I-XKH inetekhnoloji yokuvelisa ephucukileyo kunye neqela lobuchwephesha elinobuchule, elinokwenza ngokwezifiso iimveliso zePSS ngeenkcukacha ezahlukeneyo kunye nezakhiwo ezahlukeneyo zepateni ngokweemfuno zabathengi. Kwangaxeshanye, i-XKH inika ingqalelo kumgangatho wemveliso kunye nomgangatho wenkonzo, kwaye izibophelele ekuboneleleni abathengi uluhlu olupheleleyo lwenkxaso yobugcisa kunye nezisombululo. Kwicandelo le-PSS, i-XKH iqokelele amava atyebileyo kunye neenzuzo, kwaye ijonge phambili ekusebenzeni kunye namaqabane ehlabathi ukukhuthaza kunye uphuhliso olutsha lwezibane ze-LED, izixhobo ze-semiconductor kunye namanye amashishini.