50.8mm/100mm AlN Template kwiNPSS/FSS AlN template kwisafire

50.8mm/100mm AlN itemplate kwiNPSS/FSS AlN itemplate kwisafire oFanekiweyo Umfanekiso

Inkcazelo emfutshane:

I-AlN-On-Sapphire ibhekisa kwindibaniselwano yezinto apho iifilimu ze-aluminiyam nitride zikhuliswa kwii-substrates zeSapphire. Kulo lwakhiwo, umgangatho ophezulu wefilimu ye-aluminium nitride inokukhuliswa nge-chemical vapor deposition (CVD) okanye i-organometrical chemical vapor deposition (MOCVD), eyenza ifilimu ye-aluminium nitride kunye ne-sapphire substrate ibe nokudibanisa okulungileyo. Iingenelo zesi sakhiwo kukuba i-aluminium nitride ine-conductivity ephezulu ye-thermal, ukuzinza kweekhemikhali eziphezulu kunye neempawu ezibalaseleyo ze-optical, ngelixa i-sapphire substrate ineempawu ezibalaseleyo zomatshini kunye ne-thermal kunye nokungafihli.

Thumela i-imeyile kuthi

Iimbonakalo

AlN-On-Sapphire

I-AlN-On-Sapphire ingasetyenziselwa ukwenza izixhobo ezahlukeneyo zombane, ezinje:
1. Ii-chips ze-LED: Ii-chips ze-LED zihlala zenziwe ngeefilimu ze-aluminium nitride kunye nezinye izinto. Ukusebenza kunye nokuzinza kwee-led kungaphuculwa ngokusebenzisa i-AlN-On-Sapphire wafers njenge-substrate ye-chips ze-LED.
2. I-Lasers: Ii-wafers ze-AlN-On-Sapphire nazo zingasetyenziselwa njenge-substrates ye-laser, esetyenziswa ngokuqhelekileyo kunyango, unxibelelwano, kunye nokulungiswa kwezinto.
3. Iiseli zelanga: Ukwenziwa kweeseli zelanga kufuna ukusetyenziswa kwezinto ezifana ne-aluminium nitride. I-AlN-On-Sapphire njenge-substrate inokuphucula ukusebenza kakuhle kunye nobomi beeseli zelanga.
4. Ezinye izixhobo ze-optoelectronic: Ii-wafers ze-AlN-On-Sapphire nazo zingasetyenziselwa ukwenza ii-photodetectors, izixhobo ze-optoelectronic, kunye nezinye izixhobo ze-optoelectronic.

Ukuqukumbela, ii-wafers ze-AlN-On-Sapphire zisetyenziswa ngokubanzi kwintsimi ye-opto-electrical ngenxa ye-conductivity ephezulu ye-thermal, ukuzinza kweekhemikhali eziphezulu, ilahleko ephantsi kunye neempawu ezibalaseleyo ze-optical.

50.8mm/100mm AlN Template kwiNPSS/FSS

Into	Amagqabantshintshi
Inkcazo	Itemplate ye-AlN-on-NPSS	Itemplate ye-AlN-on-FSS
Idayamitha yewafer	50.8mm, 100mm
ISubstrate	c-inqwelomoya NPSS	c-inqwelomoya Planar Sapphire (FSS)
Ukutyeba kweSubstrate	50.8mm, 100mmc-inqwelomoya iPlanar Sapphire (FSS)100mm : 650 um
Ukutyeba kwe-epi-layer ye-AIN	3 ~ 4 um (ithagethi: 3.3um)
Ukuqhuba	Ukugquma
Umphezulu	Njengoko ukhulile
	RMS<1nm	RMS<2nm
Ngasemva	Igayiwe
FWHM(002)XRC	< 150 arcsec	< 150 arcsec
I-FWHM(102)XRC	< 300 arcsec	< 300 arcsec
Ukungabandakanywa kuMda	< 2mm	< 3mm
Ukuqhelaniswa neflethi ephambili	inqwelomoya+0.1°
Ubude beflethi bokuqala	50.8mm: 16+/-1 mm 100mm: 30+/-1 mm
Iphakheji	Ipakishwe kwibhokisi yokuthumela okanye kwisitya esinye se-wafer