I-SiO₂ Quartz Wafer Ii-Quartz Wafers I-SiO₂ MEMS Ubushushu 2″ 3″ 4″ 6″ 8″ 12″
Umzobo oneenkcukacha
Intshayelelo
Ii-wafer ze-quartz zidlala indima ebalulekileyo ekuphuculeni amashishini e-elektroniki, i-semiconductor, kunye ne-optics. Zifumaneka kwiifowuni ezikhokela i-GPS yakho, zifakwe kwizikhululo zesiseko eziphezulu ezinika amandla iinethiwekhi ze-5G, kwaye zifakwe kwizixhobo zokwenza ii-microchips zesizukulwana esilandelayo, ii-wafer ze-quartz zibalulekile. Ezi substrates zicocekileyo kakhulu zivumela ukwenziwa kwezinto ezintsha kuyo yonke into ukusuka kwi-quantum computing ukuya kwi-photonics eziphambili. Nangona zifunyenwe kwenye yezona zimbiwa zininzi eMhlabeni, ii-wafer ze-quartz zenziwe ngokwemigangatho engaqhelekanga yokuchaneka nokusebenza.
Zithini iiWafers zeQuartz
Ii-wafer ze-quartz ziidiski ezibhityileyo, ezijikelezileyo ezenziwe ngekristale ye-quartz eyenziweyo ecocekileyo kakhulu. Zifumaneka ngobubanzi obuqhelekileyo obuqala kwi-intshi ezi-2 ukuya kwezi-12, ii-wafer ze-quartz zihlala zinobukhulu obuqala kwi-0.5 mm ukuya kwi-6 mm. Ngokungafaniyo ne-quartz yendalo, eyenza iikristale ze-prismatic ezingaqhelekanga, i-quartz eyenziweyo ikhuliswa phantsi kweemeko zelebhu ezilawulwa ngokuqinileyo, ivelisa izakhiwo zekristale ezifanayo.
Ubukrelekrele obukhoyo bee-quartz wafers bubonelela ngokumelana neekhemikhali okungenakuthelekiswa nanto, ukukhanya okubonakalayo, kunye nokuzinza phantsi kobushushu obuphezulu kunye noxinzelelo loomatshini. Ezi mpawu zenza ii-quartz wafers zibe yinxalenye esisiseko yezixhobo ezichanekileyo ezisetyenziswa ekudluliseni idatha, ekuqondeni, ekubaleni, kunye nobuchwepheshe obusekelwe kwi-laser.
Iinkcukacha zeQuartz Wafer
| Uhlobo lweQuartz | 4 | 6 | 8 | 12 |
|---|---|---|---|---|
| Ubungakanani | ||||
| Ububanzi (intshi) | 4 | 6 | 8 | 12 |
| Ubukhulu (mm) | 0.05–2 | 0.25–5 | 0.3–5 | 0.4–5 |
| Ukunyamezelana kobubanzi (intshi) | ± 0.1 | ± 0.1 | ± 0.1 | ± 0.1 |
| Ukunyamezelana koButyebi (mm) | Ingenziwa ngokwezifiso | Ingenziwa ngokwezifiso | Ingenziwa ngokwezifiso | Ingenziwa ngokwezifiso |
| Iipropati zoKubona | ||||
| Isalathisi sokuKhangela @365 nm | 1.474698 | 1.474698 | 1.474698 | 1.474698 |
| Isalathisi sokuKhangela @546.1 nm | 1.460243 | 1.460243 | 1.460243 | 1.460243 |
| Isalathisi sokuKhangela @1014 nm | 1.450423 | 1.450423 | 1.450423 | 1.450423 |
| Uthumelo lwangaphakathi (1250–1650 nm) | >99.9% | >99.9% | >99.9% | >99.9% |
| Ukudluliselwa okupheleleyo (1250–1650 nm) | >92% | >92% | >92% | >92% |
| Umgangatho woMatshini | ||||
| I-TTV (Utshintsho loBukhulu obupheleleyo, µm) | <3 | <3 | <3 | <3 |
| Ubuthe tyaba (µm) | ≤15 | ≤15 | ≤15 | ≤15 |
| Uburhabaxa bomphezulu (nm) | ≤1 | ≤1 | ≤1 | ≤1 |
| Ibhombo (µm) | <5 | <5 | <5 | <5 |
| Iipropati Zomzimba | ||||
| Uxinano (g/cm³) | 2.20 | 2.20 | 2.20 | 2.20 |
| IModulus kaYoung (GPa) | 74.20 | 74.20 | 74.20 | 74.20 |
| Ubunzima beMohs | 6–7 | 6–7 | 6–7 | 6–7 |
| I-Shear Modulus (GPa) | 31.22 | 31.22 | 31.22 | 31.22 |
| Umlinganiselo kaPoisson | 0.17 | 0.17 | 0.17 | 0.17 |
| Amandla okuNciphisa (GPa) | 1.13 | 1.13 | 1.13 | 1.13 |
| Amandla okuThamba (MPa) | 49 | 49 | 49 | 49 |
| I-Dielectric Constant (1 MHz) | 3.75 | 3.75 | 3.75 | 3.75 |
| Iipropati zoBushushu | ||||
| Ingongoma yoxinzelelo (10¹⁴.⁵ Pa·s) | 1000°C | 1000°C | 1000°C | 1000°C |
| Indawo yokuNgcwaba (10¹³ Pa·s) | 1160°C | 1160°C | 1160°C | 1160°C |
| Indawo yokuthambisa (10⁷.⁶ Pa·s) | 1620°C | 1620°C | 1620°C | 1620°C |
Ukusetyenziswa kweeQuartz Wafers
Ii-wafers ze-Quartz zenziwe ngokwezifiso ukuhlangabezana nezicelo eziyimfuneko kumashishini aquka:
Izixhobo ze-elektroniki kunye neRF
- Iiwafer zeQuartz zibalulekile kwi-quartz crystal resonators kunye ne-oscillators ezibonelela ngemiqondiso yewotshi kwiifowuni eziphathwayo, iiyunithi zeGPS, iikhompyutha kunye nezixhobo zonxibelelwano ezingenazingcingo.
- Ukwanda kwazo okuphantsi kobushushu kunye ne-Q-factor ephezulu kwenza ii-quartz wafers zilungele iisekethe zexesha ezizinzileyo kunye nezihluzi zeRF.
I-Optoelectronics kunye neMifanekiso
- Iiwafer zeQuartz zibonelela ngokusasazwa kwe-UV kunye ne-IR okuhle kakhulu, nto leyo ezenza zilungele iilensi ze-optical, ii-beam splitters, iifestile ze-laser, kunye nee-detectors.
- Ukuchasana kwazo nemitha kwenza ukuba zisetyenziswe kwifiziksi enamandla aphezulu nakwizixhobo zasesibhakabhakeni.
I-Semiconductor kunye ne-MEMS
- Iiwafer zeQuartz zisebenza njengeziseko zesekethe ze-semiconductor ezisebenza rhoqo, ngakumbi kwizicelo zeGaN kunye neRF.
- Kwi-MEMS (iiNkqubo zeMicro-Electro-Mechanical), ii-quartz wafers ziguqula imiqondiso yoomatshini ibe yeyombane ngesiphumo se-piezoelectric, zivumela ii-sensors ezifana nee-gyroscopes kunye nee-accelerometers.
Ukwenziwa Kwemveliso Okuphambili kunye neeLebhu
- Iiwafer ze-quartz ezicocekileyo kakhulu zisetyenziswa kakhulu kwiilabhoratri zamakhemikhali, ze-biomedical, neze-photonic kwiiseli ze-optical, ii-UV cuvettes, kunye nokuphathwa kweesampuli ezishushu kakhulu.
- Ukuhambelana kwazo neendawo ezishushu kakhulu kuzenza zilungele amagumbi eplasma kunye nezixhobo zokubeka.
Indlela Ezenziwa Ngayo IiWafers ZeQuartz
Kukho iindlela ezimbini eziphambili zokuvelisa ii-quartz wafers:
IiWafers zeQuartz eziDityanisiweyo
Iiwafer ze-quartz ezixutyiweyo zenziwa ngokunyibilikisa iigranules ze-quartz zendalo zibe yiglasi engaguqukiyo, emva koko zinqunqwe kwaye zipolishwe ibhloko eqinileyo zibe ziiwafers ezincinci. Ezi wafer ze-quartz zibonelela ngezi zinto zilandelayo:
- Ukukhanya okungaqhelekanga kwe-UV
- Uluhlu olubanzi lokusebenza kobushushu (>1100°C)
- Ukumelana okugqwesileyo kobushushu
Zilungele izixhobo ze-lithography, ii-oven ezishushu kakhulu, kunye neefestile ze-optical kodwa azifanelekanga ukusetyenziswa kwi-piezoelectric ngenxa yokungabikho kocwangco lwekristale.
IiWafers zeQuartz ezikhuliswe kakuhle
Iiwafer ze-quartz ezikhuliswe kakuhle zikhuliswa ngendlela yokwenziwa ukuze kuveliswe iikristale ezingenaziphene ezine-lattice echanekileyo. Ezi wafers zenzelwe ukusetyenziswa ezifuna:
- Ii-engile ezichanekileyo zokusika (X-, Y-, Z-, AT-cut, njl.njl.)
- Ii-oscillators ezisebenzisa i-high-frequency kunye nee-SAW filters
- Ii-polarizers ezibonakalayo kunye nezixhobo ze-MEMS eziphambili
Inkqubo yemveliso ibandakanya ukukhula kwembewu kwii-autoclaves, kulandele ukunqunyulwa, ukujongwa, ukuqhotswa, kunye nokupholishwa.
Ababoneleli abaPhambili beQuartz Wafer
Ababoneleli behlabathi abagxile kwii-wafers ze-quartz ezichanekileyo baquka:
- UHeraeus(eJamani) – i-quartz edityanisiweyo neyokwenziwa
- I-Shin-Etsu Quartz(eJapan) – izisombululo ze-wafer ezicocekileyo kakhulu
- I-WaferPro(e-USA) – ii-wafers ze-quartz ezibanzi kunye ne-substrates
- UKorth Kristalle(eJamani) – ii-wafers zekristale ezenziwe ngokwenziwa
Indima Eguqukayo Yee-Quartz Wafers
Iiwafer zeQuartz ziyaqhubeka nokukhula njengezinto ezibalulekileyo kwiindawo zobugcisa ezisakhasayo:
- Ukwenziwa kube lula– Iiwafer zeQuartz zenziwa ngokunyamezelana okuqinileyo kokudibanisa izixhobo ezincinci.
- Ii-elektroniki ze-Higher Frequency– Uyilo olutsha lwe-quartz wafer lungena kwiindawo ze-mmWave kunye ne-THz ze-6G kunye ne-radar.
- Ukuqonda kweSizukulwana Esilandelayo– Ukususela kwizithuthi ezizisebenzela zodwa ukuya kwi-IoT yemizi-mveliso, izinzwa ezisekwe kwi-quartz ziya zibaluleke ngakumbi.
Imibuzo ebuzwa rhoqo malunga nee-quartz wafers
1. Yintoni i-quartz wafer?
I-quartz wafer yidiski encinci, ethe tyaba eyenziwe nge-crystalline silicon dioxide (SiO₂), edla ngokwenziwa ngobukhulu obuqhelekileyo be-semiconductor (umz., 2", 3", 4", 6", 8", okanye 12"). Yaziwa ngobumsulwa bayo obuphezulu, ukuzinza kobushushu, kunye nokucaca kwayo, i-quartz wafer isetyenziswa njenge-substrate okanye umthwali kwizicelo ezahlukeneyo ezichanekileyo ezifana nokuveliswa kwe-semiconductor, izixhobo ze-MEMS, iinkqubo ze-optical, kunye neenkqubo ze-vacuum.
2. Yintoni umahluko phakathi kwe-quartz kunye nejeli ye-silica?
I-Quartz luhlobo oluqinileyo lwe-silicon dioxide (SiO₂) oluyikristale, ngelixa ijeli ye-silica iluhlobo olungenawo ulwelo nolunezimbobo lwe-SiO₂, olusetyenziswa rhoqo njenge-desiccant yokufunxa umswakama.
- I-Quartz iqinile, ibonakala ngokucacileyo, kwaye isetyenziswa kwizicelo ze-elektroniki, ze-optical, nezemizi-mveliso.
- Ijeli yeSilica ibonakala njengeentsimbi ezincinci okanye iigranules kwaye isetyenziselwa kakhulu ukulawula ukufuma kwiipakethe, kwi-elektroniki, nakwindawo yokugcina.
3. Zisetyenziselwa ntoni iikristale zequartz?
Iikristale zeQuartz zisetyenziswa kakhulu kwi-elektroniki nakwi-optics ngenxa yeempawu zazo ze-piezoelectric (zivelisa itshaja yombane phantsi koxinzelelo loomatshini). Izicelo eziqhelekileyo ziquka:
- Ii-Oscillators kunye nolawulo lweefrikhwensi(umz., iiwotshi ze-quartz, iiwotshi, ii-microcontrollers)
- Izixhobo ezibonakalayo(umz., iilensi, iipleyiti zamaza, iifestile)
- IiResonators kunye nezihluzikwi-RF nakwizixhobo zonxibelelwano
- Izinzwauxinzelelo, ukukhawulezisa, okanye amandla
- Ukwenziwa kwee-semiconductornjengee-substrates okanye iifestile zenkqubo
4. Kutheni i-quartz isetyenziswa kwi-microchips?
I-Quartz isetyenziswa kwizicelo ezinxulumene ne-microchip kuba inika:
- Uzinzo lobushushungexesha leenkqubo zobushushu obuphezulu ezifana nokusasazwa kunye nokutsalwa
- Ubushushu bombanengenxa yeempawu zayo ze-dielectric
- Ukumelana neekhemikhalikwiiasidi kunye nezinyibilikisi ezisetyenziswa ekwenzeni i-semiconductor
- Ukuchaneka kobukhulukunye nokwandiswa okuphantsi kobushushu ukuze kulungelelaniswe i-lithography ethembekileyo
- Nangona i-quartz ngokwayo ingasetyenziswa njengezinto ezisebenzayo ze-semiconductor (njenge-silicon), idlala indima ebalulekileyo yokuxhasa kwimeko yokwenziwa—ingakumbi kwii-oven, amagumbi, kunye ne-photomask substrates.
Ngathi
I-XKH igxile kuphuhliso lobuchwepheshe obuphezulu, imveliso, kunye nokuthengiswa kweglasi ekhethekileyo ye-optical kunye nezixhobo ezintsha zekristale. Iimveliso zethu zibonelela nge-optical electronics, i-consumer electronics, kunye ne-military. Sinikezela nge-Sapphire optical components, ii-mobile phone lens covers, i-Ceramics, i-LT, i-Silicon Carbide SIC, i-Quartz, kunye ne-semiconductor crystal wafers. Ngobuchule obunobuchule kunye nezixhobo eziphambili, sigqwesile ekucutshungulweni kwemveliso okungaqhelekanga, sijolise ekubeni yishishini eliphambili le-optoelectronic materials high-tech.










