Isisombululo sokugcada esifakwe kwiSapphire, esimanzi nesiwomileyo

I-Wafer Eqoshiweyo yeSapphire, Izisombululo Zokugcada Ezimanzi Nezomileyo Umfanekiso Oveziweyo

Inkcazo emfutshane:

Iiwafers ezifakwe isafire zenziwe kusetyenziswa ii-substrates ze-sapphire ezinekristale enye (Al₂O₃), ezicutshungulwa nge-photolithography ephucukileyo edityaniswe ne-wet etching kunye ne-dry etching technologies. Ezi mveliso zineendlela ezifanayo kakhulu, ukuchaneka okugqwesileyo, kunye nozinzo olubalaseleyo lomzimba kunye neekhemikhali, okwenza ukuba zifaneleke kwizicelo ezinokuthembeka okuphezulu kwi-microelectronics, i-optoelectronics, ukupakisha kwe-semiconductor, kunye neendawo zophando eziphambili.

Thumela i-imeyile kuthi

Iimbonakalo

Umzobo oneenkcukacha

Isisombululo sokugcada esifakwe kwiSapphire, esimanzi nesiwomileyo

Intshayelelo yeMveliso

Iiwafers ezifakwe isafire zenziwe kusetyenziswa ii-substrates zesafire enye enekristale ephezulu (Al₂O₃), ezicutshungulwa nge-photolithography ephucukileyo edityaniswe neubuchwepheshe bokugcaba ngokumanzi kunye nobugcisa bokugcaba okomileyoEzi mveliso zineepateni ezicwangciswe kakuhle kakhulu, ukuchaneka okugqwesileyo kobukhulu, kunye nozinzo olubalaseleyo lomzimba kunye neekhemikhali, nto leyo eyenza ukuba zifaneleke kwizicelo ezinokuthembeka okuphezulu kwi-microelectronics, i-optoelectronics, ukupakisha kwe-semiconductor, kunye namacandelo ophando oluphambili.

I-Sapphire yaziwa kakhulu ngobulukhuni bayo obungaqhelekanga kunye nokuzinza kwesakhiwo, inobulukhuni be-Mohs obuyi-9, obulandela idayimani kuphela. Ngokulawula ngokuchanekileyo iiparameter zokukrola, izakhiwo ezincinci ezichazwe kakuhle neziphindaphindwayo zinokwenziwa kumphezulu we-sapphire, ukuqinisekisa imiphetho ebukhali yepateni, i-geometry ezinzileyo, kunye nokuhambelana okuhle kuzo zonke iibhetshi.

Ubuchwephesha bokugcaba

Ukugcaba okumanzi

I-Wet etching isebenzisa izisombululo zeekhemikhali ezikhethekileyo ukususa ngokukhetha izinto zesafire kwaye zenze izakhiwo ezincinci ezifunekayo. Le nkqubo inika amandla aphezulu, ukufana okuhle, kunye neendleko zokucubungula eziphantsi, okwenza ukuba ifaneleke kwiindawo ezinkulu kunye nokusetyenziswa kweepateni kunye neemfuno eziphakathi zeprofayili esecaleni.

Ngokulawula ngokuchanekileyo ukwakheka kwesisombululo, ubushushu, kunye nexesha lokugrumba, ulawulo oluzinzileyo lobunzulu be-etch kunye nemo yomphezulu lunokufezekiswa. Ii-wafers ze-sapphire ezigrumbayo ezimanzi zisetyenziswa kakhulu kwi-substrates zokupakisha ze-LED, iileya zenkxaso yesakhiwo, kunye nezicelo ezikhethiweyo ze-MEMS.

Ukukrola okomileyo

Ukugcaba okomileyo, okufana nokugcaba kweplasma okanye ukugcaba kwe-reactive ion (RIE), kusebenzisa ii-ion ezinamandla aphezulu okanye iintlobo ezisabelayo ukugcaba i-sapphire ngeendlela zomzimba nezekhemikhali. Le ndlela ibonelela nge-anisotropy ephezulu, ukuchaneka okuphezulu, kunye nokukwazi ukudlulisa iipateni okugqwesileyo, okuvumela ukwenziwa kweempawu ezintle kunye nezakhiwo ezincinci ze-high-aspect-ratio.

Ukugrumba okomileyo kulungele ngokukodwa usetyenziso olufuna amacala ami nkqo, inkcazo yeempawu ezibukhali, kunye nolawulo oluqinileyo, njengezixhobo zeMicro-LED, ukupakishwa kwe-semiconductor okuphambili, kunye nezakhiwo ze-MEMS ezisebenza kakuhle.

Iimpawu eziphambili kunye neenzuzo

I-substrate yesafire yekristale enye ecocekileyo kakhulu enamandla abalaseleyo oomatshini
Iindlela eziguquguqukayo zenkqubo: ukugrumba okumanzi okanye ukugrumba okomileyo ngokusekelwe kwiimfuno zesicelo
Ubunzima obuphezulu kunye nokumelana nokuguguleka ukuze kuthembeke ixesha elide
Uzinzo oluhle kakhulu kubushushu nakwiikhemikhali, olufanele iindawo ezinzima
Ukukhanya okuphezulu kokukhanya kunye neempawu ze-dielectric ezizinzileyo
Ukufana okuphezulu kwepateni kunye nokuhambelana kwebhetshi ukuya kwibhetshi

Izicelo

Ii-substrates zokupakisha nokuvavanya ze-LED kunye ne-Micro-LED
Ii-chip carriers ze-semiconductor kunye nokupakisha okuphucukileyo
Iisensa zeMEMS kunye neenkqubo ze-micro-electromechanical
Izixhobo ezibonakalayo kunye nezakhiwo zokulungelelanisa ngokuchanekileyo
Amaziko ophando kunye nophuhliso lwezakhiwo ezincinci ezenzelwe wena

Ukwenziwa ngokwezifiso kunye neenkonzo

Sinikezela ngeenkonzo ezibanzi zokwenza ngokwezifiso, kubandakanya uyilo lweepateni, ukukhetha iindlela zokugrumba (ezimanzi okanye ezomileyo), ulawulo lobunzulu bokugrumba, ukhetho lobukhulu be-substrate kunye nobungakanani, ukugrumba kwicala elinye okanye kabini, kunye namanqanaba okupholisha umphezulu. Ulawulo oluqinileyo lomgangatho kunye neenkqubo zokuhlola ziqinisekisa ukuba yonke i-wafer egrumbayo yesafire ihlangabezana nemigangatho ephezulu yokuthembeka kunye nokusebenza ngaphambi kokuba ihanjiswe.

Imibuzo Ebuzwa Rhoqo - Imibuzo Ebuzwa Rhoqo

Q1: Yintoni umahluko phakathi kokugcaba okumanzi kunye nokugcaba okomileyo kwisafire?

A:Ukucheba okumanzi kusekelwe kwiimpendulo zeekhemikhali kwaye kufanelekile ukucutshungulwa kwindawo enkulu kwaye kungabizi kakhulu, ngelixa ukucheba okomileyo kusebenzisa iindlela ezisekwe kwi-plasma okanye kwi-ion ukufikelela kuchanekileyo oluphezulu, i-anisotropy engcono, kunye nolawulo olucokisekileyo lweempawu. Ukhetho luxhomekeke kubunzima besakhiwo, iimfuno zokuchaneka, kunye nokuqwalaselwa kweendleko.

Umbuzo 2: Yeyiphi inkqubo yokugrumba endifanele ndiyikhethe kwisicelo sam?

A:Ukucheba okumanzi kuyacetyiswa kwizicelo ezifuna iipateni ezifanayo ngokuchanekileyo okuphakathi, njengee-substrates ze-LED eziqhelekileyo. Ukucheba okomileyo kulungele ngakumbi kwizicelo ezinesisombululo esiphezulu, umlinganiselo ophezulu, okanye ii-Micro-LED kunye ne-MEMS apho i-geometry echanekileyo ibaluleke kakhulu.

Q3: Ngaba ungazixhasa iipateni kunye neenkcukacha ezenziwe ngokwezifiso?

A:Ewe. Sixhasa uyilo olulungiselelwe ngokupheleleyo, kuquka uyilo lwepateni, ubungakanani beempawu, ubunzulu be-etch, ubukhulu be-wafer, kunye nobukhulu be-substrate.

Ngathi

I-XKH igxile kuphuhliso lobuchwepheshe obuphezulu, imveliso, kunye nokuthengiswa kweglasi ekhethekileyo ye-optical kunye nezixhobo ezintsha zekristale. Iimveliso zethu zibonelela nge-optical electronics, i-consumer electronics, kunye ne-military. Sinikezela nge-Sapphire optical components, ii-mobile phone lens covers, i-Ceramics, i-LT, i-Silicon Carbide SIC, i-Quartz, kunye ne-semiconductor crystal wafers. Ngobuchule obunobuchule kunye nezixhobo eziphambili, sigqwesile ekucutshungulweni kwemveliso okungaqhelekanga, sijolise ekubeni yishishini eliphambili le-optoelectronic materials high-tech.