IiWafers zeQuartz eziFuthiweyo eziHlanjululwe kakhulu zeSemiconductor, iiFotonics Optical Applications 2″4″6″8″12″

Inkcazo emfutshane:

I-Fused Quartz-kwaziwa njengeI-Silica edibeneyo—luhlobo lwe-silicon dioxide (SiO₂) olungelulo olwe-crystalline (amorphous). Ngokungafaniyo ne-borosilicate okanye ezinye iiglasi zemizi-mveliso, i-quartz exutyiweyo ayinazo izinto ezibangela ukungcola okanye izongezo, enika ukwakheka okucocekileyo kweekhemikhali kwe-SiO₂. Iyaziwa ngokudluliselwa kwayo okubonakalayo okungaqhelekanga kuzo zombini ii-ultraviolet (UV) kunye ne-infrared (IR), idlula izinto zeglasi zemveli.

Thumela i-imeyile kuthi

Iimbonakalo

Umzobo oneenkcukacha

IiWafers zeGlasi zeSilica eziDityanisiweyo kunye neQuartz ye-Optical-2

i-fused_quartz_wafer_4_intshi_fused_silica_wafer_

Isishwankathelo seGlasi yeQuartz

Iiwafer zeQuartz zenza umqolo wezixhobo ezininzi zanamhlanje eziqhuba ihlabathi ledijithali lanamhlanje. Ukusuka kwindlela ohamba ngayo kwifowuni yakho ukuya kumqolo wezikhululo zesiseko ze-5G, iQuartz inika uzinzo, ubunyulu, kunye nokuchaneka okufunekayo kwi-elektroniki esebenza kakhulu kunye ne-photonics. Nokuba ixhasa i-flexible circuitry, ivumela ii-MEMS sensors, okanye yenza isiseko se-quantum computing, iimpawu ezikhethekileyo zeQuartz zenza ukuba ibe yinto ebalulekileyo kumashishini onke.

“I-Fused Silica” okanye “i-Fused Quartz” elilinqanaba elingaguqukiyo le-quartz (i-SiO2). Xa ithelekiswa neglasi ye-borosilicate, i-fused silica ayinazo izongezo; yiyo loo nto ikhona kwimo yayo ecocekileyo, i-SiO2. I-fused silica inokudluliselwa okuphezulu kwi-infrared kunye ne-ultraviolet spectrum xa ithelekiswa neglasi eqhelekileyo. I-fused silica iveliswa ngokunyibilikisa nokuphinda iqinise i-ultrapure SiO2. I-synthetic fused silica kwelinye icala yenziwe ngee-silicon-rich chemical precursors ezifana ne-SiCl4 ezifakwa igesi kwaye emva koko zifakwe kwi-H2 + O2 atmosphere. Uthuli lwe-SiO2 olwenziwa kweli tyala ludityaniswa ne-silica kwi-substrate. Iibhloko ze-fused silica zinqunyulwa zibe zii-wafers emva koko ii-wafers zicoliwe ekugqibeleni.

IiWafers zeGlasi zeSilica eziDityanisiweyo kunye neQuartz ecacileyo

Iimpawu eziphambili kunye neenzuzo ze-Quartz Glass Wafer

Ubumsulwa obuphezulu kakhulu (≥99.99% SiO2)
Ilungele iinkqubo ze-semiconductor kunye ne-photonics ezicocekileyo kakhulu apho ungcoliseko lwezinto kufuneka luncitshiswe.
Uluhlu olubanzi lokusebenza kobushushu
Igcina ulwakhiwo olusemgangathweni ukusuka kumaqondo obushushu angabonakaliyo ukuya kuthi ga kwi-1100°C ngaphandle kokugoba okanye ukubola.
Ukuhanjiswa kwe-UV kunye ne-IR okugqwesileyo
Inika ukukhanya okugqwesileyo kwe-optical kwi-deep ultraviolet (DUV) nge-near-infrared (NIR), ixhasa ukusetyenziswa kwe-optical ngokuchanekileyo.
I-Coefficient yokwandisa ubushushu obuphantsi
Iphucula uzinzo lobukhulu phantsi kokuguquguquka kobushushu, inciphisa uxinzelelo kwaye iphucule ukuthembeka kwenkqubo.
Ukumelana neekhemikhali eziphezulu
Ayinazo ii-asidi ezininzi, ii-alkali, kunye nezinyibilikisi—nto leyo eyenza ukuba ifaneleke kakuhle kwiindawo ezinoburhalarhume beekhemikhali.
Ukuguquguquka kokugqiba komphezulu
Ifumaneka ngokugqitywa okugudileyo kakhulu, okunecala elinye okanye okunecala eliphindwe kabini, okuhambelana neefotoniki kunye neemfuno zeMEMS.

Inkqubo yokuvelisa i-Quartz Glass Wafer

Ii-wafers ze-quartz ezidityanisiweyo ziveliswa ngothotho lwamanyathelo alawulwayo nachanekileyo:

Ukukhethwa kwezinto eziluhlaza
Ukukhethwa kwemithombo yendalo ye-quartz ecocekileyo kakhulu okanye ye-SiO₂ eyenziweyo.
Ukunyibilika kunye nokuxubana
I-Quartz inyibilikiswa kwi-~2000°C kwii-oven zombane phantsi komoya olawulwayo ukuze kususwe izinto eziqukiweyo kunye namaqamza.
Ukwenziwa kweeBhloko
I-silica enyibilikisiweyo ipholiswa ibe ziibhloko eziqinileyo okanye ii-ingots.
Ukusikwa kweWafer
Iisarha zedayimani ezichanekileyo okanye zentambo zisetyenziselwa ukusika ii-ingots zibe ziindawo ezingenanto ze-wafer.
Ukulepha kunye nokupolisha
Zombini iindawo zithe tyaba kwaye zipolishwe ukuze zihlangabezane ngokuchanekileyo neempawu ezibonakalayo, ubukhulu, kunye noburhabaxa.
Ukucoca kunye nokuhlola
Iiwafers zicocwa kwiindawo zokucoca ze-ISO Class 100/1000 kwaye zijongwa ngokucokisekileyo ukuze kujongwe iziphene kunye nokuhambelana kwazo nobukhulu bazo.

Iimpawu ze-Quartz Glass wafer

i-spec	iyunithi	4"	6"	8"	10"	12"
Ububanzi / ubungakanani (okanye isikwere)	mm	100	150	200	250	300
Ukunyamezelana (±)	mm	0.2	0.2	0.2	0.2	0.2
Ubukhulu	mm	0.10 okanye ngaphezulu	0.30 nangaphezulu	0.40 nangaphezulu	0.50 nangaphezulu	0.50 nangaphezulu
Iflethi eyintloko yokubhekisa	mm	32.5	57.5	I-semi-notch	I-semi-notch	I-semi-notch
I-LTV (5mm×5mm)	μm	< 0.5	< 0.5	< 0.5	< 0.5	< 0.5
I-TTV	μm	< 2	< 3	< 3	< 5	< 5
Ukuqubuda	μm	±20	±30	±40	±40	±40
I-Warp	μm	≤ 30	≤ 40	≤ 50	≤ 50	≤ 50
I-PLTV (5mm×5mm) < 0.4μm	%	≥95%	≥95%	≥95%	≥95%	≥95%
Ukujikelezisa Umda	mm	Iyahambelana ne-SEMI M1.2 Standard / jonga i-IEC62276
Uhlobo lomphezulu		Icala Elinye Elikhazimlisiweyo / Amacala Aphindwe Kabini Akhazimlisiweyo
Icala elikhazimlisiweyo uRa	nm	≤1	≤1	≤1	≤1	≤1
Iikhrayitheriya zecala langasemva	μm	ngokubanzi 0.2-0.7 okanye eyenziwe ngokwezifiso

I-Quartz vs. Ezinye izinto ezibonakalayo

Ipropati	Iglasi yeQuartz	Iglasi yeBorosilicate	I-Sapphire	Iglasi esemgangathweni
Ubushushu obuphezulu bokusebenza	~1100°C	~500°C	~2000°C	~200°C
Ukuhanjiswa kwe-UV	Igqwesile (JGS1)	Imbi	Kulungile	Imbi kakhulu
Ukumelana neekhemikhali	Igqwesile	Iphakathi	Igqwesile	Imbi
Ubunyulu	Iphezulu kakhulu	Iphantsi ukuya kwephakathi	Phezulu	Iphantsi
Ukwandiswa kobushushu	Isezantsi kakhulu	Iphakathi	Iphantsi	Phezulu
Ixabiso	Phakathi ukuya phezulu	Iphantsi	Phezulu	Isezantsi kakhulu

Imibuzo ebuzwa rhoqo malunga neQuartz Glass Wafer

Q1: Yintoni umahluko phakathi kwe-fused quartz kunye ne-fused silica?
Nangona zombini zingama-amorphous e-SiO₂, i-fused quartz idla ngokuvela kwimithombo yendalo ye-quartz, ngelixa i-fused silica iveliswa ngokwendalo. Ngokwemisebenzi, zibonelela ngokusebenza okufanayo, kodwa i-fused silica inokuba nobunyulu obuphezulu kunye nokulingana.

Umbuzo 2: Ngaba ii-wafers ze-quartz ezixutyiweyo zingasetyenziswa kwiindawo ezine-vacuum eninzi?
Ewe. Ngenxa yeempawu zazo zokungakhuphi igesi kakhulu kunye nokumelana okuphezulu kobushushu, ii-wafers ze-quartz ezixutyiweyo zilungile kakhulu kwiinkqubo ze-vacuum kunye nokusetyenziswa kweenqwelo moya.

Umbuzo 3: Ngaba ezi wafers zifanelekile ukusetyenziswa nge-laser enzulu ye-UV?
Ngokuqinisekileyo. I-Fused quartz inombane ophezulu ofikelela kwi-~185 nm, nto leyo eyenza ukuba ifaneleke kakhulu kwi-DUV optics, kwiimaski ze-lithography, nakwiinkqubo ze-laser ze-excimer.

Q4: Ngaba uyayixhasa into yokwenziwa kwe-wafer eyenziwe ngokwezifiso?
Ewe. Sinikezela ngokwezifiso ezipheleleyo kubandakanya ububanzi, ubukhulu, umgangatho womphezulu, iiflethi/ii-notches, kunye neepateni ze-laser, ngokusekelwe kwiimfuno zakho zesicelo.

Ngathi

I-XKH igxile kuphuhliso lobuchwepheshe obuphezulu, imveliso, kunye nokuthengiswa kweglasi ekhethekileyo ye-optical kunye nezixhobo ezintsha zekristale. Iimveliso zethu zibonelela nge-optical electronics, i-consumer electronics, kunye ne-military. Sinikezela nge-Sapphire optical components, ii-mobile phone lens covers, i-Ceramics, i-LT, i-Silicon Carbide SIC, i-Quartz, kunye ne-semiconductor crystal wafers. Ngobuchule obunobuchule kunye nezixhobo eziphambili, sigqwesile ekucutshungulweni kwemveliso okungaqhelekanga, sijolise ekubeni yishishini eliphambili le-optoelectronic materials high-tech.

I-Sapphire Wafer engenanto ecocekileyo kakhulu, i-Raw Sapphire Substrate yokucutshungulwa 5