I-Alumina Ceramic End Effector eSebenza ngokuPhezulu (iFork Arm) yeSemiconductor kunye neCleanroom Automation

Inkcazo emfutshane:

I-Alumina Ceramic End Effector, ekwabizwa ngokuba yi-ceramic fork arm okanye i-robotic ceramic hand, yinxalenye yokuphatha ngokuchanekileyo eyilelwe iinkqubo ezizenzekelayo kwiindawo zelebhu ze-semiconductor, i-photovoltaic, i-panel display, kunye neendawo zelebhu ezicocekileyo kakhulu. Yenzelwe ukubonelela ngozinzo olukhethekileyo lobushushu, ubulukhuni boomatshini, kunye nokumelana neekhemikhali, inika ukuthuthwa okucocekileyo, okuthembekileyo, nokukhuselekileyo kwezinto ezinobuthathaka ezifana nee-silicon wafers, ii-substrates zeglasi, kunye nee-micro-components ze-elektroniki.

Thumela i-imeyile kuthi

Iimbonakalo

Umzobo oneenkcukacha

Intshayelelo yeMveliso

Njengohlobo lwe-robotic end effector, le nxalenye ye-ceramic yindlela yokugqibela yokudibanisa inkqubo ye-automation kunye ne-workpiece. Idlala indima ebalulekileyo ekudluliseleni ngokuchanekileyo, ukulungelelanisa, ukulayisha/ukukhulula, kunye nemisebenzi yokubeka kwiindawo zokucoca nakwiindawo zokucoca.

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Isishwankathelo sezinto eziphathekayo – I-Alumina Ceramic (Al₂O₃)

I-Alumina ceramic sisixhobo sobugcisa se-ceramic esizinzileyo kakhulu nesingenazo iikhemikhali esaziwa ngeempawu zaso ezibalaseleyo zoomatshini nezombane. I-alumina ecocekileyo kakhulu (≥ 99.5%) esetyenziswa kwezi zixhobo zokugqibela iqinisekisa:

Ubunzima obuphezulu (Mohs 9): Okwesibini emva kwedayimani, i-alumina inika ukumelana nokuguguleka okugqithisileyo.
Ubuchule bobushushu obuphezulu: Igcina ulwakhiwo luluqilima ngaphezu kwe-1600°C.
Ukungakwazi ukusebenza kweekhemikhali: Ayimelani nee-asidi, ii-alkali, izinyibilikisi, kunye neendawo zokugrumba i-plasma.
Ubushushu bombane: Inamandla aphezulu e-dielectric kunye nokulahleka okuphantsi kwe-dielectric.
Ukwanda okuphantsi kobushushu: Iqinisekisa uzinzo olulinganayo kwiindawo zokujikeleza kobushushu.
Ukuveliswa kwamasuntswana aphantsi: Kubalulekile ukuze igumbi lokucoca lihambelane (iKlasi 10 ukuya kwiKlasi 1000).

Ezi mpawu zenza i-alumina ceramic ifaneleke kakhulu kwimisebenzi ebalulekileyo kwimizi-mveliso ejongene nongcoliseko.

Izicelo ezisebenzayo

I-alumina ceramic end effector isetyenziswa kakhulu kwiinkqubo zoshishino zobuchwepheshe obuphezulu, ingakumbi apho izinto zesinyithi okanye zeplastiki zemveli zingaphumeleli ngenxa yokwanda kobushushu, ungcoliseko, okanye imiba yokugqwala. Iindawo eziphambili zokusetyenziswa ziquka:

Ukudluliselwa kwe-wafer ye-semiconductor
Iinkqubo zokulayisha nokukhulula i-photolithography
Ukuphathwa kwe-substrate yeglasi kwimigca ye-OLED kunye ne-LCD
Ukudluliselwa kwe-crystalline silicon wafer kwimveliso yeeseli zelanga
Ukuhlolwa okuzenzakalelayo kwe-optical okanye i-microelectronic
Uthutho lwesampulu kwiilabhoratri zohlalutyo okanye ze-biomedical
Iinkqubo zokwenza izinto ngokuzenzekelayo kwindawo yokucoca umoya

Amandla ayo okusebenza ngaphandle kokufaka amasuntswana okanye itshaja engashukumiyo enza ukuba ibaluleke kakhulu kwimisebenzi yerobhothi echanekileyo kwi-automation yegumbi lokucoca.

Iimpawu zoYilo kunye nokwenza ngokwezifiso

Isiphenduli ngasinye se-ceramic senziwe ngendlela yokuba silingane ne-robotic arm okanye inkqubo yokuphatha i-wafer. Sixhasa ukwenziwa ngokwezifiso okugcweleyo ngokusekelwe koku kulandelayo:

Ukuhambelana kobungakanani bewafer: 2", 4", 6", 8", 12" nangaphezulu
Ijometri yeslot kunye nesithuba: Ilungele ukubamba umphetho, inkxaso ecaleni elingasemva, okanye uyilo lwe-wafer olunezikhewu
Iiports zokufunxa: Imingxunya okanye iitshaneli ezidityanisiweyo zokuphatha izinto ezingadibaniyo
Uqwalaselo lokufaka: Imingxunya, imisonto, iindawo ezilungiselelwe iflengi yesixhobo sokugqibela serobhothi yakho
Unyango lomphezulu: Igqityiwe kakuhle, ipeyintwe kakuhle, okanye igudiswe kakuhle (iRa < 0.2 µm iyafumaneka)
Ukukhusela umphethoIikona ezijikelezileyo okanye i-chamfering ukuthintela umonakalo we-wafer

Ngokusebenzisa imizobo ye-CAD okanye iimodeli ze-3D ezibonelelwa ngabathengi, iinjineli zethu zinokuphucula ingalo nganye yefoloko ukuze zilungele ubunzima, amandla, kunye nococeko.

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Iingenelo zeCeramic End Effectors

Uphawu	Inzuzo
Ukuqina Okuphezulu KweeMechanical	Igcina ukuchaneka kobukhulu phantsi kwamandla okulayisha erobhothi
Ukusebenza kakuhle kweThermal	Isebenza ngokuthembekileyo kwiindawo ezinobushushu obuphezulu okanye kwiindawo zeplasma
Akukho Ngcoliso lweSinyithi	Akukho mngcipheko wongcoliseko lwee-ion kwi-critical semiconductor processing
Umphezulu ophantsi wokungqubana	Inciphisa umngcipheko wokukrweleka kwi-wafer okanye kwi-glass substrates
I-Anti-Static kunye ne-Non-Magnetic	Ayitsali uthuli okanye ayichaphazeli izinto ezibuthathaka kwimagnethi
Ubomi beNkonzo ende	Ukumelana nokuguguleka okuphezulu kwimijikelo ephindaphindayo ye-automation ekhawulezayo
Ukuhambelana Okucocekileyo Kakhulu	Ifanelekile kwiindawo zokucoca ze-ISO 14644 (iKlasi 100 nangaphantsi)

Xa kuthelekiswa neengalo zeplastiki okanye ze-aluminium, i-alumina ceramic ibonelela ngokuphuculwa okukhulu kweekhemikhali kunye nokuzinza komzimba kunye neemfuno ezincinci zokugcinwa.

Ipropati	Ingalo yesinyithi	Ingalo yeplastiki	Ingalo yoSeramic yeAlumina
Ukuqina	Iphakathi	Iphantsi	Phezulu kakhulu (Mohs 9)
Uzinzo lobushushu	≤ 500°C	≤ 150°C	≥ 1600°C
Ukumelana neekhemikhali	Iphakathi	Imbi	Igqwesile
Ukufaneleka kwegumbi lokucoca	Phakathi	Iphantsi	Phezulu kakhulu
Ukumelana nokunxiba	Phakathi	Iphantsi	Ibalasele
Amandla eDielectric	Iphantsi	Phakathi	Phezulu
Ukuchaneka koMatshini ngokwezifiso	Inomda	Iphakathi	Phezulu (± 0.01mm kunokwenzeka)

Iinkcukacha zobugcisa

Ipharamitha	Ixabiso
Izinto eziphathekayo	I-Alumina ecocekileyo kakhulu (≥ 99.5%)
Ubushushu bokusebenza	Ukuya kuthi ga kwi-1600°C
Uburhabaxa bomphezulu	URa ≤ 0.2 µm (ukhetho)
Ubungakanani beWafer obuhambelanayo	2" ukuya kwi-12" okanye ngokwezifiso
Ukunyamezelana kweFlatness	± 0.01 mm (kuxhomekeke kwisicelo)
Inkxaso yokufunxa iVacuum	Iitshaneli ezikhethwayo nezinokwenziwa ngokwezifiso
Iinketho zokuFaka	I-Bolt-through, i-flange, imingxunya enezikhewu

Imibuzo Ebuzwa Rhoqo (Imibuzo Ebuzwa Rhoqo)

Q1: Ngaba isiphumo sokugqibela singadibaniswa kwiinkqubo zerobhothi ezikhoyo?
A1:Ewe. Sixhasa ukwenziwa ngokwezifiso ngokusekelwe kujongano lwakho lwerobhothi. Ungasithumelela umzobo weCAD okanye ubungakanani beflange ukuze ulungelelanise ngokuchanekileyo.

Umbuzo 2: Ngaba iingalo zeseramikhi ziya kuphuka lula xa zisetyenziswa?
A2:Nangona i-ceramic ibuthathaka ngokwemvelo, uyilo lwethu lusebenzisa i-geometry ephuculiweyo ukunciphisa uxinzelelo. Phantsi kweemeko ezifanelekileyo zokusetyenziswa, zibonelela ngobomi benkonzo obude kakhulu kunesinyithi okanye iplastiki.

Umbuzo 3: Ngaba kunokwenzeka ukusebenzisa oku kwiindawo zokucoca i-vacuum eziphezulu kakhulu okanye kwiindawo zokutshiza ngeplasma?
A3:Ewe. I-Alumina ceramic ayikhuphi igesi, izinzile kubushushu, kwaye ayimelani nokugqwala—ifanelekile ngokupheleleyo kwiindawo ezine-vacuum ephezulu, igesi esebenzayo, okanye i-plasma.

Umbuzo 4: Zicocwa okanye zigcinwa njani ezi zinto?
A4:Zingacocwa kusetyenziswa amanzi acocekileyo, utywala, okanye isepha ezihambelana negumbi lokucoca. Akukho mfuneko yolondolozo olukhethekileyo ngenxa yozinzo lwazo lweekhemikhali kunye nomphezulu wazo ongangeniyo.

Ngathi

I-XKH igxile kuphuhliso lobuchwepheshe obuphezulu, imveliso, kunye nokuthengiswa kweglasi ekhethekileyo ye-optical kunye nezixhobo ezintsha zekristale. Iimveliso zethu zibonelela nge-optical electronics, i-consumer electronics, kunye ne-military. Sinikezela nge-Sapphire optical components, ii-mobile phone lens covers, i-Ceramics, i-LT, i-Silicon Carbide SIC, i-Quartz, kunye ne-semiconductor crystal wafers. Ngobuchule obunobuchule kunye nezixhobo eziphambili, sigqwesile ekucutshungulweni kwemveliso okungaqhelekanga, sijolise ekubeni yishishini eliphambili le-optoelectronic materials high-tech.