I-Thin-film i-lithium tantalate (LTOI) imathiriyeli ivela njengamandla amatsha abalulekileyo kwindawo edibeneyo ye-optics. Kulo nyaka, imisebenzi emininzi ekumgangatho ophezulu kwiimodyuli ze-LTOI ipapashiwe, kunye neepaseji ze-LTOI ezikumgangatho ophezulu ezibonelelwe nguNjingalwazi uXin Ou ovela kwiShanghai Institute of Microsystem kunye neTekhnoloji yoLwazi, kunye neenkqubo ezikumgangatho ophezulu zokujonga i-waveguide etching eziphuhliswe liqela likaNjingalwazi Kippenberg e-EPFL. , Swizalend. Imizamo yabo yentsebenziswano ibonise iziphumo ezincomekayo. Ukongeza, amaqela ophando avela kwiYunivesithi yaseZhejiang ekhokelwa nguNjingalwazi uLiu Liu kunye neYunivesithi yaseHarvard ekhokelwa nguNjingalwazi uLoncar nawo anike ingxelo ngesantya esiphezulu, esizinzile kakhulu kwiimodyuli ze-LTOI.
Njengesihlobo esisondeleyo sefilimu ye-lithium niobate (LNOI), i-LTOI igcina ukumodareyitha kwesantya esiphezulu kunye nelahleko ephantsi yeempawu ze-lithium niobate ngelixa ikwabonelela ngeenzuzo ezinjengexabiso eliphantsi, i-birefringence ephantsi, kunye nokunciphisa iziphumo ze-photorefractive. Ukuthelekiswa kweempawu eziphambili zezinto ezimbini zichazwe ngezantsi.
◆ Ukufana phakathi kweLithium Tantalate (LTOI) kunye neLithium Niobate (LNOI)
①Refractive Index:2.12 vs 2.21
Oku kuthetha ukuba imilinganiselo ye-waveguide yemowudi enye, iradiyasi egobayo, kunye nobukhulu besixhobo esiqhelekileyo sokwenziwa esekwe kuzo zombini izixhobo ziyafana kakhulu, kwaye ukusebenza kwazo kokudibanisa ifayibha nako kuthelekiseka. Ngokufakwa kwe-waveguide elungileyo, zombini izixhobo zinokufezekisa ilahleko yokufaka<0.1 dB/cm. I-EPFL ibika ilahleko ye-waveguide ye-5.6 dB / m.
②I-Electro-optic Coefficient:30.5 pm/V vs 30.9 pm/V
Ukusebenza kokumodareyitha kuthelekiseka kuzo zombini izixhobo, kunye ne-modulation esekelwe kwimpembelelo yePockels, evumela i-bandwidth ephezulu. Okwangoku, iimodyuli ze-LTOI ziyakwazi ukufikelela kwi-400G ngendlela yokusebenza kwendlela, kunye ne-bandwidth edlula i-110 GHz.
③Ibhendi:3.93 eV vs 3.78 eV
Zombini izixhobo zinefestile evulekileyo ebanzi, exhasa usetyenziso ukusuka kokubonakalayo ukuya kwi-infrared wavelengths, ngaphandle kokufunxa kwiibhendi zonxibelelwano.
④UMyalelo weSibini weNgcaciso yeNgcaciso yoMsebenzi (d33):21 pm/V vs 27pm/V
Ukuba isetyenziselwa izicelo ezingezizo ezifana ne-second harmonic generation (SHG), i-different-frequency generation (DFG), okanye i-sum-frequency generation (SFG), ukuphumelela kokuguqulwa kwezinto ezimbini kufuneka kufane.
◆ Iindleko eziluncedo ze-LTOI vs LNOI
①Iindleko zokuLungisa iWafer esezantsi
I-LNOI ifuna i-He ion implantation yokwahlula umaleko, enokusebenza kakuhle kwe-ionization. Ngokwahlukileyo, i-LTOI isebenzisa i-H ion implantation yokwahlula, efana ne-SOI, kunye nokusebenza kakuhle kwe-delamination ngaphezulu kwamaxesha ali-10 aphezulu kune-LNOI. Oku kubangela umahluko omkhulu wexabiso kwii-intshi ze-6-intshi: i-$ 300 vs. $ 2000, i-85% yokunciphisa iindleko.
②Sele isetyenziswa ngokubanzi kwimarike yombane yabathengi kwizihluzi ze-acoustic(iiyunithi ezingama-750,000 ngonyaka, ezisetyenziswa yi-Samsung, i-Apple, i-Sony, njl.).
◆ Izinto eziluncedo zokuSebenza ze-LTOI vs LNOI
①Iziphene zeMathiriyeli ezimbalwa, i-Photorefractive Effect ebuthathaka, ukuzinza ngakumbi
Ekuqaleni, iimodyuli ze-LNOI zihlala zibonisa indawo yokutyeka, ngenxa yobuninzi bentlawulo ebangelwa ziziphene kujongano lwe-waveguide. Ukuba aziphathwa, ezi zixhobo zinokuthatha usuku ukuzinza. Nangona kunjalo, iindlela ezahlukeneyo zaphuhliswa ukujongana nalo mbandela, njengokusebenzisa i-metal oxide cladding, i-substrate polarization, kunye nokudibanisa, okwenza le ngxaki ilawuleke kakhulu ngoku.
Ngokwahlukileyo, i-LTOI ineziphene ezimbalwa zezinto eziphathekayo, ezikhokelela ekunciphiseni kakhulu i-drift phenomena. Ngaphandle kokucubungula okongeziweyo, indawo yayo yokusebenza ihlala izinzile. Iziphumo ezifanayo ziye zaxelwa yi-EPFL, iHarvard, kunye neYunivesithi yaseZhejiang. Nangona kunjalo, uthelekiso luhlala lusebenzisa iimodyuli ezingaphathwanga ze-LNOI, ezinokuthi zingabinabulungisa ngokupheleleyo; ngokucutshungulwa, ukusebenza kwazo zombini izixhobo kuyafana. Umahluko omkhulu ulele kwi-LTOI ifuna amanyathelo ambalwa okuqhubela phambili.
②I-Birefringence esezantsi: 0.004 vs 0.07
I-birefringence ephezulu ye-lithium niobate (LNOI) inokuba ngumngeni ngamanye amaxesha, ngakumbi njengoko ukugoba kwe-waveguide kunokubangela ukudibanisa imo kunye ne-mode hybridization. Kwi-LNOI encinci, ukugoba kwi-waveguide kunokuguqula ngokuyinxenye ukukhanya kwe-TE kube kukukhanya kwe-TM, kube nzima ukuyilwa kwezixhobo ezithile zokwenziwa, njengezihluzi.
Nge-LTOI, i-birefringence esezantsi iyawuphelisa lo mba, oko kunokwenza kube lula ukuphuhlisa izixhobo ezisebenza ngokuphezulu. I-EPFL ikwanike ingxelo ngeziphumo eziphawulekayo, i-leveraging birefringence ye-LTOI ephantsi kunye nokungabikho kwendlela yokunqumla ukufikelela kwi-ultra-wide-wide-wide-spectrum electro-optic comb isizukulwana esinolawulo lokusasazwa okusicaba kuluhlu olubanzi lokubonwa. Oku kube nesiphumo esichukumisayo se-450 nm comb bandwidth enemigca yekama engaphezulu kwama-2000, ngokuphindwe kaninzi kunoko kunokuphunyezwa nge-lithium niobate. Xa kuthelekiswa neecombs zeKerr optical frequency, iicombs ze-electro-optic zibonelela ngenzuzo yokungabinamda kunye nokuzinza ngakumbi, nangona zifuna igalelo le-microwave enamandla amakhulu.
③Higher Optical Umonakalo Threshold
I-Optical damage threshold ye-LTOI iphindwe kabini kune-LNOI, inika inzuzo kwizicelo ezingezizo (kunye nezicelo ezinokuthi zenzeke kwixesha elizayo le-Coherent Perfect Absorption (CPO). Amanqanaba ombane emodyuli yangoku ayinakwenzeka ukuba bonakalise i-lithium niobate.
④Isiphumo esisezantsi seRaman
Oku kukwabhekiselele kwizicelo ezingeyomfuneko. I-Lithium niobate inefuthe elinamandla le-Raman, ekuthi kwi-Kerr optical optical comb applications ingakhokelela kwisizukulwana sokukhanya esingafunwayo seRaman kunye nokufumana ukhuphiswano, ukuthintela i-x-cut lithium niobate optical optical cobs ukufikelela kwi-soliton state. Nge-LTOI, isiphumo se-Raman sinokucinezelwa ngoyilo lwekristale yokuqhelaniswa, ivumela i-x-cut LTOI ukufezekisa imveliso ye-soliton optical comb. Oku kwenza ukudityaniswa kwe-monolithic ye-soliton optical frequency Combs kunye neemodyuli ezinesantya esiphezulu, into engenakufezekiswa nge-LNOI.
◆ Kutheni Ithin-Film ILithium Tantate (LTOI) Ingazange Ikhankanywe Ngaphambili?
ILithium tantalate inobushushu obuphantsi beCurie kunelithium niobate (610°C vs. 1157°C). Ngaphambi kophuhliso lwetekhnoloji ye-heterointegration (XOI), iimodyuli ze-lithium niobate zaveliswa kusetyenziswa i-titanium diffusion, efuna ukufakwa kwe-anneal ngaphezulu kwe-1000 ° C, okwenza i-LTOI ingafaneleki. Nangona kunjalo, ngokutshintshela namhlanje ekusebenziseni i-insulator substrates kunye ne-waveguide etching ukwenza imodyuli, i-610 ° C ye-Curie yobushushu ingaphezulu kunokwaneleyo.
◆ Ngaba iThin-Film Lithium Tantalate (LTOI) Iya kuthatha Indawo yeThin-Film Lithium Niobate (TFLN)?
Ngokusekwe kuphando lwangoku, i-LTOI ibonelela ngezinto eziluncedo ekusebenzeni kokwenziwa, uzinzo, kunye neendleko ezinkulu zemveliso, kungekho miqobo ibonakalayo. Nangona kunjalo, i-LTOI ayigqithi i-lithium niobate ekusebenzeni kokumodareyitha, kwaye imiba yozinzo kunye ne-LNOI inezisombululo ezaziwayo. Kunxibelelwano lweemodyuli zeDR, kukho imfuneko encinci yamalungu okwenziwa (kunye nesilicon nitride ingasetyenziswa ukuba iyafuneka). Ukongeza, utyalo-mali olutsha luyafuneka ukuseka kwakhona iinkqubo ze-wafer-level etching, ubuchule be-heterointegration, kunye nokuvavanya ukuthembeka (ubunzima be-lithium niobate etching yayingeyiyo i-waveguide kodwa ukufikelela kwinqanaba le-wafer-level etching). Ke ngoko, ukukhuphisana nesikhundla esisekiweyo se-lithium niobate, i-LTOI inokufuna ukutyhila ezinye izibonelelo. Ngokwemfundo, nangona kunjalo, i-LTOI ibonelela ngesakhono esibalulekileyo sophando kwiinkqubo ezidityanisiweyo ze-chip, ezinje nge-octave-spanning electro-optic cobs, PPLT, soliton kunye nezixhobo zokwahlula amaza e-AWG, kunye neemodyuli zoluhlu.
Ixesha lokuposa: Nov-08-2024