Iinqwelomoya zekristale kunye nokuqhelaniswa nekristale ziikhonsepthi ezimbini ezingundoqo kwicrystallography, ngokusondeleleneyo nolwakhiwo lwekristale kwitekhnoloji yesekethe edityanisiweyo ye-silicon.
1.Inkcazo kunye neePropati zeCrystal Orientation
Ukuqhelaniswa nekristale imele isalathiso esithile ngaphakathi kwekristale, ngokuqhelekileyo ibonakaliswa ngezalathisi zokuqhelaniswa nekristale. I-Crystal orientation ichazwa ngokudibanisa nawaphi na amanqaku amabini e-lattice ngaphakathi kwesakhiwo se-crystal, kwaye inezi mpawu zilandelayo: i-crystal orientation nganye iqulethe inani elingapheliyo lamanqaku e-lattice; ukuqhelaniswa nekristale enye kunokubandakanya ukuqhelaniswa kwekristale ehambelanayo eyenza usapho lokuqhelaniswa nekristale; usapho lokuqhelaniswa nekristale lugubungela zonke iindawo zeletisi ngaphakathi kwekristale.
Ukubaluleka kokuqhelaniswa nekristale kulele ekuboniseni ilungiselelo le-athomu ngaphakathi kwekristale. Ngokomzekelo, i- [111] i-crystal orientation imele isalathiso esithile apho umlinganiselo wentelekelelo yee-axes ezintathu ezilungelelanisiweyo ziyi-1: 1: 1.
2. Inkcazo kunye neePropati zeCrystal Planes
I-crystal plane yiplani yokulungelelanisa i-athomu ngaphakathi kwekristale, emelwe yi-crystal plane indices (i-Miller indices). Ngokomzekelo, (i-111) ibonisa ukuba ukuphindaphinda kwe-intercepts ye-crystal plane kwii-axes ezilungelelanisayo zikwi-1: 1: 1. I-crystal plane ineempawu ezilandelayo: i-crystal plane nganye iqulethe inani elingapheliyo lamanqaku e-lattice; inqwelomoya nganye yekristale inenani elingenasiphelo leendiza ezihambelanayo ezenza usapho lwecrystal plane; usapho lwe-crystal plane lugubungela yonke ikristale.
Ukumiselwa kwee-indices zeMiller kubandakanya ukuthatha i-intercepts ye-crystal plane kwi-axis yokulungelelanisa nganye, ukufumana ukuphindaphinda kwabo, kunye nokuguqula umlinganiselo omncinci we-integer. Umzekelo, i (111) icrystal plane ineentsimbi ezinqumlayo kwi-x, y, kunye no-z kumlinganiselo we-1:1:1.
3. Ubudlelwane phakathi kweCrystal Planes kunye neCrystal Orientation
Iindiza zekristali kunye nokuqhelaniswa nekristale ziindlela ezimbini ezahlukeneyo zokuchaza ubume bejometri yekristale. Icrystal orientation ibhekisa kulungiselelo lweeathom ecaleni kwendlela ethile, ngelixa icrystal plane ibhekisa kulungiselelo lweeathom kwinqwelomoya ethile. Ezi zimbini zinembalelwano ethile, kodwa zimele iingqiqo ezahlukeneyo zomzimba.
Ubudlelwane obuphambili: I-vector eqhelekileyo ye-crystal plane (okt, i-vector perpendicular kuloo nqwelomoya) ihambelana nokuqhelaniswa nekristale. Umzekelo, i-vector yesiqhelo ye (111) crystal plane ihambelana [111] crystal orientation, nto leyo ethetha ukuba ulungiselelo lweathom ecaleni kwendlela ye- [111] iperpendicular kuloo nqwelomoya.
Kwiinkqubo ze-semiconductor, ukukhethwa kweeplanethi zekristali kuchaphazela kakhulu ukusebenza kwesixhobo. Ngokomzekelo, kwii-semiconductors ezisekelwe kwi-silicon, iiplani ze-crystal ezisetyenziswa ngokuqhelekileyo ziyi-(100) kunye (111) iiplani kuba zineendlela ezahlukeneyo ze-athomu kunye neendlela zokudibanisa kwiindlela ezahlukeneyo. Iipropati ezifana nokuhamba kwe-electron kunye namandla angaphezulu ahluka kwiindiza zekristale ezahlukeneyo, ezichaphazela ukusebenza kunye nenkqubo yokukhula kwezixhobo ze-semiconductor.
4. Izicelo eziSebenzayo kwiiNkqubo zeSemiconductor
Kwimveliso ye-silicon-based semiconductor, ukuqhelaniswa nekristale kunye neeplanethi zekristale zisetyenziswa kwimiba emininzi:
Ukukhula kweCrystal: Iikristale zeSemiconductor zidla ngokukhula ngokuhambelana nekristale ethile. Iikristale ze-silicon zidla ngokukhula ecaleni kwe- [100] okanye [111] iorientation ngenxa yokuba uzinzo kunye nolungiselelo lweathom kolu lungelelaniso lulungele ukukhula kwekristale.
Inkqubo ye-Etching: Kwi-etching emanzi, iinqwelomoya ezahlukeneyo zekristale zinemilinganiselo eyahluka-hlukeneyo yokutsala. Umzekelo, amazinga e-etching kwi-(100) kunye (111) iinqwelomoya zesilicon ziyahluka, okukhokelela kwiziphumo ze-anisotropic etching.
Iimpawu zeDivaysi: Ukuhamba kwe-electron kwizixhobo ze-MOSFET kuchatshazelwa yi-crystal plane. Ngokwesiqhelo, ukushukuma kuphezulu kwinqwelomoya (100), yiyo loo nto ii-MOSFET zangoku ezisekelwe kwi-silicon zisebenzisa kakhulu ii-wafers eziyi-100.
Isishwankathelo, iindiza zekristale kunye nokuqhelaniswa nekristale ziindlela ezimbini ezisisiseko zokuchaza ubume bekristale kwi-crystallography. I-Crystal orientation imele iimpawu zolwalathiso ngaphakathi kwekristale, ngelixa iindiza zekristale zichaza iindiza ezithile ngaphakathi kwekristale. Ezi ngcamango zimbini zinxulumene ngokusondeleyo kwimveliso ye-semiconductor. Ukukhethwa kweeplanethi zekristale kuchaphazela ngokuthe ngqo izinto eziphathekayo kunye neekhemikhali, ngelixa ukuqhelaniswa kwekristale kuchaphazela ukukhula kwekristale kunye nobuchule bokucubungula. Ukuqonda ubudlelwane phakathi kweenqwelomoya zekristale kunye nokuqhelaniswa nazo kubalulekile ekuphuculeni iinkqubo ze-semiconductor kunye nokuphucula ukusebenza kwesixhobo.
Ixesha lokuposa: Oct-08-2024