Ii-crystal planes kunye nokujonga i-crystal ziingcamango ezimbini eziphambili kwi-crystallography, ezinxulumene kakhulu nesakhiwo se-crystal kwi-silicon-based integrated circuit technology.
1. Inkcazelo kunye neeProperties zeCrystal Orientation
Ukujongwa kwekristale kumela icala elithile ngaphakathi kwikristale, elidla ngokubonakaliswa zizikhombisi zokujongwa kwekristale. Ukujongwa kwekristale kuchazwa ngokuqhagamshela naziphi na iindawo ezimbini zelatisi ngaphakathi kwesakhiwo sekristale, kwaye ineempawu ezilandelayo: ukujongwa kwekristale nganye kuqulathe inani elingenamkhawulo lamanqaku elatisi; ukujongwa kwekristale enye kunokwenziwa ziindlela ezininzi zekristale ezihambelanayo ezenza usapho lokujongwa kwekristale; usapho lokujongwa kwekristale lugubungela zonke iindawo zelatisi ngaphakathi kwekristale.
Ukubaluleka kokujonga ikristale kukubonisa ulungelelwaniso lwecala leeathom ngaphakathi kwikristale. Umzekelo, ukujonga ikristale [111] kumela icala elithile apho ii-projection ratios zee-axes ezintathu ze-coordinate ziyi-1:1:1.
2. Inkcazo kunye neempawu zeeCrystal Planes
I-crystal plane yiplane ye-athomu ecwangcisiweyo ngaphakathi kwekristale, emelwe zii-crystal plane indices (ii-Miller indices). Umzekelo, (111) ibonisa ukuba ii-reciprocals ze-intercepts ze-crystal plane kwi-coordinate axes zikwi-ratio ye-1:1:1. I-crystal plane ineempawu ezilandelayo: i-crystal plane nganye inenani elingenamkhawulo lamanqaku e-lattice; i-crystal plane nganye inenani elingenamkhawulo lamaqela ahambelanayo enza usapho lwe-crystal plane; usapho lwe-crystal plane lugubungela yonke ikristale.
Ukuchonga ii-Miller indices kubandakanya ukuthatha ii-intercepts ze-crystal plane kwi-axis nganye ye-coordinate, ukufumana ii-reciprocals zazo, nokuziguqula zibe yi-integer ratio encinci. Umzekelo, i-crystal plane (111) ine-intercepts kwi-x, y, kunye ne-z axes kwi-ratio ye-1:1:1.
3. Ubudlelwane Phakathi Kweendiza Zekristale Nokuqhelana Nekristale
Ii-crystal planes kunye ne-crystal orientation ziindlela ezimbini ezahlukeneyo zokuchaza ulwakhiwo lwejometri ye-crystal. I-crystal orientation ibhekisa kulungiselelo lwee-athomu kwicala elithile, ngelixa i-crystal plane ibhekisa kulungiselelo lwee-athomu kwi-plane ethile. Ezi zimbini zinokuhambelana okuthile, kodwa zimele iingcamango ezahlukeneyo zomzimba.
Ulwalamano oluphambili: Ivektha eqhelekileyo yeplane yekristale (oko kukuthi, ivektha ethe nkqo kuloo plane) ihambelana nolwalathiso lwekristale. Umzekelo, ivektha eqhelekileyo yeplane yekristale (111) ihambelana nolwalathiso lwekristale [111], oko kuthetha ukuba ulungelelwaniso lweathomu kwicala le [111] luthe nkqo kuloo plane.
Kwiinkqubo ze-semiconductor, ukukhethwa kwe-crystal planes kuchaphazela kakhulu ukusebenza kwesixhobo. Umzekelo, kwi-silicon-based semiconductors, ii-crystal planes ezisetyenziswa rhoqo zii-(100) kunye ne-(111) planes kuba zine-atomic settings ezahlukeneyo kunye neendlela zokubopha kwicala elahlukileyo. Iimpawu ezifana nokuhamba kwe-electron kunye namandla omphezulu ziyahluka kwii-crystal planes ezahlukeneyo, nto leyo echaphazela ukusebenza kunye nenkqubo yokukhula kwezixhobo ze-semiconductor.
4. Izicelo Ezisebenzayo Kwiinkqubo Ze-Semiconductor
Kwimveliso ye-semiconductor esekwe kwi-silicon, ukujongwa kwekristale kunye ne-crystal planes zisetyenziswa kwiinkalo ezininzi:
Ukukhula kwekristale: Iikristale ze-semiconductor zihlala zikhula ngokwee-orientation ezithile zekristale. Iikristale zesilicon zihlala zikhula ngokwee-orientation ze [100] okanye [111] kuba uzinzo kunye nolungiselelo lwe-athomu kwezi-orientation zilungele ukukhula kwekristale.
Inkqubo Yokugcaba: Kwi-wet etching, ii-crystal planes ezahlukeneyo zinezinga lokugcaba ezahlukeneyo. Umzekelo, izinga lokugcaba kwii-(100) kunye ne-(111) ze-silicon zahlukile, nto leyo ebangela iziphumo zokugcaba ze-anisotropic.
Iimpawu zeSixhobo: Ukuhamba kwe-electron kwizixhobo ze-MOSFET kuchatshazelwa yi-crystal plane. Ngokwesiqhelo, ukuhambahamba kuphezulu kwi-(100) plane, yiyo loo nto ii-MOSFET zanamhlanje ezisekelwe kwi-silicon zisebenzisa kakhulu ii-wafers (100).
Ngamafutshane, ii-crystal planes kunye ne-crystal orientation zimbini iindlela ezisisiseko zokuchaza ulwakhiwo lweekristale kwi-crystallography. I-Crystal orientation imele iipropati zecala ngaphakathi kwekristale, ngelixa ii-crystal planes zichaza ii-planes ezithile ngaphakathi kwekristale. Ezi ngcamango zimbini zinxulumene kakhulu kwimveliso ye-semiconductor. Ukukhethwa kwee-crystal planes kuchaphazela ngokuthe ngqo iipropati zomzimba nezekhemikhali zezinto, ngelixa i-crystal orientation ichaphazela ukukhula kwekristale kunye neendlela zokucubungula. Ukuqonda ubudlelwane phakathi kwee-crystal planes kunye ne-orientation kubalulekile ekwenzeni ngcono iinkqubo ze-semiconductor kunye nokuphucula ukusebenza kwesixhobo.
Ixesha leposi: Okthobha-08-2024