Iiwafer zeSilicon vs. Iiwafer zeGlasi: Yintoni kanye kanye esiyicocayo? Ukusuka kwiZinto eziBalulekileyo ukuya kwiZisombululo zoCoca eziSekelwe kwiNkqubo

Nangona zombini ii-wafer ze-silicon kunye ne-glass zineenjongo ezifanayo "zokucocwa," imingeni kunye neendlela zokungaphumeleli abajongana nazo ngexesha lokucoca zahlukile kakhulu. Oku kungangqinelani kuvela kwiimpawu zezinto ezisetyenzisiweyo kunye neemfuno zeenkcukacha ze-silicon kunye ne-glass, kunye "nefilosofi" eyahlukileyo yokucoca eqhutywa zizicelo zabo zokugqibela.

Okokuqala, masicacise: Yintoni kanye kanye esiyicocayo? Zeziphi izinto ezingcolisayo ezibandakanyekayo?

Izinto ezingcolisayo zingahlulwa zibe ziindidi ezine:

1. Izinto Ezingcolisayo Zeziqwenga

   • Uthuli, amasuntswana esinyithi, amasuntswana e-organic, amasuntswana arhabaxa (avela kwinkqubo ye-CMP), njl.njl.

   • Ezi zinto zingcolisayo zinokubangela iziphene zepateni, ezifana neeshoti okanye iisekethe ezivulekileyo.

2. Izinto Ezingcolisayo Zendalo

   • Ibandakanya iintsalela ze-photoresist, izongezo ze-resin, iioyile zolusu lomntu, iintsalela ze-solvent, njl.njl.

   • Izinto ezingcolisayo zendalo zinokwenza iimaski ezithintela ukugrumba okanye ukufakwa kwee-ion kwaye zinciphise ukunamathela kwezinye iifilimu ezincinci.

3. Izinto ezingcolisayo ze-Ion zesinyithi

   • I-iron, i-copper, i-sodium, i-potassium, i-calcium, njl.njl., ezivela kakhulu kwizixhobo, iikhemikhali, kunye nokunxibelelana nabantu.

   • Kwi-semiconductors, ii-ion zesinyithi zizinto ezingcolisayo "ezibulalayo", ezifaka amanqanaba amandla kwi-band engavumelekanga, ezonyusa umsinga wokuvuza, zinciphise ubomi bomthwali, kwaye zonakalisa kakhulu iipropati zombane. Kwiglasi, zinokuchaphazela umgangatho kunye nokunamathela kweefilimu ezincinci ezilandelayo.

4. Umaleko we-Oxide weNdalo

   • Kwi-silicon wafers: Umaleko omncinci we-silicon dioxide (i-Native Oxide) uvela ngokwemvelo kumphezulu osemoyeni. Ubukhulu kunye nokufana kwale maleko ye-oxide kunzima ukuyilawula, kwaye kufuneka isuswe ngokupheleleyo ngexesha lokwenziwa kwezakhiwo ezibalulekileyo ezifana nee-gate oxides.

   • Kwiziqwenga zeglasi: Iglasi ngokwayo sisakhiwo senethiwekhi ye-silica, ngoko ke akukho ngxaki "yokususa umaleko we-oxide wendalo." Nangona kunjalo, umphezulu usenokuba utshintshiwe ngenxa yongcoliseko, kwaye olu maleko kufuneka lususwe.

I. Iinjongo Eziphambili: Umahluko Phakathi Kokusebenza Kombane Nokugqibelela Komzimba

• IiWafer zeSilicon

  • Injongo ephambili yokucoca kukuqinisekisa ukusebenza kombane. Iinkcukacha zihlala ziquka ukubalwa kwee-particles kunye nobukhulu obuqinileyo (umz., ii-particles ≥0.1μm kufuneka zisuswe ngokufanelekileyo), ubuninzi bee-ion zesinyithi (umz., i-Fe, i-Cu kufuneka ilawulwe ukuya kwi-≤10¹⁰ ii-atom/cm² okanye ngaphantsi), kunye namanqanaba e-organic residue. Nokuba ungcoliseko oluncinci lunokukhokelela kwi-circuit shorts, i-leaking currents, okanye ukungaphumeleli kwe-gate oxide ingqibelelo.

• Iiwafer zeglasi

  • Njengezinto ezisetyenziswa phantsi komhlaba, iimfuno eziphambili kukugqibelela komzimba kunye nozinzo lweekhemikhali. Iinkcukacha zigxila kwizinto ezikumgangatho ophezulu ezifana nokungabikho kwemikrwelo, amabala angasuswayo, kunye nokugcinwa koburhabaxa bomphezulu wokuqala kunye nejiyometri. Injongo yokucoca ngokuyintloko kukuqinisekisa ukucoceka kokubona kunye nokunamathela okuhle kwiinkqubo ezilandelayo ezifana nokugquma.

II. Indalo yezinto ezibonakalayo: Umahluko oPhambili phakathi kweCrystalline kunye ne-Amorphous

• I-silicon

  • I-silicon yinto efana nekristale, kwaye umphezulu wayo ukhula ngokwendalo umaleko we-silicon dioxide (SiO₂) oxide ongenguwo uniform. Olu maleko we-oxide lubeka umngcipheko ekusebenzeni kombane kwaye kufuneka lususwe ngokupheleleyo nangokulinganayo.

• Iglasi

  • Iglasi yinethiwekhi ye-silica engenasimo. Izinto zayo ezinkulu zifana ngokwakhiwa komaleko we-silicon oxide we-silicon, oko kuthetha ukuba inokukrolwa ngokukhawuleza yi-hydrofluoric acid (HF) kwaye ikwachaphazeleka kukukhukuliseka okukhulu kwe-alkali, okukhokelela ekwandeni kokurhabaxa komphezulu okanye ukuguquka. Lo mahluko usisiseko uyalela ukuba ukucocwa kwe-silicon wafer kunokunyamezela ukukrolwa okukhanyayo nokulawulwayo ukususa ungcoliseko, ngelixa ukucocwa kwe-glass wafer kufuneka kwenziwe ngononophelo olukhulu ukuze kuthintelwe ukonakalisa izinto ezisisiseko.

III. Uthelekiso lweZisombululo zoCoca

Ngokusekelwe kwiinjongo ezikhankanyiweyo ngaphambili kunye neempawu zezinto eziphathekayo, izisombululo zokucoca ii-silicon kunye nee-glass wafers zahlukile:

• Inkqubo yokucoca iWafer yeGlasi

  • Okwangoku, uninzi lwezityalo zokucoca iglasi zisebenzisa iinkqubo zokucoca ngokusekelwe kwiimpawu zezinto zeglasi, zixhomekeke ikakhulu kwiiarhente zokucoca ze-alkaline ezibuthathaka.

  • Iimpawu zeArhente yokucoca:Ezi arhente zokucoca ezikhethekileyo zihlala zi-alkaline encinci, zine-pH emalunga ne-8-9. Zihlala ziqulathe ii-surfactants (umz., i-alkyl polyoxyethylene ether), ii-metal chelating agents (umz., i-HEDP), kunye nezixhobo zokucoca eziphilayo, ezenzelwe ukuxuba nokubolisa izinto ezingcolisayo eziphilayo ezifana neeoyile kunye neminwe, ngelixa zingcolisa kancinci kwi-matrix yeglasi.

  • Ukuhamba kweNkqubo:Inkqubo eqhelekileyo yokucoca ibandakanya ukusebenzisa uxinaniso oluthile lwezinto zokucoca ezine-alkaline ebuthathaka kumaqondo obushushu aqala kubushushu begumbi ukuya kuma-60°C, kudityaniswe nokucoca nge-ultrasound. Emva kokucoca, ii-wafers zifumana amanyathelo amaninzi okuhlanjwa ngamanzi acocekileyo kunye nokomiswa kancinci (umz., ukuphakanyiswa kancinci okanye ukomiswa ngomphunga we-IPA). Le nkqubo ihlangabezana ngempumelelo neemfuno ze-wafer yeglasi yokucoceka kokubona kunye nokucoceka ngokubanzi.

• Inkqubo yokucoca iSilicon Wafer

  • Kwinkqubo ye-semiconductor, ii-silicon wafers zihlala zicocwa nge-RCA eqhelekileyo, indlela yokucoca esebenza kakhulu ekwaziyo ukulungisa zonke iintlobo zezinto ezingcolisayo, ukuqinisekisa ukuba iimfuno zokusebenza kombane kwizixhobo ze-semiconductor ziyafezekiswa.

IV. Xa iGlasi ihlangabezana neMigangatho “yokuCoca” ephezulu

Xa kusetyenziswa ii-wafer zeglasi kwizicelo ezifuna ukubalwa kwee-particle okungqongqo kunye namanqanaba e-ion yesinyithi (umz., njengezinto ezisetyenziswa kwiinkqubo ze-semiconductor okanye kwiindawo ezintle kakhulu zokubeka ifilimu), inkqubo yokucoca yangaphakathi isenokunganeli. Kwimeko enjalo, imigaqo yokucoca ye-semiconductor ingasetyenziswa, kungeniswa icebo lokucoca le-RCA elilungisiweyo.

Eyona nto iphambili kweli cebo kukunciphisa nokuphucula iiparameter zenkqubo ye-RCA eqhelekileyo ukuze ivumelane nobuntununtunu beglasi:

• Ukususwa Kwezinto Ezingcolisayo Eziphilayo:Izisombululo ze-SPM okanye amanzi athambileyo e-ozone zingasetyenziselwa ukubola izinto ezingcolisayo eziphilayo ngokusebenzisa i-oxidation enamandla.

• Ukususwa kwamasuntswana:Isisombululo se-SC1 esixutywe kakhulu sisetyenziswa kumaqondo obushushu aphantsi kunye namaxesha amafutshane onyango ukuze kusetyenziswe ukugxothwa kwaso ngombane kunye nemiphumo yokukrala okuncinci ukususa amasuntswana, ngelixa kuncitshiswa ukugqwala kwiglasi.

• Ukususwa kwe-Ion yesinyithi:Isisombululo se-SC2 esixutyiweyo okanye izisombululo ze-hydrochloric acid/nitric acid ezixutyiweyo ezilula zisetyenziselwa ukususa ungcoliseko lwesinyithi nge-chelation.

• Imiqathango Engqongqo:I-DHF (di-ammonium fluoride) mayithintelwe ngokupheleleyo ukuthintela ukugqwala kwesiseko seglasi.

Kuyo yonke inkqubo eguquliweyo, ukudibanisa iteknoloji ye-megasonic kuphucula kakhulu ukusebenza kakuhle kokususwa kwamasuntswana anobukhulu obuncinci kwaye kuthambile ngakumbi kumphezulu.

Isiphelo

Iinkqubo zokucoca ii-wafer ze-silicon kunye neglasi ziziphumo ezingenakuphepheka zobunjineli obuchaseneyo ngokusekelwe kwiimfuno zazo zokugqibela zokusetyenziswa, iimpawu zezinto eziphathekayo, kunye neempawu zomzimba nezekhemikhali. Ukucoca i-wafer ye-silicon kufuna "ukucoceka kwinqanaba le-athomu" ukuze kusebenze umbane, ngelixa ukucoca i-wafer yeglasi kugxile ekufezekiseni iindawo zomzimba "ezigqibeleleyo, ezingonakalanga". Njengoko ii-wafer zeglasi zisetyenziswa ngakumbi kwizicelo ze-semiconductor, iinkqubo zazo zokucoca ngokuqinisekileyo ziya kuguqukela ngaphaya kokucoca kwe-alkaline ebuthathaka yendabuko, ziphuhlise izisombululo ezicociweyo nezilungiselelwe ngokwezifiso ezifana nenkqubo ye-RCA eguquliweyo ukuze ihlangabezane nemigangatho ephezulu yococeko.