Ukuqonda Okunzulu Inkqubo ye-SPC kwiMveliso yeWafer

1. Isishwankathelo seNkqubo ye-SPC

I-SPC yindlela esebenzisa iindlela zobalo ukujonga nokulawula iinkqubo zokuvelisa. Umsebenzi wayo ophambili kukubona izinto ezingaqhelekanga kwinkqubo yokuvelisa ngokuqokelela nokuhlalutya idatha yexesha langempela, ukunceda iinjineli zenze uhlengahlengiso kunye nezigqibo ngexesha elifanelekileyo. Injongo ye-SPC kukunciphisa umahluko kwinkqubo yokuvelisa, ukuqinisekisa ukuba umgangatho wemveliso uhlala uzinzile kwaye uhlangabezana neemfuno.

I-SPC isetyenziswa kwinkqubo yokukrola ukuze:

Jonga iiparameter zezixhobo ezibalulekileyo (umz., izinga lokutshintsha umbala, amandla e-RF, uxinzelelo lwegumbi, ubushushu, njl.njl.)

Hlalutya izalathisi eziphambili zomgangatho wemveliso (umz., ububanzi bomgca, ubunzulu be-etch, uburhabaxa bomphetho, njl.njl.)

Ngokubeka esweni ezi parameters, iinjineli zinokubona iindlela ezibonisa ukuwohloka kokusebenza kwezixhobo okanye ukuphambuka kwinkqubo yemveliso, ngaloo ndlela kunciphisa amazinga enkunkuma.

2. Izinto ezisisiseko zeNkqubo ye-SPC

Inkqubo ye-SPC yenziwe ngeemodyuli ezininzi ezibalulekileyo:

Imodyuli yokuQokelelwa kwedatha: Iqokelela idatha yexesha langempela evela kwizixhobo kunye nokuhamba kwenkqubo (umz., ngeenkqubo ze-FDC, ze-EES) kwaye irekhoda iiparameter ezibalulekileyo kunye neziphumo zemveliso.

IModyuli yeTshati yoLawulo: Isebenzisa iitshathi zolawulo lwezibalo (umz., itshathi ye-X-Bar, itshathi ye-R, itshathi ye-Cp/Cpk) ukuze ibone uzinzo lwenkqubo kwaye incede ekumiseleni ukuba inkqubo ilawula na.

Inkqubo yeAlarm: Ivuselela ii-alamu xa iiparameter ezibalulekileyo zidlula imida yolawulo okanye zibonisa utshintsho kwindlela ezisebenza ngayo izinto, nto leyo ekhuthaza iinjineli ukuba zithathe inyathelo.

Imodyuli yoHlahlelo kunye neNgxelo: Ihlalutya unobangela oyintloko weengxaki ngokusekelwe kwiitshathi ze-SPC kwaye ivelisa rhoqo iingxelo zokusebenza kwenkqubo kunye nezixhobo.

3. Ingcaciso eneenkcukacha zeetshathi zoLawulo kwi-SPC

Iitshathi zolawulo zezinye zezona zixhobo zisetyenziswa kakhulu kwi-SPC, ezinceda ukwahlula phakathi "kokwahluka okuqhelekileyo" (okubangelwa kukwahluka kwendalo kwenkqubo) kunye "nokwahluka okungaqhelekanga" (okubangelwa kukusilela kwezixhobo okanye ukuphambuka kwenkqubo). Iitshathi zolawulo eziqhelekileyo ziquka:

Iitshathi ze-X-Bar kunye ne-R: Zisetyenziselwa ukujonga i-avareji kunye nobubanzi ngaphakathi kweebhetshi zemveliso ukujonga ukuba inkqubo izinzile na.

Izalathisi zeCp kunye neCpk: Zisetyenziselwa ukulinganisa amandla enkqubo, oko kukuthi, ukuba imveliso yenkqubo ingahlangabezana neemfuno zeenkcukacha ngokuqhubekayo. I-Cp ilinganisa amandla anokubakho, ngelixa i-Cpk iqwalasela ukuphambuka kweziko lenkqubo kwimida yeenkcukacha.

Umzekelo, kwinkqubo yokugrumba, unokujonga iiparameter ezifana nesantya sokugrumba kunye noburhabaxa bomphezulu. Ukuba isantya sokugrumba kwesixhobo esithile sidlula umda wolawulo, ungasebenzisa iitshathi zolawulo ukufumanisa ukuba olu lutshintsho lwendalo okanye luphawu lokungasebenzi kakuhle kwesixhobo.

4. Ukusetyenziswa kwe-SPC kwiZixhobo zokuQopha

Kwinkqubo yokugrumba, ukulawula iiparameter zezixhobo kubalulekile, kwaye i-SPC inceda ukuphucula uzinzo lwenkqubo ngeendlela ezilandelayo:

Ukubeka iliso kwimeko yezixhobo: Iinkqubo ezifana ne-FDC ziqokelela idatha yexesha langempela kwiiparameter eziphambili zezixhobo zokukrola (umz., amandla e-RF, ukuhamba kwegesi) kwaye zidibanise le datha neetshathi zolawulo lwe-SPC ukuze kubonwe iingxaki ezinokubakho zezixhobo. Umzekelo, ukuba ubona ukuba amandla e-RF kwitshathi yokulawula ayaphambuka kancinci kancinci kwixabiso elibekiweyo, ungathatha inyathelo lokuqala lokulungisa okanye ukugcinwa ukuze uphephe ukuchaphazela umgangatho wemveliso.

Ukubeka iliso kuMgangatho weMveliso: Ungafaka neeparamitha eziphambili zomgangatho wemveliso (umz., ubunzulu be-etch, ububanzi bomgca) kwinkqubo ye-SPC ukuze ujonge uzinzo lwazo. Ukuba ezinye izalathisi zemveliso ezibalulekileyo ziyaphambuka kancinci kancinci kwixabiso ekujoliswe kulo, inkqubo ye-SPC iya kukhupha i-alamu, ebonisa ukuba kufuneka uhlengahlengiso lwenkqubo.

Ulondolozo Lokuthintela (PM): I-SPC inokunceda ukuphucula umjikelo wolondolozo lokuthintela wezixhobo. Ngokuhlalutya idatha yexesha elide malunga nokusebenza kwezixhobo kunye neziphumo zenkqubo, unokumisela ixesha elifanelekileyo lokugcinwa kwezixhobo. Umzekelo, ngokujonga amandla e-RF kunye nobomi be-ESC, unokumisela ukuba kufuneka nini ukucoca okanye ukutshintshwa kwecandelo, ukunciphisa amazinga okusilela kwezixhobo kunye nexesha lokungasebenzi kwemveliso.

5. Iingcebiso Zokusebenzisa Imihla Ngemihla zeNkqubo ye-SPC

Xa usebenzisa inkqubo ye-SPC kwimisebenzi yemihla ngemihla, la manyathelo alandelayo angalandelwa:

Chaza iiParameters zoLawulo oluPhambili (KPI): Chonga iiparameters ezibaluleke kakhulu kwinkqubo yemveliso kwaye uzibandakanye ekubekweni esweni kwe-SPC. Ezi parameters kufuneka zihambelane ngokusondeleyo nomgangatho wemveliso kunye nokusebenza kwezixhobo.

Seta Imida Yolawulo kunye Nemida Yealamu: Ngokusekelwe kwidatha yembali kunye neemfuno zenkqubo, seta imida yolawulo efanelekileyo kunye nemida yealamu kwiparameter nganye. Imida yolawulo idla ngokubekwa kwi-±3σ (ukuphambuka okuqhelekileyo), ngelixa imida yealamu isekelwe kwiimeko ezithile zenkqubo kunye nezixhobo.

Ukubeka iliso rhoqo kunye noHlalutyo: Hlola rhoqo iitshathi zolawulo lwe-SPC ukuze uhlalutye iindlela zolwazi kunye notshintsho. Ukuba ezinye iiparameter zidlula imida yolawulo, kufuneka amanyathelo akhawulezileyo, njengokulungisa iiparameter zezixhobo okanye ukwenza ulondolozo lwezixhobo.

Ukuphathwa Kwezinto Ezingaqhelekanga kunye Nohlalutyo Lwezizathu Eziphambili: Xa kukho into engaqhelekanga, inkqubo ye-SPC irekhoda ulwazi oluneenkcukacha malunga nesiganeko. Kufuneka ulungise ingxaki kwaye uhlalutye unobangela wento engaqhelekanga ngokusekelwe kolu lwazi. Kudla ngokubakho ukuhlanganisa idatha evela kwiinkqubo ze-FDC, iinkqubo ze-EES, njl.njl., ukuze kuhlalutywe ukuba ingxaki ibangelwa kukusilela kwezixhobo, ukuphambuka kwenkqubo, okanye izinto zangaphandle ezingqongileyo.

Uphuculo Oluqhubekayo: Usebenzisa idatha yembali ebhalwe yinkqubo ye-SPC, chonga iindawo ezibuthathaka kwinkqubo kwaye ucebise izicwangciso zophuculo. Umzekelo, kwinkqubo yokugrumba, hlalutya impembelelo yobomi be-ESC kunye neendlela zokucoca kwimijikelo yokugcinwa kwezixhobo kwaye uqhubeke nokuphucula iiparameter zokusebenza kwezixhobo.

6. Ityala lesicelo esisebenzayo

Njengomzekelo osebenzayo, masithi unoxanduva lwezixhobo zokugrumba i-E-MAX, kwaye i-chamber cathode ifumana ukuwohloka kwangaphambi kwexesha, nto leyo ekhokelela ekwandeni kwamaxabiso e-D0 (BARC defect). Ngokujonga amandla e-RF kunye nesantya se-etch kwinkqubo ye-SPC, uqaphela umkhwa apho ezi parameters ziphambuka kancinci kancinci kumaxabiso azo amiselweyo. Emva kokuba i-alamu ye-SPC iqalisiwe, udibanisa idatha evela kwinkqubo ye-FDC kwaye ugqibe kwelokuba ingxaki ibangelwa lulawulo lobushushu olungazinzanga ngaphakathi kwigumbi. Emva koko usebenzisa iindlela ezintsha zokucoca kunye namaqhinga okugcina, ekugqibeleni unciphisa ixabiso le-D0 ukusuka kwi-4.3 ukuya kwi-2.4, ngaloo ndlela uphucula umgangatho wemveliso.

7.KwiXINKEHUI ungayifumana.

Kwi-XINKEHUI, ungafumana i-wafer egqibeleleyo, nokuba yi-silicon wafer okanye i-SiC wafer. Sigxile ekunikezeleni ii-wafers ezikumgangatho ophezulu kumashishini ahlukeneyo, sigxile ekuchanekeni nasekusebenzeni kakuhle.